{"id":31892,"date":"2022-09-23T10:17:37","date_gmt":"2022-09-23T10:17:37","guid":{"rendered":"https:\/\/dev.consapsg.com\/?page_id=31892"},"modified":"2022-09-23T10:19:47","modified_gmt":"2022-09-23T10:19:47","slug":"draft","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/draft\/","title":{"rendered":"draft"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"31892\" class=\"elementor elementor-31892\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-727871c elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"727871c\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f81c5ee\" data-id=\"f81c5ee\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-552de86 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"552de86\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-96f5f2b\" data-id=\"96f5f2b\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-1bc477b elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1bc477b\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-efcdb4c\" data-id=\"efcdb4c\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bb18a69 uael-header-sticky-no uael-border-yes elementor-widget elementor-widget-uael-table\" data-id=\"bb18a69\" data-element_type=\"widget\" data-widget_type=\"uael-table.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<div itemscope class=\"uael-table-wrapper\" itemtype=\"http:\/\/schema.org\/Table\">\n\t\t<table id=\"uael-table-id-bb18a69\" class=\"uael-text-break uael-column-rules uael-table\" data-sort-table=\"no\" data-show-entry=\"no\" data-searchable=\"no\" data-responsive=\"no\">\n\t\t\t\t<tbody>\n\t\t\t<!-- ROWS -->\n\t\t\t\t\t\t\t\t\t\t<tr data-entry=\"1\" class=\"uael-table-row\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<td class=\"uael-table-col uael-table-body-cell-text elementor-repeater-item-4b932b1\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/the-capability\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text-inner\">THE CAPABILITY<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/tr><tr data-entry=\"2\" class=\"uael-table-row\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<td class=\"uael-table-col uael-table-body-cell-text elementor-repeater-item-ebe7334\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/facility-cleanrooms\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text-inner\">CLEANROOMS<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/tr><tr data-entry=\"3\" class=\"uael-table-row\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<td class=\"uael-table-col uael-table-body-cell-text elementor-repeater-item-770e7ba\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/facility-dry-lab\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text-inner\">DRY LAB<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/tr><tr data-entry=\"4\" class=\"uael-table-row\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<td class=\"uael-table-col uael-table-body-cell-text elementor-repeater-item-0a89817\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/cde.nus.edu.sg\/facility-wet-lab\/\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text-inner\">WET LAB<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/tr><tr data-entry=\"5\" class=\"uael-table-row\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<td class=\"uael-table-col uael-table-body-cell-text elementor-repeater-item-dab18bc\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/get.qreserve.com\/\" target=\"_blank\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"uael-table__text-inner\">TOOL BOOKING<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t<\/tbody>\n\t<\/table>\n\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-824b43a\" data-id=\"824b43a\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a3985b3 elementor-widget elementor-widget-heading\" data-id=\"a3985b3\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h2 class=\"elementor-heading-title elementor-size-default\">LIST OF TOOLS IN THE RESPECTIVE LOCATION<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-19f24c7 elementor-widget elementor-widget-eael-adv-tabs\" data-id=\"19f24c7\" data-element_type=\"widget\" data-widget_type=\"eael-adv-tabs.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t        <div data-scroll-on-click=\"no\" data-scroll-speed=\"300\" id=\"eael-advance-tabs-19f24c7\" class=\"eael-advance-tabs eael-tabs-horizontal eael-tab-auto-active  active-caret-on\" data-tabid=\"19f24c7\">\n            <div class=\"eael-tabs-nav \">\n                <ul class=\"\" role=\"tablist\">\n                                            <li id=\"dry-lab\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"true\" data-tab=\"1\" role=\"tab\" tabindex=\"0\" aria-controls=\"dry-lab-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >DRY LAB<\/span>                                                    <\/li>\n                                            <li id=\"metrology-test\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"false\" data-tab=\"2\" role=\"tab\" tabindex=\"-1\" aria-controls=\"metrology-test-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >METROLOGY &amp; TEST<\/span>                                                    <\/li>\n                                            <li id=\"characterisation\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"false\" data-tab=\"3\" role=\"tab\" tabindex=\"-1\" aria-controls=\"characterisation-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >CHARACTERISATION<\/span>                                                    <\/li>\n                                            <li id=\"packaging\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"false\" data-tab=\"4\" role=\"tab\" tabindex=\"-1\" aria-controls=\"packaging-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >PACKAGING<\/span>                                                    <\/li>\n                                            <li id=\"mbe\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"false\" data-tab=\"5\" role=\"tab\" tabindex=\"-1\" aria-controls=\"mbe-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >MBE<\/span>                                                    <\/li>\n                                            <li id=\"others\" class=\"inactive eael-tab-item-trigger eael-tab-nav-item\" aria-selected=\"false\" data-tab=\"6\" role=\"tab\" tabindex=\"-1\" aria-controls=\"others-tab\" aria-expanded=\"false\">\n                            \n                            \n                            \n                                                            <span class=\"eael-tab-title title-after-icon\" >OTHERS<\/span>                                                    <\/li>\n                    \n                                  <\/ul>\n            <\/div>\n            \n            <div class=\"eael-tabs-content\">\n\t\t        \n                    <div id=\"dry-lab-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"dry-lab-tab\">\n\t\t\t\t        <table style=\"width: 100%;border-collapse: collapse;border-style: none\">\n<tbody>\n<tr>\n<td style=\"width: 100%\">\n<h4><strong>THERMAL EVAPORTOR\u00a0<\/strong><\/h4>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"width: 100%\"><strong>Edward Evaporation System for Metal Deposition<\/strong>\n\nModel: Edward Auto 306 Turbo\u00a0 <img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-28824 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/E-Beam-Thermal-Evaporator-225x300_Edward-L2-225x300.jpg\" alt=\"\" width=\"225\" height=\"300\" \/>\n\nSubstrate size:\nIrregular to standard 8\u201ddia wafer\n\nMetals:\nAluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.\n\nThe Application:\n\nThe heating is carried out by passing a large current\nthrough a filament container (tungsten boat or material\ncoated tungsten rod), which has a finite electrical resistance.\n\nLocation: E6-02-08, Dry Lab.\n\nContact: e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"width: 100%;border-collapse: collapse;border-style: none\">\n<tbody>\n<tr>\n<td style=\"width: 100%\">\n<h4><strong>\u00a0E-BEAM EVAPORTOR\u00a0<\/strong><\/h4>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"width: 100%\"><strong>E-Beam Evaporation System for Metal Deposition<img decoding=\"async\" class=\"size-medium wp-image-28837 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/E-Beam-Evaporator-225x300-225x300-1-225x300.jpg\" alt=\"\" width=\"225\" height=\"300\" \/><\/strong>\n\nModel: Edward Auto 306 Turbo\n\nSubstrate size: Irregular to standard 8\u201ddia wafer.\nMetals: Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.\n\nCrucibles: Intermetallic-IML, Graphite liner-GL and ThickWall Graphite Liner-TWGL.\n\nLocation: E6-02-08, Dry Lab.\n\nContact: e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t        \n                    <div id=\"metrology-test-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"metrology-test-tab\">\n\t\t\t\t        <table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>FIB-SEM<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px\"><strong>System Overview<\/strong>\n<ul>\n \t<li>Process viewing Cut &amp; See<img decoding=\"async\" class=\"size-full wp-image-30385 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg\" alt=\"\" width=\"346\" height=\"498\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg 346w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM-208x300.jpg 208w\" sizes=\"(max-width: 346px) 100vw, 346px\" \/><\/li>\n \t<li>Failure analysis<\/li>\n<\/ul>\n<strong>Technical Specifications<\/strong>\n<ul>\n \t<li>Up to 8\u201d wafer inspection in both SESM as in FIB operation enable by the new triple lens design<\/li>\n \t<li>Max Specimen Height: 96 mm (with rotation stage); 137 mm (without rotation stage)<\/li>\n \t<li>Integrated TOF-SIMS with a compact TOFSIMS dector and uses FIB column as primary ion beam with 3D compositional analysis<\/li>\n \t<li>Magnification at 30kV: 4x-1,000,000x<\/li>\n \t<li>Maximum Field of View: 4.3 mm at WD; analytical 5 mm; 7.5 mm at WD 30mm<\/li>\n \t<li>Electron Beam Energy: 200 eV to 30 keV down to 50eV with Beam