{"id":26496,"date":"2018-07-12T14:16:32","date_gmt":"2018-07-12T14:16:32","guid":{"rendered":"https:\/\/e6nanofab.consapsg.com\/?page_id=26496"},"modified":"2026-07-30T09:34:03","modified_gmt":"2026-07-30T09:34:03","slug":"nano-fabrication-and-process-capability","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/","title":{"rendered":"Nano Fabrication and Process Capability"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"26496\" class=\"elementor elementor-26496\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-a9cf0bd elementor-section-full_width elementor-section-height-default elementor-section-height-default\" data-id=\"a9cf0bd\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-439cbb6\" data-id=\"439cbb6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-277e449 elementor-widget elementor-widget-shortcode\" data-id=\"277e449\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"shortcode.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-shortcode\">\n\t\t\t\t<p class=\"rs-p-wp-fix\"><\/p>\n\t\t\t\t<sr7-module data-alias=\"the-capability\" data-id=\"13\" id=\"SR7_13_1\" data-version=\"6.7.57\">\n\t\t\t\t\t<sr7-adjuster><\/sr7-adjuster>\n\t\t\t\t\t<sr7-content>\n\t\t\t\t\t\t<sr7-slide id=\"SR7_13_1-15\" data-key=\"15\">\n\t\t\t\t\t\t\t<sr7-bg id=\"SR7_13_1-15-slidebg\" class=\"sr7-layer\"><noscript><img 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].fn();\n\t\t\t\t<\/script>\n<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f9aae4c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"f9aae4c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a7668bc\" data-id=\"a7668bc\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-005458a uael-submenu-icon-plus uael-nav-menu__align-left uael-link-redirect-child uael-nav-menu__breakpoint-tablet uael-nav-menu-toggle-label-no elementor-widget elementor-widget-uael-nav-menu\" data-id=\"005458a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"uael-nav-menu.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-nav-menu uael-layout-vertical uael-nav-menu-layout\" data-layout=\"vertical\">\n\t\t\t\t<div role=\"button\" class=\"uael-nav-menu__toggle elementor-clickable\">\n\t\t\t\t\t<span class=\"screen-reader-text\">Main Menu<\/span>\n\t\t\t\t\t<div class=\"uael-nav-menu-icon\">\n\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-align-justify\"><\/i>\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<nav class=\"uael-nav-menu__layout-vertical uael-nav-menu__submenu-plus\" data-toggle-icon=\"&lt;i aria-hidden=&quot;true&quot; class=&quot;fas fa-align-justify&quot;&gt;&lt;\/i&gt;\" data-close-icon=\"&lt;i aria-hidden=&quot;true&quot; class=&quot;far fa-window-close&quot;&gt;&lt;\/i&gt;\" data-full-width=\"yes\"><ul id=\"menu-1-005458a\" class=\"uael-nav-menu\"><li id=\"menu-item-35598\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Deposition and Growth<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-42366\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" class = \"uael-sub-menu-item\">Atomic Layer Deposition (ALD) &#8211; BeneQ<\/a><\/li>\n\t<li id=\"menu-item-35516\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" class = \"uael-sub-menu-item\">Atomic Layer Deposition (ALD) &#8211; Picosun<\/a><\/li>\n\t<li id=\"menu-item-35517\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" class = \"uael-sub-menu-item\">Plasma Enhanced Chemical Vapour Deposition (PECVD) &#8211; Oxford PlasmaPro 100<\/a><\/li>\n\t<li id=\"menu-item-35519\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" class = \"uael-sub-menu-item\">Electron Beam Evaporator &#8211; AJA UHV<\/a><\/li>\n\t<li id=\"menu-item-38610\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" class = \"uael-sub-menu-item\">Sputtering System &#8211; AJA UHV \/ AJA ATC2400<\/a><\/li>\n\t<li id=\"menu-item-35520\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" class = \"uael-sub-menu-item\">Molecular Beam Epitaxy (MBE) &#8211; ULVAC<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35601\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Annealing Process<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35526\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" class = \"uael-sub-menu-item\">Horizontal Furnace &#8211; ULTECH<\/a><\/li>\n\t<li id=\"menu-item-35527\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" class = \"uael-sub-menu-item\">Rapid Thermal Processing (RTP) ULVAC MILA3000 \u200b<\/a><\/li>\n\t<li id=\"menu-item-35528\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" class = \"uael-sub-menu-item\">Rapid Thermal Processing (RTP) &#8211; Annealsys AS-One<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35686\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Magnetic Processing<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35550\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" class = \"uael-sub-menu-item\">Ion Beam Deposition and Etching -SCIA Coat 200<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35603\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Lithography<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35534\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" class = \"uael-sub-menu-item\">Baking Oven<\/a><\/li>\n\t<li id=\"menu-item-42899\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" class = \"uael-sub-menu-item\">Electron Beam Lithography (EBL) &#8211; Raith EBPG5200<\/a><\/li>\n\t<li id=\"menu-item-35533\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" class = \"uael-sub-menu-item\">Hot Plate<\/a><\/li>\n\t<li id=\"menu-item-35539\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" class = \"uael-sub-menu-item\">Laser Writer &#8211; DMO MicroWriter ML3 Pro<\/a><\/li>\n\t<li id=\"menu-item-35540\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" class = \"uael-sub-menu-item\">Laser Writer &#8211; Heidelberg DWL 66+<\/a><\/li>\n\t<li id=\"menu-item-35538\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" class = \"uael-sub-menu-item\">Mask Aligner &#8211; SUSS MA8<\/a><\/li>\n\t<li id=\"menu-item-42851\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/?p=42842\" class = \"uael-sub-menu-item\">Nanoimprinter &#8211; Nanonex NX-2000<\/a><\/li>\n\t<li id=\"menu-item-35536\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" class = \"uael-sub-menu-item\">Spin Coater<\/a><\/li>\n\t<li id=\"menu-item-35532\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" class = \"uael-sub-menu-item\">Solvent Wet Bench<\/a><\/li>\n\t<li id=\"menu-item-35535\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" class = \"uael-sub-menu-item\">Wet Processing<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35600\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Etching<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35543\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" class = \"uael-sub-menu-item\">Chemical Mechanical Planarisation (CMP) &#8211; Logitech Orbis<\/a><\/li>\n\t<li id=\"menu-item-35546\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" class = \"uael-sub-menu-item\">Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra<\/a><\/li>\n\t<li id=\"menu-item-35544\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" class = \"uael-sub-menu-item\">Plasma Asher &#8211; Samco PC-300<\/a><\/li>\n\t<li id=\"menu-item-38637\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" class = \"uael-sub-menu-item\">Plasma Cleaner &#8211; Femtoscience Vita 12<\/a><\/li>\n\t<li id=\"menu-item-35545\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" class = \"uael-sub-menu-item\">Xenon Difluoride (XeF2) Etcher &#8211; Penta Technology<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35604\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">BEOL and Packaging<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-42556\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" class = \"uael-sub-menu-item\">Automatic Milling, Grinding and Polishing Machine &#8211; X-Prep<\/a><\/li>\n\t<li id=\"menu-item-35556\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" class = \"uael-sub-menu-item\">Die Bonder &#8211; Fineplacer Sigma<\/a><\/li>\n\t<li id=\"menu-item-42557\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" class = \"uael-sub-menu-item\">Infrared Reflow Oven &#8211; Invacu VSU35<\/a><\/li>\n\t<li id=\"menu-item-35555\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" class = \"uael-sub-menu-item\">Semi Automatic Wafer Dicer &#8211; Accretech SS20<\/a><\/li>\n\t<li id=\"menu-item-35554\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" class = \"uael-sub-menu-item\">Wire Bonder &#8211; West Bond 7476E<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35605\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Characterisation and Metrology<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35617\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-force-microscopy-afm\/\" class = \"uael-sub-menu-item\">Atomic Force\/Scanning Probe Microscopy (AFM\/SPM) &#8211; Park NX20<\/a><\/li>\n\t<li id=\"menu-item-35616\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ellipsometer\/\" class = \"uael-sub-menu-item\">Ellipsometer &#8211; Semilab SE-2000<\/a><\/li>\n\t<li id=\"menu-item-38739\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fe-sem-ultra-high-resolution-cleanroom\/\" class = \"uael-sub-menu-item\">Field Emission Scanning Electron Microscope (FE-SEM) &#8211; Hitachi Regulus 8100<\/a><\/li>\n\t<li id=\"menu-item-35619\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem-ultra-high-resolution\/\" class = \"uael-sub-menu-item\">Field Emission Scanning Electron Microscope (FE-SEM) &#8211; Hitachi Regulus 8230<\/a><\/li>\n\t<li id=\"menu-item-35620\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem\/\" class = \"uael-sub-menu-item\">Focused Ion Beam Scanning Electron Microscope (FIB-SEM) &#8211; Tescan GAIA3<\/a><\/li>\n\t<li id=\"menu-item-35623\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raman-microscope\/\" class = \"uael-sub-menu-item\">Raman Microscope &#8211; Renishaw inVia<\/a><\/li>\n\t<li id=\"menu-item-35560\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/smoke\/\" class = \"uael-sub-menu-item\">Scanning Magneto-Optical Kerr Effect (SMOKE) Microscope &#8211; Evico Magnetics<\/a><\/li>\n\t<li id=\"menu-item-35624\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spm\/\" class = \"uael-sub-menu-item\">Surface Profiler &#8211; Bruker DektakXT<\/a><\/li>\n\t<li id=\"menu-item-35559\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/squid\/\" class = \"uael-sub-menu-item\">Superconducting Quantum Interfernce Device (SQUID) Magnetometer &#8211; Quantum Design MPMS3<\/a><\/li>\n\t<li id=\"menu-item-35558\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/vsm\/\" class = \"uael-sub-menu-item\">Vibrating Sample Magnetometer (VSM) &#8211; MicroSense EZ9<\/a><\/li>\n\t<li id=\"menu-item-35625\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xrd\/\" class = \"uael-sub-menu-item\">X-ray