{"id":26520,"date":"2018-07-12T15:33:10","date_gmt":"2018-07-12T15:33:10","guid":{"rendered":"https:\/\/e6nanofab.consapsg.com\/?page_id=26520"},"modified":"2023-03-28T09:48:32","modified_gmt":"2023-03-28T09:48:32","slug":"etching","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/etching\/","title":{"rendered":"Etching"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"26520\" class=\"elementor elementor-26520\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-d9fd5bb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d9fd5bb\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a662b98\" data-id=\"a662b98\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-277ea9e elementor-nav-menu__text-align-aside elementor-widget elementor-widget-nav-menu\" data-id=\"277ea9e\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;layout&quot;:&quot;dropdown&quot;,&quot;submenu_icon&quot;:{&quot;value&quot;:&quot;&lt;i class=\\&quot;fas fa-angle-down\\&quot; aria-hidden=\\&quot;true\\&quot;&gt;&lt;\\\/i&gt;&quot;,&quot;library&quot;:&quot;fa-solid&quot;}}\" data-widget_type=\"nav-menu.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t<nav class=\"elementor-nav-menu--dropdown elementor-nav-menu__container\" aria-hidden=\"true\">\n\t\t\t\t<ul id=\"menu-2-277ea9e\" class=\"elementor-nav-menu\"><li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35598\"><a class=\"elementor-item\" tabindex=\"-1\">Deposition and Growth<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-42366\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald-beneq\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Atomic Layer Deposition (ALD) &#8211; BeneQ<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35516\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Atomic Layer Deposition (ALD) &#8211; Picosun<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35517\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Enhanced Chemical Vapour Deposition (PECVD) &#8211; Oxford PlasmaPro 100<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35519\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Electron Beam Evaporator &#8211; AJA UHV<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38610\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Sputtering System &#8211; AJA UHV \/ AJA ATC2400<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35520\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Molecular Beam Epitaxy (MBE) &#8211; ULVAC<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35601\"><a class=\"elementor-item\" tabindex=\"-1\">Annealing Process<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35526\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Horizontal Furnace &#8211; ULTECH<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35527\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Rapid Thermal Processing (RTP) ULVAC MILA3000 \u200b<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35528\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Rapid Thermal Processing (RTP) &#8211; Annealsys AS-One<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35686\"><a class=\"elementor-item\" tabindex=\"-1\">Magnetic Processing<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35550\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ion Beam Deposition and Etching -SCIA Coat 200<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35603\"><a class=\"elementor-item\" tabindex=\"-1\">Lithography<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35534\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Baking Oven<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-42899\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raith-ultra-high-performance-electron-beam-lithography\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Electron Beam Lithography (EBL) &#8211; Raith EBPG5200<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35533\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Hot Plate<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35539\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Laser Writer &#8211; DMO MicroWriter ML3 Pro<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35540\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Laser Writer &#8211; Heidelberg DWL 66+<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35538\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Mask Aligner &#8211; SUSS MA8<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-42851\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/nanoimprinter-nanonex-nx-2000\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Nanoimprinter &#8211; Nanonex NX-2000<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35536\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Spin Coater<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35532\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Solvent Wet Bench<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35535\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Wet Processing<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35600\"><a class=\"elementor-item\" tabindex=\"-1\">Etching<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35543\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Chemical Mechanical Planarisation (CMP) &#8211; Logitech Orbis<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35546\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35544\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Asher &#8211; Samco PC-300<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38637\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Cleaner &#8211; Femtoscience Vita 12<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35545\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Xenon Difluoride (XeF2) Etcher &#8211; Penta Technology<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35604\"><a class=\"elementor-item\" tabindex=\"-1\">BEOL and Packaging<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-42556\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/x-prep-automatic-milling-grinding-polishing-machine\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Automatic Milling, Grinding and Polishing Machine &#8211; X-Prep<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35556\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Die Bonder &#8211; Fineplacer Sigma<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-42557\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/invacu-infrared-vacuum-reflex-oven\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Infrared Reflow Oven &#8211; Invacu VSU35<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35555\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Semi Automatic Wafer Dicer &#8211; Accretech SS20<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35554\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Wire Bonder &#8211; West Bond 7476E<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35605\"><a class=\"elementor-item\" tabindex=\"-1\">Characterisation and Metrology<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35617\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-force-microscopy-afm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Atomic Force\/Scanning Probe Microscopy (AFM\/SPM) &#8211; Park NX20<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35616\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ellipsometer\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ellipsometer &#8211; Semilab SE-2000<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38739\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fe-sem-ultra-high-resolution-cleanroom\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Field Emission Scanning Electron Microscope (FE-SEM) &#8211; Hitachi Regulus 8100<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35619\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem-ultra-high-resolution\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Field Emission Scanning Electron Microscope (FE-SEM) &#8211; Hitachi Regulus 8230<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35620\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Focused Ion Beam Scanning Electron Microscope (FIB-SEM) &#8211; Tescan GAIA3<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35623\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raman-microscope\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Raman Microscope &#8211; Renishaw