Deceleration mode<\/li>\n \t<li>FIB Resolution : &lt;2.5nm at 30kV (at SEM-FIB coincidence point)<\/li>\n \t<li>Accelerating voltage: 0.5 kV to 30 kV<\/li>\n \t<li>Ion Gun : Ga Liquid Metal Ion Source<\/li>\n \t<li>Probe Current: 1 pA to 50 nA<\/li>\n \t<li>FIB angle: 55 degree<\/li>\n \t<li>Gas injection system : Tungsten and Platinum<\/li>\n \t<li>Model: TESCAN GAIA3<\/li>\n<\/ul>\n<strong>Location: <\/strong>E6-03-02, Metrology\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg\n\n<em>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Quality of Patterned Resist<\/em>\n\n<a href=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-30365\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\" alt=\"\" width=\"480\" height=\"159\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg 996w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-300x100.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-768x255.jpg 768w\" sizes=\"(max-width: 480px) 100vw, 480px\" \/><\/a>\n\n<a href=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\"><strong><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-30364\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\" alt=\"\" width=\"506\" height=\"202\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg 978w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-300x120.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-768x306.jpg 768w\" sizes=\"(max-width: 506px) 100vw, 506px\" \/><\/strong><\/a>\n\n<a href=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\"><strong><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-30363\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\" alt=\"\" width=\"514\" height=\"182\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg 1024w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-300x106.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-768x272.jpg 768w\" sizes=\"(max-width: 514px) 100vw, 514px\" \/><\/strong><\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>FE-SEM (Ultra High Resolution)<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px;padding-left: 40px\"><strong>System Overview<\/strong>\n\nMulti-signal detection and imaging system, for elemental composition, crystal and surface information.\n\n<strong><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-30529 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2021\/02\/20210220_L3_Hitachi-Regalus-SEM-300x272.jpg\" alt=\"\" width=\"300\" height=\"272\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3_Hitachi-Regalus-SEM-300x272.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3_Hitachi-Regalus-SEM-768x696.jpg 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3_Hitachi-Regalus-SEM.jpg 950w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Technical Specifications<\/strong>\n<ul>\n \t<li>Accelerating Voltage: 0.5 \u2013 30kV<\/li>\n \t<li>Resolution: 0.7nm at 15kV (SE) 0.9nm at 1kV w\/ deceleration (SE)<\/li>\n \t<li>Magnification Range: 20X \u2013 2,000 X (Low Mag) 100X \u2013 2,000,000X (High Mag)<\/li>\n \t<li>Detectors: Lower\/ Upper\/ Top, YAG BSE, STEM (Bright-Field\/ PD-Dark Field) and EDX.<\/li>\n \t<li>Stage Traverse: (5-axis Motorized) X: 0 \u2013 110mm Y: 0 \u2013 11mm Z: 1.5 \u2013 40mm R: 360\u00b0 T: -5\u00b0 \u2013 +70\u00b0<\/li>\n \t<li>Observable Range: 150mm dia. (MAX Sample Size)<\/li>\n \t<li>Specimen Exchange Chamber size: 6 inch dia.<\/li>\n \t<li>Mountable specimen thickness: 27mm (Diameter \u2266 33mm)<\/li>\n \t<li>Model: Hitachi Regulus 8230<\/li>\n<\/ul>\n<strong>Location: <\/strong>E6-03-02, Metrology\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg\n<p style=\"text-align: center\"><em>\u00a0High Resolution Imaging\u00a0\u00a0<\/em><\/p>\n<img loading=\"lazy\" decoding=\"async\" class=\"wp-image-30530 aligncenter\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2021\/02\/20210220_L3-Hitachi-Regulus_200nm-Specimen-Image.jpg\" alt=\"\" width=\"552\" height=\"413\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3-Hitachi-Regulus_200nm-Specimen-Image.jpg 984w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3-Hitachi-Regulus_200nm-Specimen-Image-300x224.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2021\/02\/20210220_L3-Hitachi-Regulus_200nm-Specimen-Image-768x574.jpg 768w\" sizes=\"(max-width: 552px) 100vw, 552px\" \/><em>\u00a0<\/em><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>JEOL JSM 6700F<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px\"><strong>System Overview<img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-28815 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/JEOL-JSM-6700F-300x227-300x227.png\" alt=\"\" width=\"300\" height=\"227\" \/><\/strong>\n\nFESEM JSM-6700F is a high-resolution and easy-to-operate scanning\u00a0 electron microscope, which employs a field-emission gun for the electron source and state-of-the-art computer technology for the image-display system. This system detects the secondary electrons to image the topography of the sample. The minimum feature is around 50nm.