Diffractometer (XRD) &#8211; Rigaku SmartLab<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35684\" class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent parent uael-has-submenu uael-creative-menu\"><div class=\"uael-has-submenu-container\"><a class = \"uael-menu-item\">Others<span class='uael-menu-toggle sub-arrow uael-menu-child-0'><i class='fa'><\/i><\/span><\/a><\/div>\n<ul class=\"sub-menu\">\n\t<li id=\"menu-item-35905\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/2d-material-transfer-station-with-glove-box\/\" class = \"uael-sub-menu-item\">2D Material Transfer Station w Glovebox &#8211; HQ Graphene Vigor<\/a><\/li>\n\t<li id=\"menu-item-35680\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-printer-optomec-aerosol\/\" class = \"uael-sub-menu-item\">3D Aerosol Jet Printer &#8211; Optomec<\/a><\/li>\n\t<li id=\"menu-item-35681\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-two-photon-lithography-printer-nanoscribe-gt2\/\" class = \"uael-sub-menu-item\">3D Two-Photon Lithography Printer &#8211; Nanoscribe GT2<\/a><\/li>\n\t<li id=\"menu-item-35634\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/cryogenic-probe-station\/\" class = \"uael-sub-menu-item\">Cryogenic Probe Station &#8211; Semishare SCG-C-2<\/a><\/li>\n\t<li id=\"menu-item-35594\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/four-point-probe\/\" class = \"uael-sub-menu-item\">Four Point Probe Station &#8211; AIT<\/a><\/li>\n\t<li id=\"menu-item-35683\" class=\"menu-item menu-item-type-post_type menu-item-object-post uael-creative-menu\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-micro-machining-service\/\" class = \"uael-sub-menu-item\">Laser Micro-Machining Service<\/a><\/li>\n<\/ul>\n<\/li>\n<li id=\"menu-item-35690\" class=\"menu-item menu-item-type-custom menu-item-object-custom parent uael-creative-menu\"><a href=\"https:\/\/my.qreserve.com\/login\" class = \"uael-menu-item\">Tool Booking<\/a><\/li>\n<\/ul><\/nav>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-3fecc69\" data-id=\"3fecc69\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-5b50d5c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"5b50d5c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-fff2456\" data-id=\"fff2456\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-332ad88 elementor-widget elementor-widget-text-editor\" data-id=\"332ad88\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Nanofabrication\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element thegem-vc-text thegem-custom-6334a1239f5a42187\">\n<div class=\"wpb_wrapper\">\n<div class=\"title-h2\"><span class=\"light\">WHAT SET US\u00a0<\/span>APART?<\/div>\n<\/div>\n<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-472efc1 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"472efc1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e9f5669 elementor-widget elementor-widget-text-editor\" data-id=\"e9f5669\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element  thegem-vc-text thegem-custom-6334a1239fd3e2296\"><div class=\"wpb_wrapper\"><ul><li>Nano-and-Micro mix and match integration.<\/li><li>Full flow technology prototyping comprising 100 to 200 steps supported by 30 to 40\u00a0 tools.<\/li><li>The 8\u201d wafer capability enables the prototypes to easily scale up to the production level.<\/li><\/ul><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ffe2513 elementor-widget elementor-widget-spacer\" data-id=\"ffe2513\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3737e47 elementor-widget elementor-widget-text-editor\" data-id=\"3737e47\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<h2>NANO FABRICATION AND PROCESS CAPABILITY<\/h2>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4520f60 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"4520f60\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-62c5acc elementor-widget elementor-widget-text-editor\" data-id=\"62c5acc\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u00a0<\/p><p>E6NanoFab enables the creation of nanoscale structures and devices with top-down and bottom-up approaches.\u00a0The facility is equipped to provide maximum flexibility with capabilities to process a variety of materials such as CMOS compatible materials, magnetic materials, III-V &amp; III-N materials, 2D materials and flexible materials.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-27d0a2c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"27d0a2c\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-0e7befd\" data-id=\"0e7befd\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-df258b0 elementor-widget elementor-widget-text-editor\" data-id=\"df258b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#DEPOSITION\">DEPOSITION\nAND\nGROWTH<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-989c31f\" data-id=\"989c31f\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-92f3c6f elementor-widget elementor-widget-text-editor\" data-id=\"92f3c6f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#annealing\">ANNEALING <br \/>PROCESS<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-e7676e9\" data-id=\"e7676e9\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5ac4d47 elementor-widget elementor-widget-text-editor\" data-id=\"5ac4d47\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><span style=\"color: #000000;\"><a style=\"color: #000000;\" href=\"#magnetic\">MAGNETIC <br \/>PROCESSING<\/a><\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-d1632c6\" data-id=\"d1632c6\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9d21ee0 elementor-widget elementor-widget-text-editor\" data-id=\"9d21ee0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#Lithography\">LITHOGRAPHY<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-a9c2902\" data-id=\"a9c2902\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e26b5c7 elementor-widget elementor-widget-text-editor\" data-id=\"e26b5c7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#Etching\">ETCHING<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-16 elementor-inner-column elementor-element elementor-element-7906dc2\" data-id=\"7906dc2\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7d343cb elementor-widget elementor-widget-text-editor\" data-id=\"7d343cb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><a href=\"#BEOL\">BEOL AND\nPACKAGING<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-f7224f4 elementor-widget elementor-widget-spacer\" data-id=\"f7224f4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4cddb1e elementor-widget elementor-widget-heading\" data-id=\"4cddb1e\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"DEPOSITION\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">THIN FILM DEPOSITION and MATERIAL GROWTH<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bd732f9 uael-post__link-complete-yes uael-equal__height-yes uael-post__cta-fullwidth-yes elementor-widget elementor-widget-uael-posts\" data-id=\"bd732f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" title=\"Atomic Layer Deposition (ALD) &#8211; BeneQ\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-42039\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/ALD-BeneQ-1-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\">\n\t\t\t\tAtomic Layer Deposition (ALD) &#8211; BeneQ\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" target=\"_self\" aria-labelledby=\"uael-post-42041\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-42041>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" title=\"Atomic Layer Deposition (ALD) &#8211; Picosun\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-41019\" alt=\"Picosun ALD photo1-cropped\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Picosun-ALD-photo1-cropped-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\">\n\t\t\t\tAtomic Layer Deposition (ALD) &#8211; Picosun\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" target=\"_self\" aria-labelledby=\"uael-post-34651\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34651>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth dl-deposition dry-lab wet-lab \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" title=\"Electron-Beam Evaporator &#8211; AJA UHV\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/E-Beam-Evaporator-225x300-225x300-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28837\" alt=\"Edward\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\">\n\t\t\t\tElectron-Beam Evaporator &#8211; AJA UHV\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/e-beam-evaporator-2\/\" target=\"_self\" aria-labelledby=\"uael-post-35300\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35300>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" title=\"Inductively Coupled Plasma Reactive Ion Etcher &#8211; Oxford PlasmaPro 100 Cobralon\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29058\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\">\n\t\t\t\tInductively Coupled Plasma Reactive Ion Etcher &#8211; Oxford PlasmaPro 100 Cobralon\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" target=\"_self\" aria-labelledby=\"uael-post-34657\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34657>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth dl-deposition mbe the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" title=\"Molecular Beam Epitaxy (MBE) &#8211; ULVAC\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/MBE-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-35134\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\">\n\t\t\t\tMolecular Beam Epitaxy (MBE) &#8211; ULVAC\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" target=\"_self\" aria-labelledby=\"uael-post-34711\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34711>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-metal-and-dielectric-sputtering\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-metal-and-dielectric-sputtering\/\" target=\"_self\" title=\"Sputtering System &#8211; AJA ATC2400\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28981\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-metal-and-dielectric-sputtering\/\" target=\"_self\">\n\t\t\t\tSputtering System &#8211; AJA ATC2400\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-metal-and-dielectric-sputtering\/\" target=\"_self\" aria-labelledby=\"uael-post-34709\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34709>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" title=\"Sputtering System &#8211; AJA UHV\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28981\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_AJA-Sputter-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\">\n\t\t\t\tSputtering System &#8211; AJA UHV\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" target=\"_self\" aria-labelledby=\"uael-post-34691\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34691>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   