{"id":26520,"date":"2018-07-12T15:33:10","date_gmt":"2018-07-12T15:33:10","guid":{"rendered":"https:\/\/e6nanofab.consapsg.com\/?page_id=26520"},"modified":"2023-03-28T09:48:32","modified_gmt":"2023-03-28T09:48:32","slug":"etching","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/etching\/","title":{"rendered":"Etching"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"26520\" class=\"elementor elementor-26520\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-d9fd5bb elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"d9fd5bb\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a662b98\" data-id=\"a662b98\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-277ea9e elementor-nav-menu__text-align-aside elementor-widget elementor-widget-nav-menu\" data-id=\"277ea9e\" data-element_type=\"widget\" data-settings=\"{&quot;layout&quot;:&quot;dropdown&quot;,&quot;submenu_icon&quot;:{&quot;value&quot;:&quot;&lt;i class=\\&quot;fas fa-angle-down\\&quot;&gt;&lt;\\\/i&gt;&quot;,&quot;library&quot;:&quot;fa-solid&quot;}}\" data-widget_type=\"nav-menu.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<link rel=\"stylesheet\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/plugins\/elementor-pro\/assets\/css\/widget-nav-menu.min.css\">\t\t\t<nav class=\"elementor-nav-menu--dropdown elementor-nav-menu__container\" aria-hidden=\"true\">\n\t\t\t\t<ul id=\"menu-2-277ea9e\" class=\"elementor-nav-menu\"><li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35598\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#DEPOSITION\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">Deposition and Growth<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35516\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Atomic Layer Deposition (ALD)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35517\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Enhanced Chemical Vapour Deposition (PECVD)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35519\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vacuum-e-beam-evaporation\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ultra High Vacuum E-Beam Evaporation<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38610\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ultra-high-vaccum-metal-and-dielectric-sputtering\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ultra High Vaccum Metal and Dielectric Sputtering<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35521\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/?p=34704\" class=\"elementor-sub-item\" tabindex=\"-1\">Thermal Evaporator [Edward]<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35520\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/molecular-beam-epitaxy-mbe-system-for-the-growth-of-a-range-of-group-iii-v-ii-iv-materials\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Molecular Beam Epitaxy (MBE) System for Growth of Group III-V\/II-IV Materials<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35601\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#annealing\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">Annealing Process<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35526\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/furnance\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Furnace<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35527\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-annealing\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Rapid Thermal Annealing<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35528\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/rapid-thermal-processing-aka-vaccum-anneal-rtp\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Rapid Thermal Processing (aka Vaccum Anneal)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35525\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/magnetic-annealing-system-2\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Magnetic Annealing System<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35686\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#magnetic\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">Magnetic Processing<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35550\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ion Beam Deposition and Etching -SCIA Coat 200<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35548\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/?p=34717\" class=\"elementor-sub-item\" tabindex=\"-1\">Multi Chamber Sputtering System &#8211; Magest S200<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35549\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/magnetic-annealing-system-2\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Magnetic Annealing System<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35603\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#Lithography\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">Lithography<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35541\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ellionix-electron-beam-lithography-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Electron Beam Lithography \u2013 Ellionix<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35540\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-writer-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Laser Writer &#8211; Hiedelberg (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35539\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Microwriter- Durham Magneto Optics Ml3 Pro (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35538\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma8-class-100\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Mask Aligner MA8 (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35537\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma6-class-10k\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Mask Aligner MA6  (Class 10K)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35535\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wet-processing-class-10k\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Wet Processing (Class 10K)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35532\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/solvent-wet-bench-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Solvent Wet Bench (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35536\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spin-coater-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Spin Coater (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35533\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/hot-plate-class-10\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Hot Plate (Class 