{"id":34670,"date":"2022-10-03T09:09:44","date_gmt":"2022-10-03T09:09:44","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34670"},"modified":"2026-06-02T09:35:18","modified_gmt":"2026-06-02T09:35:18","slug":"scia-coat-200-ion-beam-deposition-and-etching","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/scia-coat-200-ion-beam-deposition-and-etching\/","title":{"rendered":"SCIA Coat 200 &#8211; Ion Beam Deposition and Etching"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34670\" class=\"elementor elementor-34670\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-348f00c elementor-widget elementor-widget-spacer\" data-id=\"348f00c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">SCIA COAT 200 - ION BEAM DEPOSITION AND ETCHING<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-95d6a7a elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"95d6a7a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-616f22e elementor-widget elementor-widget-spacer\" data-id=\"616f22e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p>The SCIA Coat 200 is designed for homogeneous coating of high precision optics such as X-ray mirrors and optical filters with the technology of Dual Ion Beam Deposition (DIBD). The system is also equipped with a RF350-e ion beam source for etching process.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Technical Specifications<\/strong><\/p><p><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone size-medium wp-image-28971\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-225x300.jpg\" alt=\"SCIA Coat 200 Ion Beam Deposition and Etching\" width=\"225\" height=\"300\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D-225x300.jpg 225w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/05\/L1-CR_SCIA_Coat_200_IBD-E6-01-02D.jpg 540w\" sizes=\"(max-width: 225px) 100vw, 225px\" \/><\/p><ul><li>Cylindrical ICP ion beam source RF350-e<\/li><li>Beam diameter of 350 mm at extraction grid<\/li><li>Inductively coupled plasma (ICP) based plasma excitation with RF generator at 4.00 MHz<\/li><li>ion energy: &lt; 100 eV; Max. ion energy: &gt; 1500 eV<\/li><li>Ion current density up to 1 mA\/cm\u00b2 with flat grid system<\/li><li>Wafer chuck for 200 mm wafers<\/li><li>Substrate rotation up to 20 rpm, Substrate holder tilt between 0\u00b0 \u2013 170\u00b0 in 0.1\u00b0 steps<\/li><li>A standard 4-port handling robot for fully automatic handling of wafers<\/li><li>Load-lock for loading of three 200 mm wafers<\/li><li>HAL IMP 301\/3F Ion Milling End Point Detection System<\/li><li>With Secondary Ion Mass Spectroscopy (SIMS), an in-situ measurement of<br \/>sputtered material from substrate can be done.<\/li><li>The system is controlled by Windows 7 with fully SEMI-standard compatible <br \/>software suite.<\/li><li>Etch rate: &gt; 8 nm\/min, uniformity: \u2264 8 % 3\u03c3, reproducibility (10 runs) \u2264 3 % 3\u03c3.<\/li><li>Deposition rate (Ta) &gt; 6 nm\/min, uniformity: \u2264 3 % 3\u03c3 , reproducibility (10 runs) \u2264 2 % 3\u03c3<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Location:\u00a0<\/strong>E6-01-02, Class 100 Cleanroom<\/p><p><strong>Contact:\u00a0<\/strong>e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":4,"featured_media":28971,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[50,44,41],"tags":[],"class_list":["post-34670","post","type-post","status-publish","format-standard","has-post-thumbnail","category-l1-cr","category-magnetic-processing","category-the-capabilities"],"menu_order":3,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34670","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34670"}],"version-history":[{"count":10,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34670\/revisions"}],"predecessor-version":[{"id":41001,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34670\/revisions\/41001"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/28971"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34670"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34670"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34670"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}