deposition-and-growth l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" title=\"Ultra High Vacuum E-Beam Evaporation\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-35951\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/L1-CR_AJA-EBeam-1-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\">\n\t\t\t\tUltra High Vacuum E-Beam Evaporation\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" target=\"_self\" aria-labelledby=\"uael-post-34696\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34696>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e268a31 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"e268a31\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4b47348 elementor-widget elementor-widget-heading\" data-id=\"4b47348\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"annealing\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ANNEALING PROCESS<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-833577d uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"833577d\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   annealing-process l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" title=\"Horizontal Furnace &#8211; ULTECH\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/10\/furnace-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-34957\" alt=\"furnace\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\">\n\t\t\t\tHorizontal Furnace &#8211; ULTECH\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" target=\"_self\" aria-labelledby=\"uael-post-34610\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34610>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   annealing-process dl-others dry-lab the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" title=\"Rapid Thermal Processing &#8211;  ULVAC MILA3000 \u200b\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L2-CR_RTA-300x200-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-27994\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\">\n\t\t\t\tRapid Thermal Processing &#8211;  ULVAC MILA3000 \u200b\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" target=\"_self\" aria-labelledby=\"uael-post-34606\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34606>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   annealing-process l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" title=\"Rapid Thermal Processing &#8211;  Annealsys AS-One\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28979\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_RTP-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\">\n\t\t\t\tRapid Thermal Processing &#8211;  Annealsys AS-One\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" target=\"_self\" aria-labelledby=\"uael-post-34593\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34593>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db9310f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"db9310f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-58704ba elementor-widget elementor-widget-heading\" data-id=\"58704ba\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"magnetic\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">MAGNETIC PROCESSING\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fd942bd uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"fd942bd\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   l1-cr magnetic-processing the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" title=\"Ion Beam Deposition &#038; Etching &#8211;  SCIA Coat 200\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28971\" alt=\"SCIA Coat 200 Ion Beam Deposition and Etching\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\">\n\t\t\t\tIon Beam Deposition &#038; Etching &#8211;  SCIA Coat 200\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" target=\"_self\" aria-labelledby=\"uael-post-34670\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34670>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e61449 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"0e61449\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e98ea8 elementor-widget elementor-widget-heading\" data-id=\"0e98ea8\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Lithography\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">LITHOGRAPHY<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-46732f8 elementor-widget elementor-widget-text-editor\" data-id=\"46732f8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element  thegem-vc-text thegem-custom-6334a18f538b49482\"><div class=\"wpb_wrapper\"><p>Lithography is a process where a pattern written or transferred to a substrate. It uses light, ions or electron energy into photo and electron sensitive resists. At E6NanoFab, Electron-Beam Lithography, Laser-Writer, and Mask-Aligner tools serve to pattern a variety of materials from sub-10 nanometers up to 100\u2019s of microns over large sample areas.