\n\n<strong>Location: <\/strong>E6-03-02, Metrology\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>NOVA NANOSEM 230<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px\"><strong>System Overview<\/strong><img loading=\"lazy\" decoding=\"async\" class=\" wp-image-30371 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Nova-SEM-175x300.jpg\" alt=\"\" width=\"274\" height=\"469\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Nova-SEM-175x300.jpg 175w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Nova-SEM.jpg 277w\" sizes=\"(max-width: 274px) 100vw, 274px\" \/>\n\nA wide range of materials can be imaged which includes semiconductor devices, thin films and even non-conductive specimens.\n<ul>\n \t<li>Brand:\u00a0 FEI NOVA NANOSEM 230<\/li>\n \t<li>Minimum feature :\u00a0 ~ 50nm<\/li>\n \t<li>Detector:\u00a0 SED, GBSD, BSD<\/li>\n \t<li>Stage:\u00a0 X, Y, Z, R Axis motor drive<\/li>\n \t<li>Beam landing energy:\u00a0 50 V \u2013 30 kV<\/li>\n \t<li>Probe current: 0.6 pA \u2013 100 nA<\/li>\n \t<li>Tilt:\u00a0 Manual<\/li>\n<\/ul>\n<strong>Location:<\/strong> E6-03-02, Metrology\n\n<strong>Contact: <\/strong>e6nanofab@nus.edu.sg\n<p style=\"text-align: left\"><em>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Amorphous Si Image<\/em><\/p>\n<a href=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-30370\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si-1024x313.jpg\" alt=\"\" width=\"583\" height=\"178\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si-1024x313.jpg 1024w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si-300x92.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si-768x235.jpg 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si.jpg 1205w\" sizes=\"(max-width: 583px) 100vw, 583px\" \/><\/a>\n\n<a href=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-30369\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b-1024x430.jpg\" alt=\"\" width=\"484\" height=\"203\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b-1024x430.jpg 1024w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b-300x126.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b-768x323.jpg 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2020\/07\/L3-Metro-Nova-SEM_Amorphous-Si_b.jpg 1078w\" sizes=\"(max-width: 484px) 100vw, 484px\" \/><\/a><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>RAMAN AND MICRO PL SYSTEM<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px\"><strong>System Overview<\/strong>\n\n<img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-30419 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2020\/08\/L5-DL-Raman-Microscope-and-PL.jpg\" alt=\"\" width=\"268\" height=\"179\" \/>The Raman microscope acquire\u00a0detailed chemical images and highly specific Raman data from discrete points. It analyses both large volumes and traces of material.\n<ul>\n \t<li>Dual laser system: 532nm &amp; 325nm.<\/li>\n \t<li>Able to measure both Raman and Photoluminescence.<\/li>\n \t<li>Map rough, uneven, and curved surfaces\nTransmission mapping \u2013 analyse large volumes of material and produce depth-averaged 2D images of material homogeneity.<\/li>\n \t<li>Volume scans \u2013 3D views of your transparent sample\u2019s internal structure and see both the chemistry and the topography.<\/li>\n \t<li>Renishaw inVia Raman<\/li>\n<\/ul>\n<strong>Location: <\/strong>E6-03-02\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 16px\">\n<td style=\"width: 100%;height: 16px\">\n<h3>WAFER DICER<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 216px\">\n<td style=\"width: 100%;height: 216px\"><strong>System Overview<\/strong>\n\n<img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-29696 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/10\/L3-Accretech-Wafer-Dicer.jpg\" alt=\"\" width=\"188\" height=\"250\" \/>Dicing of full wafers up to 8&#8243; and piece-parts. A dicing saw employs a high-speed spindle fitted with an extremely thin diamond blade to dice or groove semiconductor wafers and other work pieces. Saws feature versatile processing capabilities, compact designs, and high precision and reliability. Users perform work-piece loading, alignment, and unloading automatically.\n\n<strong>Location: <\/strong>E6-03-02, Metrology\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t        \n                    <div id=\"characterisation-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"characterisation-tab\">\n\t\t\t\t        <table class=\"aligncenter\" style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 20px\">\n<td style=\"width: 100%;height: 24px\">\n<h3>VSM<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 191px\">\n<td style=\"width: 100%;height: 191px\"><strong>System Overview<\/strong>\n\nThe EZ 9 VSM is dedicated for measurement of the magnetic moment of materials as a function of field, angle, temperature, time.