{"id":34744,"date":"2022-11-12T03:19:15","date_gmt":"2022-11-12T03:19:15","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34744"},"modified":"2026-07-28T09:59:19","modified_gmt":"2026-07-28T09:59:19","slug":"microwriter-durham-magneto-optics-ml3-pro-class-10","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/microwriter-durham-magneto-optics-ml3-pro-class-10\/","title":{"rendered":"Laser Writer &#8211; DMO MicroWriter ML3 Pro"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34744\" class=\"elementor elementor-34744\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c2c9fda elementor-widget elementor-widget-spacer\" data-id=\"c2c9fda\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Laser Writer - DMO MicroWriter ML3 Pro<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-be9a156 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"be9a156\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b3ddca3 elementor-widget elementor-widget-spacer\" data-id=\"b3ddca3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p>The MicroWriter ML3 Pro is a sub-micron lithography machine.<\/p><p>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 <img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-30819 alignnone\" src=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-300x225.jpg\" sizes=\"(max-width: 300px) 100vw, 300px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-300x225.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-1024x768.jpg 1024w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro-768x576.jpg 768w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2022\/08\/DMO-laser-writer-ML3-Pro.jpg 1440w\" alt=\"\" width=\"424\" height=\"318\" \/><\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Technical Specifications<\/strong><\/p><p>\u2022 Maximum substrate size: 9\u201dx 9\u201d<br \/>\u2022 Maximum write area: 8\u201dx 8\u201d<br \/>\u2022 Minimum substrate size: 1cm x 1cm<br \/>\u2022 Substrate thickness: 0 \u2013 10 mm<br \/>\u2022 Motion stage minimum XY step size: 4nm<br \/>\u2022 Maximum resolution: 0.6\u00b5m<br \/>\u2022 Surface tracking autofocus, automatic lens changer for exposure resolution and alignment microscope<br \/>\u2022 Optical surface profiler Z resolution: 100nm<br \/>\u2022 Exposure wavelength: 365nm and 405nm<br \/>\u2022 Maximum writing speed: 50 mm2\/minute at 1 \u00b5m &amp; 15 mm2\/minute at 0.6 \u00b5m<br \/>\u2022 Overlay alignment accuracy at best resolution: \u00b1 0.5\u00b5m<br \/>\u2022 Mask design software: Clewin supplied<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Location:\u00a0<\/strong>E6-01-03, Class 10 Cleanroom<\/p><p><strong>Contact<\/strong>: e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":30819,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[50,52,41],"tags":[117],"class_list":["post-34744","post","type-post","status-publish","format-standard","has-post-thumbnail","category-l1-cr","category-lithography-the-capabilities","category-the-capabilities","tag-microwriter-dmo-microwriter-ml3-pro"],"menu_order":2,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34744","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34744"}],"version-history":[{"count":28,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34744\/revisions"}],"predecessor-version":[{"id":42725,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34744\/revisions\/42725"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/30819"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34744"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34744"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34744"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}