<\/p><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8532e21 uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"8532e21\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" title=\"Laser Writer &#8211; Heidelberg DWL 66+\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-Class10_Lithography_-Laser-Writer-DWL66-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28890\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\">\n\t\t\t\tLaser Writer &#8211; Heidelberg DWL 66+\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34739\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34739>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" title=\"Laser Writer &#8211; DMO MicroWriter ML3 Pro\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-30819\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\">\n\t\t\t\tLaser Writer &#8211; DMO MicroWriter ML3 Pro\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34744\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34744>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" title=\"Mask Aligner &#8211; SUSS MA8\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29028\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Mask-Aligner-MA8-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\">\n\t\t\t\tMask Aligner &#8211; SUSS MA8\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" target=\"_self\" aria-labelledby=\"uael-post-34749\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34749>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" title=\"Electron Beam Lithography (EBL) &#8211; Raith EBPG5200\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/Raith-EBL-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-37060\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\">\n\t\t\t\tElectron Beam Lithography (EBL) &#8211; Raith EBPG5200\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" target=\"_self\" aria-labelledby=\"uael-post-37029\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-37029>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" title=\"Spin Coater\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29073\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_Spin-Coater-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\">\n\t\t\t\tSpin Coater\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34759\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34759>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" title=\"Solvent Wet Bench\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29035\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1CR_Solvent-Wet-bench-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\">\n\t\t\t\tSolvent Wet Bench\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34774\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34774>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" title=\"Wet Processing\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-38639\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Wet-Processing_L2WL-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\">\n\t\t\t\tWet Processing\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" target=\"_self\" aria-labelledby=\"uael-post-34779\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34779>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   l1-cr lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" title=\"Hot Plate\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-35431\" alt=\"HotplateCR10\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Hotplate10-256x254.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\">\n\t\t\t\tHot Plate\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" target=\"_self\" aria-labelledby=\"uael-post-34764\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34764>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   lithography the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" title=\"Baking Oven\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Oven-300x169-1-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28806\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\">\n\t\t\t\tBaking Oven\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" target=\"_self\" aria-labelledby=\"uael-post-34769\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34769>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d2bcc65 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"d2bcc65\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-32be2f6 elementor-widget elementor-widget-heading\" data-id=\"32be2f6\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"Etching\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ETCHING<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-78d13ec elementor-widget elementor-widget-text-editor\" data-id=\"78d13ec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication. E6NanoFab makes available dry and wet etching systems to support the diverse process requirement.<\/p><p><strong>Dry Etching<\/strong><\/p><p>Multi-chamber cluster tools such as ICP plasma etching and ion beam milling provide strong dry etching capabilities for various materials such as Si, III-V &amp; III-N, oxides, metals, polymers and others.<\/p><p><strong>Wet Etching<\/strong><\/p><p>Our dedicated wet-benches support several wet processes such as RCA, standard cleaning, and orientation dependent Si KOH etching.