\n<ul>\n \t<li>Sensitivity up 10e-06emu<\/li>\n \t<li>Achievable maximum magnetic field from 2.6 T to 3.12 T with sample space from 16mm to 3.5mm<\/li>\n \t<li>Working temperature ranges from 77K to 1000K<\/li>\n \t<li>Sample Size\n\u2013 Available measurement types for sample size are: Virgin Curve, Hysteresis Loop, IRM and Virgin Curve, DC Demagnetization, Combination Measurements, Angular Remanence, AC Remanence, Time Dependence, Temperature Scan, Torque and Miyajima Method<\/li>\n<\/ul>\n<strong><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-28841 alignnone\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/VSM-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" \/><\/strong>\n\n<strong>Location: <\/strong>E6-05-08G, Characterization Room\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 50px\">\n<td style=\"width: 100%\">\n<h4><strong>SMOKE<\/strong><\/h4>\n<\/td>\n<\/tr>\n<tr style=\"height: 191px\">\n<td style=\"width: 100%;height: 191px\"><strong>System Overview<\/strong>\n\nBy application of the magneto optical Kerr effect, the rotation of the polarization plane of the reflected light is transformed into a contrast by means of an analyser when the domain magnetization direction change.\n\nThe E6NanoFab Evico Magneto-Optical Kerr Microscope &amp; Magnetometer in is able to visualisation of magnetic domains and magnetization processes as well as for optically recording magnetization curves qualitatively on all kinds of magnetic materials, including bulk specimens like sheets or ribbons, magnetic films and multilayers, patterned films or micro- and nanowires.\n\nThe In-plane magnetic field range from 10-4 Tesla up to 1.3 Tesla, depends on pole piece configuration and choice of coils. And the observation area is 8 mm x 8 mm min and 30 mm x 30 mm max.\n\n<strong><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-28898 alignnone\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/SMOKE-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/SMOKE-300x169.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/SMOKE.jpg 453w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/strong>\n\n<strong>Location:<\/strong> E6-05-08A, Characterization Room\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg\n<div class=\"breakleft\"><\/div><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table class=\"aligncenter\" style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 24px\">\n<td style=\"width: 100%;height: 24px\">\n<h3>SQUID<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 191px\">\n<td style=\"width: 100%;height: 191px\"><strong>System Overview<\/strong>\n<div class=\"breakleft\">\n<ul>\n \t<li>The MPMS3 SQUID magnetometer allows DC and VSM Data Acquisition<img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-28900 alignright\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/SQUID-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/SQUID-300x169.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/SQUID.jpg 453w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/li>\n \t<li>Options of horizontal rotator allows for sample measurement as a function of angle<\/li>\n \t<li>Manual insertion utility probe with 5 leads for variety resistivity measurement<\/li>\n \t<li>Oven and high vacuum for high temperature measurement<\/li>\n \t<li>AC susceptibility for magnetization dynamics measurement<\/li>\n \t<li>Ultra-low field for superconductivity transition temperature and spin glass transition temperature measurement<\/li>\n<\/ul>\n<strong>Location: <\/strong>E6-05-08F, Characterization Room\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg\n\n<\/div><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 24px\">\n<td style=\"width: 100%;height: 24px\">\n<h3>SPM<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 191px\">\n<td style=\"width: 100%;height: 191px\"><b>System Overview<\/b>\n\nThe Bruker Dimension Icon AFM incorporates the latest evolution of Bruker\u2019s industry-leading nanoscale imaging and characterization technologies on a large sample tip-scanning AFM platform. The Icon\u2019s temperature-compensating position sensors render noise levels in the sub-angstroms range for the Z-axis, and angstroms in X-Y.\n\n<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-28973\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/L5-Characterization_Bruker_SPM_E6-05-08A-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L5-Characterization_Bruker_SPM_E6-05-08A-300x225.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L5-Characterization_Bruker_SPM_E6-05-08A.jpg 720w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\n\n<strong>Technical Specifications<\/strong>\n<ul>\n \t<li>ScanAsyst\u00ae Imaging \u2013 ScanAsyst is a\u00a0PeakForce Tapping\u00a0based image optimization technique that enables every user to create the highest resolution AFM images using single-touch scanning.<\/li>\n \t<li>Conventional Tapping Mode \u2013 for topology\/roughness\/step-height measurements<\/li>\n \t<li>Magnetic Force Microscopy (MFM) \u2013\u00a0 can be used to image both naturally occurring and deliberately written domain structures in magnetic materials<\/li>\n \t<li>Electric Force Microscopy (EFM) \u2013 is used for electrical failure analysis, detecting trapped charges, mapping electric polarization, and performing electrical read\/write, among other applications.