{"id":34657,"date":"2022-11-28T23:58:44","date_gmt":"2022-11-28T23:58:44","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34657"},"modified":"2026-07-28T07:28:14","modified_gmt":"2026-07-28T07:28:14","slug":"plasma-enhanced-chemical-vapour-deposition-pecvd","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-enhanced-chemical-vapour-deposition-pecvd\/","title":{"rendered":"Inductively Coupled Plasma Reactive Ion Etcher &#8211; Oxford PlasmaPro 100 Cobralon"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34657\" class=\"elementor elementor-34657\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d32d82f elementor-widget elementor-widget-spacer\" data-id=\"d32d82f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Inductively Coupled Plasma Reactive Ion Etcher - Oxford PlasmaPro 100 CobraLon\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9a7d99c elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"9a7d99c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1013256 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"1013256\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a872dfd\" data-id=\"a872dfd\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-845f913 elementor-widget elementor-widget-spacer\" data-id=\"845f913\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-765569b elementor-widget elementor-widget-text-editor\" data-id=\"765569b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c27601d elementor-widget elementor-widget-text-editor\" data-id=\"c27601d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul id=\"FilmDeposition-Tab2\"><li>Handle up to 8\u201d wafers size<\/li><li>High density film deposition of Oxide, Nitride and amorphous Si<\/li><li>Stress controlled SiN process<\/li><li>240mm diameter resistance heated aluminium electrode for<br \/>temperatures up to 400\u00b0C, grounded<\/li><li>Electrical chamber wall heating up to 80\u00b0C minimizing<br \/>chamber wall deposition<br \/><br \/><\/li><\/ul><p><strong>Target: <\/strong>SiN, SiO2, Si<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fef0b94 elementor-widget elementor-widget-spacer\" data-id=\"fef0b94\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a232346 elementor-widget elementor-widget-text-editor\" data-id=\"a232346\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone wp-image-37162 size-full\" src=\"https:\/\/cde.nus.edu.sg\/wp-content\/uploads\/2023\/03\/PECVD.png\" alt=\"\" width=\"1004\" height=\"438\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/PECVD.png 1004w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/PECVD-300x131.png 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/03\/PECVD-768x335.png 768w\" sizes=\"(max-width: 1004px) 100vw, 1004px\" \/><\/strong><\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Location: <\/strong>E6-05-09, Cleanroom<\/p><p><strong>Contact: <\/strong>e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-f3cb6a0\" data-id=\"f3cb6a0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7badcec elementor-widget elementor-widget-text-editor\" data-id=\"7badcec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong><img decoding=\"async\" class=\"alignleft wp-image-29058 \" src=\"https:\/\/cde.nus.edu.sg\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-768x1024.jpg\" alt=\"\" width=\"282\" height=\"375\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-768x1024.jpg 768w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-225x300.jpg 225w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-1152x1536.jpg 1152w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-1536x2048.jpg 1536w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/PECVD_E6-05-09-e1559305953786-scaled.jpg 1920w\" sizes=\"(max-width: 282px) 100vw, 282px\" \/><\/strong><\/p><ul id=\"FilmDeposition-Tab2\"><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":1,"featured_media":29058,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[42,55,41],"tags":[118],"class_list":["post-34657","post","type-post","status-publish","format-standard","has-post-thumbnail","category-deposition-and-growth","category-l2-cr-cleanrooms","category-the-capabilities","tag-inductively-coupled-plasma-reactive-ion-etcher-oxford-plasmapro-100-cobralon"],"menu_order":1,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34657","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34657"}],"version-history":[{"count":89,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34657\/revisions"}],"predecessor-version":[{"id":42615,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34657\/revisions\/42615"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/29058"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34657"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34657"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34657"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}