{"id":26496,"date":"2018-07-12T14:16:32","date_gmt":"2018-07-12T14:16:32","guid":{"rendered":"https:\/\/e6nanofab.consapsg.com\/?page_id=26496"},"modified":"2026-07-13T10:03:28","modified_gmt":"2026-07-13T10:03:28","slug":"nano-fabrication-and-process-capability","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/","title":{"rendered":"Nano Fabrication and Process Capability"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"26496\" class=\"elementor elementor-26496\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a9cf0bd elementor-section-full_width elementor-section-height-default elementor-section-height-default\" data-id=\"a9cf0bd\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-439cbb6\" data-id=\"439cbb6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-277e449 elementor-widget elementor-widget-shortcode\" data-id=\"277e449\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"shortcode.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-shortcode\">\n\t\t\t\t<p class=\"rs-p-wp-fix\"><\/p>\n\t\t\t\t<sr7-module data-alias=\"the-capability\" data-id=\"13\" id=\"SR7_13_1\" data-version=\"6.7.57\">\n\t\t\t\t\t<sr7-adjuster><\/sr7-adjuster>\n\t\t\t\t\t<sr7-content>\n\t\t\t\t\t\t<sr7-slide id=\"SR7_13_1-15\" data-key=\"15\">\n\t\t\t\t\t\t\t<sr7-bg id=\"SR7_13_1-15-slidebg\" class=\"sr7-layer\"><noscript><img decoding=\"async\" src=\"https:\/\/dev-e6nano-nus.pantheonsite.io\/wp-content\/uploads\/2018\/10\/capabilities.jpg\" alt=\"\" title=\"capabilities (Demo)\"><\/noscript><\/sr7-bg>\n\t\t\t\t\t\t<\/sr7-slide>\n\t\t\t\t\t\t<sr7-slide id=\"SR7_13_1-56\" data-key=\"56\">\n\t\t\t\t\t\t<\/sr7-slide>\n\t\t\t\t\t<\/sr7-content>\n\t\t\t\t<\/sr7-module>\n\t\t\t\t<script>\n\t\t\t\t\twindow.SR7 ??={};SR7.PMH ??={}; SR7.PMH[\"SR7_13_1\"] = {cn:100,state:false,fn: function() { if (window._tpt!==undefined && window._tpt.prepareModuleHeight !== undefined) {  _tpt.prepareModuleHeight({id:\"SR7_13_1\",el:[541,468,960,720],type:'hero',shdw:'0',gh:[541,468,960,720],gw:[1240,1024,778,480],vpt:['100px'],size:{fullWidth:true, fullHeight:false},mh:'0',onh:0,onw:0,bg:{color:'transparent'},plType:'-1',plColor:'#FFFFFF'});   SR7.PMH[\"SR7_13_1\"].state=true;} else if(SR7.PMH[\"SR7_13_1\"].cn-->0)\tsetTimeout( SR7.PMH[\"SR7_13_1\"].fn,19);}};SR7.PMH[\"SR7_13_1\" ].fn();\n\t\t\t\t<\/script>\n<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f9aae4c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f9aae4c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a7668bc\" data-id=\"a7668bc\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-dc07d84 uael-submenu-icon-plus uael-nav-menu__align-justify uael-link-redirect-child uael-nav-menu__breakpoint-tablet elementor-widget elementor-widget-uael-nav-menu\" data-id=\"dc07d84\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"uael-nav-menu.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-nav-menu uael-layout-vertical uael-nav-menu-layout\" data-layout=\"vertical\">\n\t\t\t\t<div role=\"button\" class=\"uael-nav-menu__toggle elementor-clickable\">\n\t\t\t\t\t<span class=\"screen-reader-text\">Main Menu<\/span>\n\t\t\t\t\t<div class=\"uael-nav-menu-icon\">\n\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-align-justify\"><\/i>\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<nav class=\"uael-nav-menu__layout-vertical uael-nav-menu__submenu-plus\" data-toggle-icon=\"&lt;i aria-hidden=&quot;true&quot; class=&quot;fas fa-align-justify&quot;&gt;&lt;\/i&gt;\" data-close-icon=\"&lt;i aria-hidden=&quot;true&quot; class=&quot;far fa-window-close&quot;&gt;&lt;\/i&gt;\" data-full-width=\"yes\"><ul id=\"menu-1-dc07d84\" class=\"uael-nav-menu\"><li id=\"menu-item-30881\" class=\"menu-item menu-item-type-custom menu-item-object-custom parent uael-creative-menu\"><a target=\"_blank\"rel=\"noopener\" href=\"http:\/\/www.yahoo.com\" class = \"uael-menu-item\">sam<\/a><\/li>\n<li id=\"menu-item-31029\" class=\"menu-item menu-item-type-custom menu-item-object-custom parent uael-creative-menu\"><a target=\"_blank\"rel=\"noopener\" href=\"http:\/\/www.yahoo.com\" class = \"uael-menu-item\">sam<\/a><\/li>\n<\/ul><\/nav>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-3fecc69\" data-id=\"3fecc69\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-5b50d5c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5b50d5c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-fff2456\" data-id=\"fff2456\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-332ad88 elementor-widget elementor-widget-text-editor\" data-id=\"332ad88\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Nanofabrication\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element thegem-vc-text thegem-custom-6334a1239f5a42187\">\n<div class=\"wpb_wrapper\">\n<div class=\"title-h2\"><span class=\"light\">WHAT SET US\u00a0<\/span>APART?<\/div>\n<\/div>\n<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-472efc1 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"472efc1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e9f5669 elementor-widget elementor-widget-text-editor\" data-id=\"e9f5669\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element  thegem-vc-text thegem-custom-6334a1239fd3e2296\"><div class=\"wpb_wrapper\"><ul><li>Nano-and-Micro mix and match integration.<\/li><li>Full flow technology prototyping comprising 100 to 200 steps supported by 30 to 40\u00a0 tools.<\/li><li>The 8\u201d wafer capability enables the prototypes to easily scale up to the production level.<\/li><\/ul><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ffe2513 elementor-widget elementor-widget-spacer\" data-id=\"ffe2513\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3737e47 elementor-widget elementor-widget-text-editor\" data-id=\"3737e47\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h2>NANO FABRICATION AND PROCESS CAPABILITY<\/h2>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4520f60 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"4520f60\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-62c5acc elementor-widget elementor-widget-text-editor\" data-id=\"62c5acc\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>E6NanoFab enables the creation of nanoscale structures and devices with top-down and bottom-up approaches.\u00a0The facility is equipped to provide maximum flexibility with capabilities to process a variety of materials such as CMOS compatible materials, magnetic materials, III-V &amp; III-N materials, 2D materials and flexible materials.