<\/li>\n \t<li>Kelvin Probe Force Microscopy (KPFM) \u2013 is widely used for analysing the surface potential of the structures.<\/li>\n \t<li>Conductive AFM (CAFM) \u2013 used to measure and map current of the sample in the 2pA to 1\u00b5A range while simultaneously collecting topographic information.<\/li>\n<\/ul>\n<strong>Location: <\/strong>E6-05-08A, Characterization Room\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 24px\">\n<td style=\"width: 100%;height: 24px\">\n<h3>XRD<\/h3>\n<\/td>\n<\/tr>\n<tr style=\"height: 191px\">\n<td style=\"width: 100%;height: 191px\"><b>System Overview<\/b><strong>\u00a0<\/strong>\n\nMultipurpose XRD\n\n<strong>Technical Specifications<\/strong>\n<ul>\n \t<li>3kW sealed tube<\/li>\n \t<li>0D, 1D detector<\/li>\n \t<li>Horizontal Goniometer, independent and high resolution omega &amp; 2theta (2\u03b8) scan<\/li>\n \t<li>Theta (\u03b8) \/ 2\u03b8 accuracy and reproducibility: \u22640.02 on Si powder<\/li>\n \t<li>Applications up to 4 inch: High-resolution XRD (HRXRD) or reciprocal space mapping (RSM) (1-D and O-D with analyzer);rocking curve; XRR, Grazing incidence; inplane grazing incidence, pole figure, SAXS, powder diffraction<\/li>\n \t<li>Theta (\u03b8) \/ 2\u03b8 up to 8 inch<\/li>\n<\/ul>\n<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-28901\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-300x169.jpg\" alt=\"\" width=\"300\" height=\"169\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-300x169.jpg 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-1024x576.jpg 1024w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-768x432.jpg 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-1536x864.jpg 1536w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/20180227_XRD-L5-2048x1152.jpg 2048w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\n\n<strong>Location: <\/strong>E6-05-08, Characterization Room\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t        \n                    <div id=\"packaging-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"packaging-tab\">\n\t\t\t\t        <table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr>\n<td style=\"width: 100%\">\n<h4>WIRE BONDER<\/h4>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"width: 100%\"><strong>System Overview<\/strong>\n<ul>\n \t<li>Deep access 90\u00ba wire or ribbon feed, and single point tab\/lead bonding<\/li>\n \t<li>Programmable dual force (high or low), pure vertical Z, pneumatic braking of all axes during bonding, and radiant tool heat<\/li>\n<\/ul>\n<strong><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-29054\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2019\/05\/Wirebonder-300x217.jpg\" alt=\"\" width=\"300\" height=\"217\" \/><\/strong>\n\n<strong>Technical Specifications<\/strong>\n<ul>\n \t<li>Z tool range: 0.5625 inch<\/li>\n \t<li>Z encoder resolution: 0.001 inch<\/li>\n \t<li>Bond force range: Adjustable, 10 to 250 grams<\/li>\n \t<li>Transducer: \u00bd wave, 63 KHz (nominal)<\/li>\n \t<li>Ultrasonics: Built-in, 8 bit, 4 watts (Ultrasonic Positioning Utility)<\/li>\n \t<li>Wire range: 0.7 to 2.0 mils, 1\u00d710 mil gold ribbon<\/li>\n \t<li>ESD protection: Protection against Electrostatic Discharge<\/li>\n \t<li>Display: 4 line, 40 character LCD<\/li>\n \t<li>Deep access tool length: 0.750 inch<\/li>\n<\/ul>\n<strong>Location:<\/strong> E6-05-Dry Lab, Level 5\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t        \n                    <div id=\"mbe-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"mbe-tab\">\n\t\t\t\t        <table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr>\n<td style=\"width: 100%\">\n<h4>MOLECULAR BEAM EPITAXY (MBE) SYSTEM FOR THE GROWTH OF A RANGE OF GROUP\u00a0 II-VI and IV MATERIALS<\/h4>\n<\/td>\n<\/tr>\n<tr>\n<td style=\"width: 100%\"><strong>System Overview<\/strong>\n\nThe fully integrated MBE system allows deposition of hetero-structures and semiconductors. II-VI and IV group deposition chambers are integrated with transfer chamber and load lock. The system has 5 ports for each chamber.\n\n<strong>Technical specifications:<\/strong>\n<ul>\n \t<li>Growth Chamber (Group II-VI)<\/li>\n \t<li>Base pressure: better than 5 x 10-10 Torr<\/li>\n \t<li>Effusion Cell for Chalcogen material up to 1300\u00baC (S, Se, Te, P)<\/li>\n \t<li>Electron beam gun for evaporation of transition metal (Mo, Ta, W, Hf, Zr)<\/li>\n \t<li>Beam flux monitoring: Nude gauge type, 7.5 x 10-4 Torr to approximately 7.5 x 10-11 Torr<\/li>\n \t<li>Substrate up to handle 2 inch wafer<\/li>\n \t<li>Heating up to1000\u00baC with heating rate up to 20 \u00baC per minute<\/li>\n \t<li>Reflection High Energy Electron Diffraction (RHEED): Filament Hair pin type with Electron beam diameter 90 \u03bcm, 30kV, Fluorescent screen: 90mm diameter; bakeable up to 200 \u00baC<\/li>\n<\/ul>\n<strong>MBE Growth Chamber (Group IV)<\/strong>\n<ul>\n \t<li>Base pressure: better than 5 x 10-10 Torr<\/li>\n \t<li>Effusion Cell for Chalcogen material up to 1300\u00baC (Si, Ge, Sn)<\/li>\n \t<li>Electron beam gun for evaporation of carbon<\/li>\n \t<li>Beam flux monitoring: Nude gauge type, 7.5 x 10-4 Torr to approximately 7.5 x 10-11 Torr<\/li>\n \t<li>Substrate up to handle 2inch wafer<\/li>\n \t<li>Heating up to1000 \u00baC with heating rate up to 20 \u00baC per minute<\/li>\n \t<li>Reflection High Energy Electron Diffraction (RHEED): Filament Hair pin type with Electron beam diameter 90 \u03bcm, 30kV, Fluorescent screen: 90mm diameter; bakeable up to 200 \u00baC<\/li>\n<\/ul>\n<strong>Location:<\/strong> E6-06-01\n\n<strong>Contact:<\/strong> e6nanofab@nus.edu.sg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t        \n                    <div id=\"others-tab\" class=\"clearfix eael-tab-content-item inactive\" data-title-link=\"others-tab\">\n\t\t\t\t        <table style=\"border-collapse: collapse;width: 100%\">\n<tbody>\n<tr style=\"height: 66px\">\n<td style=\"width: 100%;height: 66px\">\n<h4 style=\"padding-left: 40px\">\u00a0 LASER MICRO-MACHINING SERVICE<\/h4>\n<\/td>\n<\/tr>\n<tr style=\"height: 1122px\">\n<td style=\"width: 100%;padding-left: 40px;height: 1122px\">\n<p style=\"padding-left: 40px\"><strong>\u00a0 <\/strong><\/p>\n<p style=\"padding-left: 40px\"><strong>Overview<\/strong><\/p>\n<p style=\"padding-left: 40px\">Custom Laser micro-machine system operating on a femtosecond pulsed laser. The short pulse length limits local heating effects reducing Heat Affected Zone (HAZ). Applicable in wide range of materials. Especially effective for ceramics, metals and selected Polymers.<\/p>\n<p style=\"padding-left: 80px\">\u2022 Ceramics* : Alumina oxide, Aluminium nitride , etc\n\u2022 Wafers* : Silicon, Silicon Nitride, Silica (Glass), etc\n\u2022 Polymers : Polyamide, Kapton, PMMA etc.\n\u2022 Metals* : Stainless Steel, Copper, Aluminium etc.<\/p>\n<p style=\"padding-left: 40px\">We routinely perform and achieve the following precision:\n1. 15 micron Percussion holes on ceramics, thin metals and silicon wafers with precision of &lt;1 micron for ceramics.\n2. 30 micron minimum Circular holes on ceramics, thin metals and silicon wafers with highest precision of &lt;1micron for ceramics. 3. Smallest feature size &gt; 20 microns with precision 1 micron on metal sheets, ceramics and polymers.\n4. Dicing of Silicon wafer up to 750um thick with negligible dust on surface.<\/p>\n<p style=\"padding-left: 40px\"><span style=\"color: #800000\"><em><span style=\"color: #ff0000\">Remarks<\/span>: <span style=\"color: #ff0000\">Subjected to maximum material thickness between 500um ~ 700um*<\/span><\/em><\/span><\/p>\n\n<ol>\n \t<li><strong>Ceramic Material<\/strong><\/li>\n<\/ol>\n<p style=\"padding-left: 40px\">Electrodes for ion trapping: We provide blade electrodes for 3D ion traps based on ceramic materials. These are used for quantum information processing and atomic clock projects.<\/p>\n<p style=\"text-align: left;padding-left: 80px\"><span style=\"color: #333399\"><em>Sample: 50um slot milling on 250um thickness Alumina oxide.<\/em><\/span><\/p>\n<p style=\"padding-left: 80px\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30590\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_ceramic.jpg-150x150.png\" alt=\"Laser Micro-machining_Ceramics Materials\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_ceramic.jpg-150x150.png 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_ceramic.jpg-256x256.png 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30595\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Slot-Milling-on-250um-thick-Alumina-Oxide-150x150.jpg\" alt=\"50um slot milling on 250um thickness Alumina oxide\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Slot-Milling-on-250um-thick-Alumina-Oxide-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Slot-Milling-on-250um-thick-Alumina-Oxide-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/p>\n2<strong>. Polymer Material<\/strong>\n\nCustom etching of heat sensitive Polymer material of approximately 50um thickness with features between 50um to 100um width.\n<p style=\"padding-left: 80px\"><span style=\"color: #333399\"><em>Sample: Consistent output of 50um Polymer strip with 50um thickness material.<\/em><\/span><\/p>\n<p style=\"padding-left: 80px\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30592 alignleft\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Polymer-Materials-150x150.jpg\" alt=\"\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Polymer-Materials-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Polymer-Materials-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30589\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Polymer-Strip-with-50um-thickness-150x150.jpg\" alt=\"\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Polymer-Strip-with-50um-thickness-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_50um-Polymer-Strip-with-50um-thickness-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/p>\n3. <strong>Metals Material<\/strong>\n<table style=\"height: 150px;width: 94.5054%;border-collapse: collapse;border-style: hidden\">\n<tbody>\n<tr style=\"height: 10px\">\n<td style=\"width: 54.6655%;height: 10px\">\n<p style=\"padding-left: 40px\"><span style=\"color: #333399\"><em>Sample A: Sepertine metal feature, 25um width strip on a 50um thickness Stainless Steel.