{"id":28672,"date":"2019-04-07T13:52:39","date_gmt":"2019-04-07T13:52:39","guid":{"rendered":"https:\/\/e6nanofab.consapsg.com\/?page_id=28672"},"modified":"2024-08-01T02:48:17","modified_gmt":"2024-08-01T02:48:17","slug":"chemicals-provided","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/chemicals-provided\/","title":{"rendered":"Chemicals Provided"},"content":{"rendered":"\t\t
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\u00a0<\/p>

S\/N<\/strong><\/p>

\u00a0<\/strong><\/p><\/td>

Chemicals\/ Purity<\/strong><\/p><\/td>

Hazard<\/strong><\/p><\/td><\/tr>

1<\/p><\/td>

PMGI SF6<\/p><\/td>

Flammable<\/p><\/td><\/tr>

2<\/p><\/td>

PMMA 495 A4<\/p><\/td>

Flammable<\/p><\/td><\/tr>

3<\/p><\/td>

PMMA 950 A5<\/p><\/td>

Flammable<\/p><\/td><\/tr>

4<\/p><\/td>

MIBK 1:3<\/p><\/td>

Flammable<\/p><\/td><\/tr>

5<\/p><\/td>

Remover PG<\/p><\/td>

Respiratory Sensitizer<\/p><\/td><\/tr>

6<\/p><\/td>

SU-8 Developer<\/p><\/td>

Flammable<\/p><\/td><\/tr>

7<\/p><\/td>

MIBK<\/p><\/td>

Flammable<\/p><\/td><\/tr>

8<\/p><\/td>

Isopropyl Alcohol (2-Propanol)<\/p><\/td>

Flammable<\/p><\/td><\/tr>

9<\/p><\/td>

Methanol<\/p><\/td>

Flammable<\/p><\/td><\/tr>

10<\/p><\/td>

Hydrogen Peroxide (30%)<\/p><\/td>

Toxic<\/p><\/td><\/tr>

11<\/p><\/td>

Acetone (CMOS)<\/p><\/td>

Flammable<\/p><\/td><\/tr>

12<\/p><\/td>

Dimethyl Sulfoxide<\/p><\/td>

Poison<\/p><\/td><\/tr>

13<\/p><\/td>

Chromium Etchant<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

14<\/p><\/td>

Buffered Oxide Etchant (BOE) 6:1<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

15<\/p><\/td>

Tungsten Etchant<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

16<\/p><\/td>

101 Developer (4L\/Bot)<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

17<\/p><\/td>

Sulphuric Acid 96% (BASF) VLSI<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

18<\/p><\/td>

Hydrofluoric Acid 49% VLSI 1GA\/3.78L\/Bo<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

19<\/p><\/td>

Hydrochloric Acid 40%<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

20<\/p><\/td>

MICROPOSIT\u2122 MF-319 DEVELOPER (DOW)<\/p><\/td>

Corrosive<\/p><\/td><\/tr>

21<\/p><\/td>

MA-D 533\/S DEVELOPER For Photoresists<\/p><\/td>

Toxic<\/p><\/td><\/tr>

22<\/p><\/td>

MA-N 1400 Negative Tone Photoresists Series<\/p><\/td>

Flammable<\/p><\/td><\/tr><\/tbody><\/table>

\u00a0<\/p>

\u00a0<\/p>

Last Updated: July 2024<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

\u00a0 S\/N \u00a0 Chemicals\/ Purity Hazard 1 PMGI SF6 Flammable 2 PMMA 495 A4 Flammable 3 PMMA 950 A5 Flammable…<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-fullwidth.php","meta":{"footnotes":""},"class_list":["post-28672","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/28672","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=28672"}],"version-history":[{"count":10,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/28672\/revisions"}],"predecessor-version":[{"id":41028,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/28672\/revisions\/41028"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=28672"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}