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-27d0a2c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"27d0a2c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-0e7befd\" data-id=\"0e7befd\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-df258b0 elementor-widget elementor-widget-text-editor\" data-id=\"df258b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#DEPOSITION\">DEPOSITION\nAND\nGROWTH<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-989c31f\" data-id=\"989c31f\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-92f3c6f elementor-widget elementor-widget-text-editor\" data-id=\"92f3c6f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#annealing\">ANNEALING <br \/>PROCESS<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-e7676e9\" data-id=\"e7676e9\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5ac4d47 elementor-widget elementor-widget-text-editor\" data-id=\"5ac4d47\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><span style=\"color: #000000;\"><a style=\"color: #000000;\" href=\"#magnetic\">MAGNETIC <br \/>PROCESSING<\/a><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-d1632c6\" data-id=\"d1632c6\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9d21ee0 elementor-widget elementor-widget-text-editor\" data-id=\"9d21ee0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#Lithography\">LITHOGRAPHY<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-a9c2902\" data-id=\"a9c2902\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e26b5c7 elementor-widget elementor-widget-text-editor\" data-id=\"e26b5c7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#Etching\">ETCHING<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-7906dc2\" data-id=\"7906dc2\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7d343cb elementor-widget elementor-widget-text-editor\" data-id=\"7d343cb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#BEOL\">BEOL AND\nPACKAGING<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-f7224f4 elementor-widget elementor-widget-spacer\" data-id=\"f7224f4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4cddb1e elementor-widget elementor-widget-heading\" data-id=\"4cddb1e\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"DEPOSITION\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">THIN FILM DEPOSITION and MATERIAL GROWTH<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bd732f9 uael-post__link-complete-yes uael-equal__height-yes uael-post__cta-fullwidth-yes elementor-widget elementor-widget-uael-posts\" data-id=\"bd732f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" title=\"Atomic Layer Deposition (ALD) &#8211; BeneQ\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-42039\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\">\n\t\t\t\tAtomic Layer Deposition (ALD) &#8211; BeneQ\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" aria-labelledby=\"uael-post-42041\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-42041>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" title=\"Atomic Layer Deposition (ALD) &#8211; Picosun\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-41019\" alt=\"Picosun ALD photo1-cropped\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\">\n\t\t\t\tAtomic Layer Deposition (ALD) &#8211; Picosun\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" aria-labelledby=\"uael-post-34651\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34651>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth dl-deposition dry-lab wet-lab \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" title=\"Electron-Beam Evaporator &#8211; AJA UHV\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/E-Beam-Evaporator-225x300-225x300-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28837\" alt=\"Edward\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\">\n\t\t\t\tElectron-Beam Evaporator &#8211; AJA UHV\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" aria-labelledby=\"uael-post-35300\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35300>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth dl-deposition mbe the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" title=\"Molecular Beam Epitaxy (MBE) &#8211; ULVAC\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/MBE-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-35134\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\">\n\t\t\t\tMolecular Beam Epitaxy (MBE) &#8211; ULVAC\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" aria-labelledby=\"uael-post-34711\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34711>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" title=\"Plasma Enhanced Chemical Vapour Deposition (PECVD) &#8211; Oxford PlasmaPro 100\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29058\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\">\n\t\t\t\tPlasma Enhanced Chemical Vapour Deposition (PECVD) &#8211; Oxford PlasmaPro 100\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" aria-labelledby=\"uael-post-34657\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34657>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" title=\"Ultra High Vacuum E-Beam Evaporation\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-35951\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\">\n\t\t\t\tUltra High Vacuum E-Beam Evaporation\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" aria-labelledby=\"uael-post-34696\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34696>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" title=\"Ultra High Vacuum Metal and Dielectric Sputtering\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28981\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\">\n\t\t\t\tUltra High Vacuum Metal and Dielectric Sputtering\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" aria-labelledby=\"uael-post-34691\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34691>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e268a31 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"e268a31\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4b47348 elementor-widget elementor-widget-heading\" data-id=\"4b47348\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"annealing\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ANNEALING PROCESS<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-833577d uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"833577d\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   annealing-process l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" title=\"Furnace\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/10\/furnace-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-34957\" alt=\"furnace\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\">\n\t\t\t\tFurnace\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" aria-labelledby=\"uael-post-34610\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34610>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   annealing-process dl-others dry-lab the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" title=\"Rapid Thermal Annealing\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L2-CR_RTA-300x200-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-27994\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\">\n\t\t\t\tRapid Thermal Annealing\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" aria-labelledby=\"uael-post-34606\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34606>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   annealing-process l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" title=\"Rapid Thermal Processing (aka Vaccum Anneal &#8211; RTP)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28979\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\">\n\t\t\t\tRapid Thermal Processing (aka Vaccum Anneal &#8211; RTP)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" aria-labelledby=\"uael-post-34593\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34593>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db9310f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"db9310f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58704ba elementor-widget elementor-widget-heading\" data-id=\"58704ba\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"magnetic\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">MAGNETIC PROCESSING\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fd942bd uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"fd942bd\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   l1-cr magnetic-processing the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" title=\"SCIA Coat 200 &#8211; Ion Beam Deposition and Etching\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28971\" alt=\"SCIA Coat 200 Ion Beam Deposition and Etching\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\">\n\t\t\t\tSCIA Coat 200 &#8211; Ion Beam Deposition and Etching\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" aria-labelledby=\"uael-post-34670\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34670>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e61449 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"0e61449\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e98ea8 elementor-widget elementor-widget-heading\" data-id=\"0e98ea8\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Lithography\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">LITHOGRAPHY<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-46732f8 elementor-widget elementor-widget-text-editor\" data-id=\"46732f8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element  thegem-vc-text thegem-custom-6334a18f538b49482\"><div class=\"wpb_wrapper\"><p>Lithography is a process where a pattern written or transferred to a substrate. It uses light, ions or electron energy into photo and electron sensitive resists. At E6NanoFab, Electron-Beam Lithography, Laser-Writer, and Mask-Aligner tools serve to pattern a variety of materials from sub-10 nanometers up to 100\u2019s of microns over large sample areas.<\/p><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8532e21 uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"8532e21\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" title=\"Electron Beam Lithography Ultra High Performance &#8211; Raith\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/Raith-EBL-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-37060\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\">\n\t\t\t\tElectron Beam Lithography Ultra High Performance &#8211; Raith\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" aria-labelledby=\"uael-post-37029\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-37029>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" title=\"Laser Writer &#8211; Hiedelberg (Class 10) DWL 66+\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-Class10_Lithography_-Laser-Writer-DWL66-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28890\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\">\n\t\t\t\tLaser Writer &#8211; Hiedelberg (Class 10) DWL 66+\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34739\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34739>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" title=\"Microwriter- DMO Microwriter ML3 Pro\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-30819\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\">\n\t\t\t\tMicrowriter- DMO Microwriter ML3 Pro\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34744\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34744>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" title=\"Mask Aligner &#8211; SUSS MA8\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29028\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\">\n\t\t\t\tMask Aligner &#8211; SUSS MA8\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" aria-labelledby=\"uael-post-34749\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34749>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" title=\"Spin Coater (Class 10)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29073\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\">\n\t\t\t\tSpin Coater (Class 10)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34759\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34759>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" title=\"Solvent Wet Bench (Class 10)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29035\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\">\n\t\t\t\tSolvent Wet Bench (Class 10)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34774\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34774>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" title=\"Wet Processing (Class 10K)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-38639\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\">\n\t\t\t\tWet Processing (Class 10K)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" aria-labelledby=\"uael-post-34779\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34779>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" title=\"Hot Plate (Class 10)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-35431\" alt=\"HotplateCR10\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-256x254.