10)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35534\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/baking-oven-class-10k\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Baking Oven (Class 10K)<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35600\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#Etching\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">Etching<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35546\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Integrated ICP Etch Clustering System<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35544\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Asher<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38637\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Plasma Cleaner<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35545\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" class=\"elementor-sub-item\" tabindex=\"-1\">XeF2 Etcher<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35543\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Chemical Mechanical Planarization<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35604\"><a href=\"\/e6nanofab\/the-capability\/nano-fabrication-and-process-capability\/#BEOL\" class=\"elementor-item elementor-item-anchor\" tabindex=\"-1\">BEOL and Packaging<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35556\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/motorized-die-bonder\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Motorized Die Bonder<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35554\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wire-bonder\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Wire Bonder<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35555\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wafer-dicer\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Wafer Dicer<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35605\"><a href=\"\/e6nanofab\/the-capability\/characterization-and-metrology\/\" class=\"elementor-item\" tabindex=\"-1\">Characterisation and Metrology<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35617\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-force-microscopy-afm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Atomic Force Microscopy (AFM)<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-38739\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fe-sem-ultra-high-resolution-cleanroom\/\" class=\"elementor-sub-item\" tabindex=\"-1\">FE-SEM (Ultra High Resolution) \u2013 Cleanroom<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35619\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem-ultra-high-resolution\/\" class=\"elementor-sub-item\" tabindex=\"-1\">FE-SEM (Ultra High Resolution) \u2013 Dry Lab<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35616\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/ellipsometer\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Ellipsometer<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35620\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem\/\" class=\"elementor-sub-item\" tabindex=\"-1\">FIB-SEM<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35623\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/raman-microscope\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Raman Microscope<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35560\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/smoke\/\" class=\"elementor-sub-item\" tabindex=\"-1\">S-MOKE<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35624\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/spm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">SPM<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35559\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/squid\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Squid<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35618\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/surface-profiler\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Surface Profiler<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35558\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/vsm\/\" class=\"elementor-sub-item\" tabindex=\"-1\">VSM<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35625\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xrd\/\" class=\"elementor-sub-item\" tabindex=\"-1\">XRD<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-parent menu-item-35684\"><a href=\"\/e6nanofab\/the-capability\/3d-printing-others\/\" class=\"elementor-item\" tabindex=\"-1\">Others<\/a>\n<ul class=\"sub-menu elementor-nav-menu--dropdown\">\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35634\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/cryogenic-probe-station\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Cryogenic Probe Station<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35594\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/four-point-probe\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Four Point Probe<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35680\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-printer-optomec-aerosol\/\" class=\"elementor-sub-item\" tabindex=\"-1\">3D Printer \u2013 Optomec Aerosol<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35681\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/3d-two-photon-lithography-printer-nanoscribe-gt2\/\" class=\"elementor-sub-item\" tabindex=\"-1\">3D Two-Photon Lithography Printer \u2013 Nanoscribe Gt2<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35905\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/2d-material-transfer-station-with-glove-box\/\" class=\"elementor-sub-item\" tabindex=\"-1\">2D Material Transfer Station With Glove Box<\/a><\/li>\n\t<li class=\"menu-item menu-item-type-post_type menu-item-object-post menu-item-35683\"><a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/laser-micro-machining-service\/\" class=\"elementor-sub-item\" tabindex=\"-1\">Laser Micro-Machining Service<\/a><\/li>\n<\/ul>\n<\/li>\n<li class=\"menu-item menu-item-type-custom menu-item-object-custom menu-item-35690\"><a href=\"https:\/\/my.qreserve.com\/login\" class=\"elementor-item\" tabindex=\"-1\">Tool Booking<\/a><\/li>\n<\/ul>\t\t\t<\/nav>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-5894724\" data-id=\"5894724\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-60da9b3 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"60da9b3\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-8cbc356\" data-id=\"8cbc356\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-fd66602 elementor-widget elementor-widget-heading\" data-id=\"fd66602\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h2 class=\"elementor-heading-title elementor-size-default\">ETCHING<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-afc7bfb elementor-widget elementor-widget-text-editor\" data-id=\"afc7bfb\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<div class=\"wpb_text_column wpb_content_element thegem-vc-text thegem-custom-6334a1239fd3e2296\"><div class=\"wpb_wrapper\"><p>Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication.\u00a0 E6NanoFab makes available dry and wet etching systems to support the diverse process requirement.<\/p><p><strong>Dry Etching<\/strong><\/p><p>Multi-chamber cluster tools such as ICP plasma etching and ion beam milling provide strong dry etching capabilities for various materials such as Si, III-V &amp; III-N, oxides, metals, polymers and others.<\/p><p><strong>Wet Etching<\/strong><\/p><p>Our dedicated wet-benches support several wet processes such as RCA, standard cleaning, and orientation dependent Si KOH etching.<\/p><\/div><\/div>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fc51f70 uael-post__link-complete-yes uael-equal__height-yes elementor-widget elementor-widget-uael-posts\" data-id=\"fc51f70\" data-element_type=\"widget\" data-settings=\"{&quot;classic_slides_to_show&quot;:3,&quot;classic_slides_to_show_tablet&quot;:2,&quot;classic_slides_to_show_mobile&quot;:1,&quot;classic_show_filters&quot;:&quot;no&quot;}\" data-widget_type=\"uael-posts.classic\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"uael-post__header\">\n\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__body\">\n\t\t\t\n\t\t\n\t\t<div class=\"uael-blog-terms-position- uael-post-image-top uael-post-grid uael-posts\" data-query-type=\"custom\" data-structure=\"normal\" data-layout=\"\" data-page=\"26520\" data-skin=\"classic\" data-filter-default=\"\" data-offset-top=\"30\" >\n\n\t\t\t\t\t\t\t<div class=\"uael-post-grid__inner uael-post__columns-3 uael-post__columns-tablet-2 uael-post__columns-mobile-1\">\n\t\t\t\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap\">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" title=\"Integrated ICP Etch Clustering System\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29059\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\">\n\t\t\t\tIntegrated ICP Etch Clustering System\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/\" target=\"_self\" aria-labelledby=\"uael-post-34787\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34787>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching the-capabilities \">\n\t<div class=\"uael-post__bg-wrap\">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" title=\"Xef2 Etcher\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-41015\" alt=\"Xenon_Difluoride Xef2 Etcher -remove background\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-256x256.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\">\n\t\t\t\tXef2 Etcher\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/\" target=\"_self\" aria-labelledby=\"uael-post-34792\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34792>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l5-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap\">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" title=\"Plasma Asher\"><img decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-29057\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\">\n\t\t\t\tPlasma Asher\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/\" target=\"_self\" aria-labelledby=\"uael-post-34793\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34793>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr the-capabilities \">\n\t<div class=\"uael-post__bg-wrap\">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" title=\"Chemical Mechanical Planarization\"><img loading=\"lazy\" decoding=\"async\" width=\"150\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg\" class=\"attachment-thumbnail size-thumbnail wp-image-28251\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2018\/12\/L1-CR-CMP-tool-close-up-w-people_medium-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\">\n\t\t\t\tChemical Mechanical Planarization\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemical-mechanical-planarization\/\" target=\"_self\" aria-labelledby=\"uael-post-34794\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34794>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\n<div class=\"uael-post-wrapper   etching l1-cr \">\n\t<div class=\"uael-post__bg-wrap\">\n\n\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" class=\"uael-post__complete-box-overlay\" aria-label=\"Link Complete Box\"><\/a>\n\t\t\t\t\n\t\t<div class=\"uael-post__inner-wrap\">\n\n\t\t\t\t<div class=\"uael-post__thumbnail\">\n\t\t\t\n\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" title=\"Plasma Cleaner &#8211; Vita\"><img loading=\"lazy\" decoding=\"async\" width=\"141\" height=\"150\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/09\/VITA-141x150.png\" class=\"attachment-thumbnail size-thumbnail wp-image-30830\" alt=\"\" \/><\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t\n\t\t\t<div class=\"uael-post__content-wrap\">\n\t\t\t\t\t<h4 class=\"uael-post__title\">\n\n\t\t\n\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\">\n\t\t\t\tPlasma Cleaner &#8211; Vita\t\t\t<\/a>\n\n\t\t\t\t<\/h4>\n\t\t\n\t\t<div class=\"uael-post__excerpt\">\n\t\t\t&nbsp;\t\t<\/div>\n\n\t\t\t\t\t<a class=\"uael-post__read-more elementor-button\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-cleaner-vita\/\" target=\"_self\" aria-labelledby=\"uael-post-34902\">\n\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-icon elementor-align-icon-left\">\n\n\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t<span class=\"elementor-button-text\" id=uael-post-34902>Read More \u2192<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\n\t<\/div>\n\n<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\n\t\t<\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t<div class=\"uael-post__footer\">\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>ETCHING Etching is a process for pattern transfer and surface treatment in micro-nano device fabrication.\u00a0 E6NanoFab makes available dry and&#8230;<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":26496,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-fullwidth.php","meta":{"footnotes":""},"class_list":["post-26520","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=26520"}],"version-history":[{"count":16,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520\/revisions"}],"predecessor-version":[{"id":37212,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26520\/revisions\/37212"}],"up":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/26496"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=26520"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}