inVia<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35560\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/smoke\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Scanning Magneto-Optical Kerr Effect (SMOKE) Microscope &#8211; Evico Magnetics<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35624\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Surface Profiler &#8211; Bruker DektakXT<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35559\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/squid\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Superconducting Quantum Interfernce Device (SQUID) Magnetometer &#8211; Quantum Design MPMS3<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35558\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/vsm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Vibrating Sample Magnetometer (VSM) &#8211; MicroSense EZ9<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35625\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xrd\/\" class=\"elementor-sub-item\" tabindex=\"-1\">X-ray Diffractometer (XRD) &#8211; Rigaku SmartLab<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35684\"><a class=\"elementor-item\" tabindex=\"-1\">Others<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35905\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/2d-material-transfer-station-with-glove-box\/\" class=\"elementor-sub-item\" tabindex=\"-1\">2D Material Transfer Station w Glovebox &#8211; HQ Graphene Vigor<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35680\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-printer-optomec-aerosol\/\" class=\"elementor-sub-item\" tabindex=\"-1\">3D Aerosol Jet Printer &#8211; Optomec<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35681\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-two-photon-lithography-printer-nanoscribe-gt2\/\" class=\"elementor-sub-item\" tabindex=\"-1\">3D Two-Photon Lithography Printer &#8211; Nanoscribe GT2<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35634\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/cryogenic-probe-station\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Cryogenic Probe Station &#8211; Semishare SCG-C-2<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35594\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/four-point-probe\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Four Point Probe Station &#8211; AIT<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35683\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-micro-machining-service\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Laser Micro-Machining Service<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-35690\"><a href=\"https:\/\/my.qreserve.com\/login\" class=\"elementor-item\" tabindex=\"-1\">Tool Booking<\/a><\/li>\n<\/ul>\t\t\t<\/nav>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-5894724\" data-id=\"5894724\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-60da9b3 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"60da9b3\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-8cbc356\" data-id=\"8cbc356\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-fd66602 elementor-widget elementor-widget-heading\" data-id=\"fd66602\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">ETCHING<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-afc7bfb elementor-widget elementor-widget-text-editor\" data-id=\"afc7bfb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<div class=\"wpb_text_column wpb_content_element thegem-vc-text thegem-custom-6334a1239fd3e2296\"><div class=\"wpb_wrapper\"><p>Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication.\u00a0 E6NanoFab makes available dry and wet etching systems to support the diverse process requirement.<\/p><p><strong>Dry Etching<\/strong><\/p><p>Multi-chamber cluster tools such as ICP plasma etching and ion beam milling provide strong dry etching capabilities for various materials such as Si, III-V &amp; III-N, oxides, metals, polymers and others.<\/p><p><strong>Wet Etching<\/strong><\/p><p>Our dedicated wet-benches support several wet processes such as RCA, standard cleaning, and orientation dependent Si KOH etching.<\/p><\/div><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fc51f70 uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"fc51f70\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26520\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-disabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-disabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" title=\"Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29059\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-disabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\">\n\t\t\t\tInductively Coupled Plasma Reactive Ion Etcher (ICP RIE) &#8211; Oxford PlasmaPro 100 Cobra\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" aria-labelledby=\"uael-post-34787\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34787>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-disabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-disabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" title=\"Xenon Difluoride (XeF2) Etcher &#8211; Penta Technology\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-41015\" alt=\"Xenon_Difluoride Xef2 Etcher -remove background\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-256x256.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-disabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\">\n\t\t\t\tXenon Difluoride (XeF2) Etcher &#8211; Penta Technology\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" aria-labelledby=\"uael-post-34792\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34792>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-disabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-disabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" title=\"Plasma Asher &#8211; Samco PC-300\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29057\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-disabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\">\n\t\t\t\tPlasma Asher &#8211; Samco PC-300\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" aria-labelledby=\"uael-post-34793\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34793>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-disabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-disabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" title=\"Chemical Mechanical Planarization &#8211; Logitech Orbis\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28251\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-disabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\">\n\t\t\t\tChemical Mechanical Planarization &#8211; Logitech Orbis\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" aria-labelledby=\"uael-post-34794\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34794>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr \">\n\t<div class=\"uael-post__bg-wrap uael-bg-wrap-disabled \">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap uael-inner-wrap-disabled\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" title=\"Plasma Cleaner &#8211; Femtoscience Vita 12\"><img loading=\"lazy\" decoding=\"async\" width=\"141\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/09\/VITA-141x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-30830\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap uael-content-wrap-disabled\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\">\n\t\t\t\tPlasma Cleaner &#8211; Femtoscience Vita 12\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" aria-labelledby=\"uael-post-34902\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34902>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>ETCHING Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication.\u00a0 E6NanoFab makes available dry and&#8230;<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":26496,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-fullwidth.php","meta":{"footnotes":""},"class_list":["post-26520","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=26520"}],"version-history":[{"count":16,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520\/revisions"}],"predecessor-version":[{"id":37212,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520\/revisions\/37212"}],"up":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=26520"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}