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\">\n\t\t\t\tHot Plate (Class 10)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34764\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34764>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" title=\"Baking Oven (Class 10K)\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Oven-300x169-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28806\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\">\n\t\t\t\tBaking Oven (Class 10K)\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" aria-labelledby=\"uael-post-34769\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34769>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d2bcc65 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"d2bcc65\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-32be2f6 elementor-widget elementor-widget-heading\" data-id=\"32be2f6\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Etching\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ETCHING<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-78d13ec elementor-widget elementor-widget-text-editor\" data-id=\"78d13ec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication. E6NanoFab makes available dry and wet etching systems to support the diverse process requirement.<\/p><p><strong>Dry Etching<\/strong><\/p><p>Multi-chamber cluster tools such as ICP plasma etching and ion beam milling provide strong dry etching capabilities for various materials such as Si, III-V &amp; III-N, oxides, metals, polymers and others.<\/p><p><strong>Wet Etching<\/strong><\/p><p>Our dedicated wet-benches support several wet processes such as RCA, standard cleaning, and orientation dependent Si KOH etching.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-03fa2d0 elementor-widget elementor-widget-spacer\" data-id=\"03fa2d0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3e40c7c uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"3e40c7c\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   etching l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" title=\"Chemical Mechanical Planarization\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28251\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\">\n\t\t\t\tChemical Mechanical Planarization\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" aria-labelledby=\"uael-post-34794\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34794>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" title=\"Integrated ICP Etch Clustering System\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29059\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\">\n\t\t\t\tIntegrated ICP Etch Clustering System\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" aria-labelledby=\"uael-post-34787\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34787>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" title=\"Plasma Asher\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29057\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\">\n\t\t\t\tPlasma Asher\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" aria-labelledby=\"uael-post-34793\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34793>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" title=\"Plasma Cleaner &#8211; Vita\"><img loading=\"lazy\" decoding=\"async\" width=\"141\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/09\/VITA-141x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-30830\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\">\n\t\t\t\tPlasma Cleaner &#8211; Vita\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" aria-labelledby=\"uael-post-34902\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34902>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" title=\"Xef2 Etcher\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-41015\" alt=\"Xenon_Difluoride Xef2 Etcher -remove background\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-256x256.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\">\n\t\t\t\tXef2 Etcher\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" aria-labelledby=\"uael-post-34792\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34792>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cb0b278 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"cb0b278\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45a85e8 elementor-widget elementor-widget-heading\" data-id=\"45a85e8\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"BEOL\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">BEOL &amp; PAckaging<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ffae12b elementor-widget elementor-widget-text-editor\" data-id=\"ffae12b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The last mile of the nanofabrication process.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0a7b6d uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"e0a7b6d\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"BEOL\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   beol l5-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" title=\"Invacu Infrared Vacuum Reflex Oven\"><img loading=\"lazy\" decoding=\"async\" width=\"315\" height=\"492\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN.jpg\" class=\"attachment-full size-full wp-image-41485\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN.jpg 315w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN-192x300.jpg 192w\" sizes=\"(max-width: 315px) 100vw, 315px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\">\n\t\t\t\tInvacu Infrared Vacuum Reflex Oven\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" aria-labelledby=\"uael-post-41480\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-41480>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol l1-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" title=\"Motorized