{"id":34651,"date":"2022-11-28T23:59:47","date_gmt":"2022-11-28T23:59:47","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34651"},"modified":"2026-07-23T07:57:04","modified_gmt":"2026-07-23T07:57:04","slug":"atomic-layer-deposition-ald","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/atomic-layer-deposition-ald\/","title":{"rendered":"Atomic Layer Deposition (ALD) – Picosun"},"content":{"rendered":"\t\t
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ATOMIC LAYER DEPOSITION (ALD) (Picosun)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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  • Deposition of Metal Nitrides, Oxides\u00a0\u00a0<\/li>
  • Up to 8\u201d wafers size<\/li>
  • \u00a0Deposition uniformity:<\/li>
  • > Thermal Al2O3 <=2%
    > Plasma enhanced Al2O3 <=2%<\/li>
  • High aspect ratio depositions:
    > Thermal <= up to 2000:1
    > Plasma enhanced <= up to 50:1<\/li>
  • Target: Al2O3, HfO, ZrO and TiN<\/li><\/ul>
    \u00a0 \u00a0\u00a0\"\"<\/td>\"\"<\/td><\/tr>
    \u00a0 \u00a0 \u00a0\"\"<\/td>\"\"<\/td><\/tr><\/tbody><\/table>

    \u00a0<\/strong><\/p>

    Location: <\/strong>E6-05-09, Cleanroom<\/span><\/p>

    Contact:\u00a0\u00a0<\/strong>e6nanofab@nus.edu.sg\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

     <\/p>\n","protected":false},"author":4,"featured_media":41019,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[42,55,41],"tags":[100],"class_list":["post-34651","post","type-post","status-publish","format-standard","has-post-thumbnail","category-deposition-and-growth","category-l2-cr-cleanrooms","category-the-capabilities","tag-atomic-layer-deposition-ald-picosun"],"menu_order":1,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34651","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34651"}],"version-history":[{"count":24,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34651\/revisions"}],"predecessor-version":[{"id":42561,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34651\/revisions\/42561"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/41019"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34651"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34651"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34651"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}