<\/em><\/span><\/p>\n<p style=\"padding-left: 80px\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30591\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Metals-Materials-150x150.jpg\" alt=\"\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Metals-Materials-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Metals-Materials-256x256.jpg 256w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/elementor\/thumbs\/L3-Laser-Micro-machining_Metals-Materials-q873mus71hvcsf3q0xhw245jpulce4elc469uwy0x8.jpg 350w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/p>\n<\/td>\n<td style=\"width: 185.655%;height: 10px;border-style: hidden\"><span style=\"color: #333399\"><em>Sample B: Micro laser etching on 1mm Titanium tube.<\/em><\/span>\n\n<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-30597\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube-300x166.png\" alt=\"\" width=\"300\" height=\"166\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube-300x166.png 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube-1024x568.png 1024w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube-768x426.png 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube-672x372.png 672w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_1mm-Titanium-Tube.png 1104w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n4.\u00a0 <strong>Silicone Material<\/strong>\n<table style=\"height: 120px;width: 95%;border-collapse: collapse;border-style: hidden\">\n<tbody>\n<tr style=\"height: 240px\">\n<td style=\"width: 44.6147%;height: 240px;padding-left: 40px;border-style: hidden\"><span style=\"color: #333399\"><em>Sample A: Custom dicing of 525um thickness Silicon wafer with circuits.<\/em><\/span>\n\n<img loading=\"lazy\" decoding=\"async\" class=\"size-thumbnail wp-image-30600 aligncenter\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Custom-dicing_525um-thick-silicon-wafer-w-circuits-150x150.jpg\" alt=\"Custom dicing of 525um thickness Silicon wafer with circuits\" width=\"150\" height=\"150\" \/><\/td>\n<td style=\"width: 48.7327%;height: 240px;border-style: hidden\">\n<p style=\"padding-left: 40px\"><span style=\"color: #333399\"><em>Sample B:\u00a0 Custom shape dicing of Silicon wafer of 525um thickness<\/em><\/span><\/p>\n<p style=\"padding-left: 40px\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30601\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Custom-dicing_silicon-wafer-525-um-thickness-150x150.jpg\" alt=\"Custom shape dicing of Silicon wafer of 525um thickness\" width=\"150\" height=\"150\" \/><\/p>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n5. <strong>Graphene Material<\/strong>\n<p style=\"padding-left: 40px\">\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-thumbnail wp-image-30603\" src=\"https:\/\/e6nanofab.consapsg.com\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Precision-Percussion-Holes-on-Thin-Graphene-Sheet-150x150.jpg\" alt=\"Precision percussion holes on thin Graphene sheet.\" width=\"150\" height=\"150\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Precision-Percussion-Holes-on-Thin-Graphene-Sheet-150x150.jpg 150w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/01\/L3-Laser-Micro-machining_Precision-Percussion-Holes-on-Thin-Graphene-Sheet-256x256.jpg 256w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/><\/p>\n<p style=\"padding-left: 40px\"><span style=\"color: #333399\"><em>\u00a0Sample: Precision percussion holes on thin Graphene sheet.<\/em><\/span><\/p>\n<span style=\"color: #000000\">For quotation, please send your request to the person in charge stating your sample feature sizes, tolerances, volume, and materials.\u00a0<\/span>\n\n<strong>Tel:<\/strong> 6516 8549\n\n<strong>Email:<\/strong><a href=\"mailto:joven@nus.edu.sg\"> joven@nus.edu.sg<\/a>\n\n<strong>In Charge:<\/strong> Mr Joven Kwek<\/td>\n<\/tr>\n<\/tbody>\n<\/table>                    <\/div>\n\t\t                    <\/div>\n        <\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>THE CAPABILITY CLEANROOMS DRY LAB WET LAB TOOL BOOKING LIST OF TOOLS IN THE RESPECTIVE LOCATION DRY LAB METROLOGY &amp;&#8230;<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-fullwidth.php","meta":{"footnotes":""},"class_list":["post-31892","page","type-page","status-publish"],"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/31892","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=31892"}],"version-history":[{"count":4,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/31892\/revisions"}],"predecessor-version":[{"id":31899,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/pages\/31892\/revisions\/31899"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=31892"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}