Die Bonder\"><img loading=\"lazy\" decoding=\"async\" width=\"187\" height=\"163\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder.png\" class=\"attachment-full size-full wp-image-35148\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\">\n\t\t\t\tMotorized Die Bonder\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" aria-labelledby=\"uael-post-34927\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34927>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol dl-beol \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" title=\"Wafer Dicer\"><img loading=\"lazy\" decoding=\"async\" width=\"188\" height=\"250\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/10\/L3-Accretech-Wafer-Dicer.jpg\" class=\"attachment-full size-full wp-image-29696\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\">\n\t\t\t\tWafer Dicer\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" aria-labelledby=\"uael-post-35228\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35228>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol dl-beol \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" title=\"Wire Bonder\"><img loading=\"lazy\" decoding=\"async\" width=\"499\" height=\"488\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993.jpg\" class=\"attachment-full size-full wp-image-29054\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993.jpg 499w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993-300x293.jpg 300w\" sizes=\"(max-width: 499px) 100vw, 499px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\">\n\t\t\t\tWire Bonder\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" aria-labelledby=\"uael-post-35266\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35266>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol wet-lab \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" title=\"X-Prep Automatic Milling, Grinding &#038; Polishing Machine\"><img loading=\"lazy\" decoding=\"async\" width=\"305\" height=\"137\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501.jpg\" class=\"attachment-full size-full wp-image-36110\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501.jpg 305w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501-300x135.jpg 300w\" sizes=\"(max-width: 305px) 100vw, 305px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\">\n\t\t\t\tX-Prep Automatic Milling, Grinding &#038; Polishing Machine\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" aria-labelledby=\"uael-post-41892\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-41892>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9b5bb58 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"9b5bb58\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8776fef elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"8776fef\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-75ea3f6\" data-id=\"75ea3f6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5386572 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"5386572\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/characterization-and-metrology\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"48\" height=\"32\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/eye-icon-grey.png\" class=\"attachment-thumbnail size-thumbnail wp-image-38907\" alt=\"view more\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-6f0c10e\" data-id=\"6f0c10e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5c70e94 elementor-widget elementor-widget-text-editor\" data-id=\"5c70e94\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/characterization-and-metrology\/\">Characterisation and metrology capability<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-56bd799 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"56bd799\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-de5671d\" data-id=\"de5671d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-771ff5f elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"771ff5f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"48\" height=\"32\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/eye-icon-grey.png\" class=\"attachment-thumbnail size-thumbnail wp-image-38907\" alt=\"view more\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-f4e994b\" data-id=\"f4e994b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-31bc8f6 elementor-widget elementor-widget-text-editor\" data-id=\"31bc8f6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">Other capability (2D material transfer, 3D printing, 4-point probe, laser micro-machining and etc.,)<\/a>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-d609889 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d609889\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-7d155f9\" data-id=\"7d155f9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-53f873f elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"53f873f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"131\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/back-to-top-icon-4-150x131.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-39030\" alt=\"\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a511351\" data-id=\"a511351\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bd73ca9 elementor-widget elementor-widget-text-editor\" data-id=\"bd73ca9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"#Nanofabrication\">Back to top<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a0b327 elementor-widget elementor-widget-spacer\" data-id=\"1a0b327\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fe637fe elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"fe637fe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Main Menu Deposition and Growth Atomic Layer Deposition (ALD) (Beneq) Atomic Layer Deposition (ALD) &#8211; Picosun Plasma Enhanced Chemical Vapour&#8230;<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":25399,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-26496","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=26496"}],"version-history":[{"count":41,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496\/revisions"}],"predecessor-version":[{"id":42496,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496\/revisions\/42496"}],"up":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/25399"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=26496"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}