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-03fa2d0 elementor-widget elementor-widget-spacer\" data-id=\"03fa2d0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3e40c7c uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"3e40c7c\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   etching l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" title=\"Chemical Mechanical Planarization &#8211; Logitech Orbis\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28251\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\">\n\t\t\t\tChemical Mechanical Planarization &#8211; Logitech Orbis\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" aria-labelledby=\"uael-post-34794\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34794>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" title=\"Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29059\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\">\n\t\t\t\tInductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" aria-labelledby=\"uael-post-34787\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34787>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" title=\"Plasma Asher &#8211; Samco PC-300\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29057\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\">\n\t\t\t\tPlasma Asher &#8211; Samco PC-300\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" aria-labelledby=\"uael-post-34793\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34793>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" title=\"Plasma Cleaner &#8211; Femtoscience Vita 12\"><img loading=\"lazy\" decoding=\"async\" width=\"141\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/09\/VITA-141x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-30830\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\">\n\t\t\t\tPlasma Cleaner &#8211; Femtoscience Vita 12\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" aria-labelledby=\"uael-post-34902\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34902>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" title=\"Xenon Difluoride (XeF2) Etcher &#8211; Penta Technology\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-41015\" alt=\"Xenon_Difluoride Xef2 Etcher -remove background\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-256x256.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\">\n\t\t\t\tXenon Difluoride (XeF2) Etcher &#8211; Penta Technology\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" aria-labelledby=\"uael-post-34792\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34792>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cb0b278 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"cb0b278\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45a85e8 elementor-widget elementor-widget-heading\" data-id=\"45a85e8\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"BEOL\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">BEOL &amp; PAckaging<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ffae12b elementor-widget elementor-widget-text-editor\" data-id=\"ffae12b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The last mile of the nanofabrication process.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e0a7b6d uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"e0a7b6d\" data-element_type=\"widget\" data-e-type=\"widget\" id=\"BEOL\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26496\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   beol wet-lab \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" title=\"Automatic Milling, Grinding and Polishing Machine &#8211; X-Prep\"><img loading=\"lazy\" decoding=\"async\" width=\"902\" height=\"1021\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/X-Prep_15-9650-lighter-panel.jpg\" class=\"attachment-full size-full wp-image-42906\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/X-Prep_15-9650-lighter-panel.jpg 902w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/X-Prep_15-9650-lighter-panel-265x300.jpg 265w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/X-Prep_15-9650-lighter-panel-768x869.jpg 768w\" sizes=\"(max-width: 902px) 100vw, 902px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\">\n\t\t\t\tAutomatic Milling, Grinding and Polishing Machine &#8211; X-Prep\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" target=\"_self\" aria-labelledby=\"uael-post-41892\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-41892>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol l1-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" title=\"Die Bonder &#8211; Fineplacer Sigma\"><img loading=\"lazy\" decoding=\"async\" width=\"305\" height=\"137\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501.jpg\" class=\"attachment-full size-full wp-image-36110\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501.jpg 305w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/Die-Bonder-e1679988927501-300x135.jpg 300w\" sizes=\"(max-width: 305px) 100vw, 305px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\">\n\t\t\t\tDie Bonder &#8211; Fineplacer Sigma\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" target=\"_self\" aria-labelledby=\"uael-post-34927\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34927>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol l5-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" title=\"Infrared Reflow Oven &#8211; Invacu VSU35\"><img loading=\"lazy\" decoding=\"async\" width=\"315\" height=\"492\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN.jpg\" class=\"attachment-full size-full wp-image-41485\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN.jpg 315w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/03\/SHINE_INVACU-INFRARED-VACUUM-REFLOW-OVEN-192x300.jpg 192w\" sizes=\"(max-width: 315px) 100vw, 315px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\">\n\t\t\t\tInfrared Reflow Oven &#8211; Invacu VSU35\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" target=\"_self\" aria-labelledby=\"uael-post-41480\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-41480>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol dl-beol \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" title=\"Semi Automatic Wafer Dicer &#8211; Accretech SS20\"><img loading=\"lazy\" decoding=\"async\" width=\"188\" height=\"250\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/10\/L3-Accretech-Wafer-Dicer.jpg\" class=\"attachment-full size-full wp-image-29696\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\">\n\t\t\t\tSemi Automatic Wafer Dicer &#8211; Accretech SS20\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" target=\"_self\" aria-labelledby=\"uael-post-35228\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35228>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   beol dl-beol \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-enabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-enabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" title=\"Wire Bonder &#8211; West Bond 7476E\"><img loading=\"lazy\" decoding=\"async\" width=\"499\" height=\"488\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993.jpg\" class=\"attachment-full size-full wp-image-29054\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993.jpg 499w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Wirebonder-e1682588066993-300x293.jpg 300w\" sizes=\"(max-width: 499px) 100vw, 499px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-enabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\">\n\t\t\t\tWire Bonder &#8211; West Bond 7476E\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" target=\"_self\" aria-labelledby=\"uael-post-35266\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-35266>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9b5bb58 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"9b5bb58\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8776fef elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"8776fef\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-75ea3f6\" data-id=\"75ea3f6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5386572 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"5386572\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/characterization-and-metrology\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"48\" height=\"32\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/eye-icon-grey.png\" class=\"attachment-thumbnail size-thumbnail wp-image-38907\" alt=\"view more\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-6f0c10e\" data-id=\"6f0c10e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5c70e94 elementor-widget elementor-widget-text-editor\" data-id=\"5c70e94\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/characterization-and-metrology\/\">Characterisation and metrology capability<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-56bd799 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"56bd799\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-de5671d\" data-id=\"de5671d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-771ff5f elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"771ff5f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"48\" height=\"32\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/eye-icon-grey.png\" class=\"attachment-thumbnail size-thumbnail wp-image-38907\" alt=\"view more\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-f4e994b\" data-id=\"f4e994b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-31bc8f6 elementor-widget elementor-widget-text-editor\" data-id=\"31bc8f6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">Other capability (2D material transfer, 3D printing, 4-point probe, laser micro-machining and etc.,)<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-d609889 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d609889\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-7d155f9\" data-id=\"7d155f9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-53f873f elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"53f873f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"131\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/back-to-top-icon-4-150x131.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-39030\" alt=\"\" \/>\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a511351\" data-id=\"a511351\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bd73ca9 elementor-widget elementor-widget-text-editor\" data-id=\"bd73ca9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"#Nanofabrication\">Back to top<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a0b327 elementor-widget elementor-widget-spacer\" data-id=\"1a0b327\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fe637fe elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"fe637fe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Main Menu Deposition and Growth Atomic Layer Deposition (ALD) &#8211; BeneQ Atomic Layer Deposition (ALD) &#8211; Picosun Plasma Enhanced Chemical&#8230;<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":25399,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-26496","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=26496"}],"version-history":[{"count":62,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496\/revisions"}],"predecessor-version":[{"id":42858,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496\/revisions\/42858"}],"up":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/25399"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=26496"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}