{"id":34754,"date":"2022-11-12T01:22:29","date_gmt":"2022-11-12T01:22:29","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34754"},"modified":"2026-05-19T06:18:28","modified_gmt":"2026-05-19T06:18:28","slug":"mask-aligner-ma6-class-10k","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/mask-aligner-ma6-class-10k\/","title":{"rendered":"Mask Aligner MA6 (Class 10K)"},"content":{"rendered":"\t\t
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MASK ALIGNER MA6 (CLASS 10K)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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System Overview<\/strong><\/p>

Karl Suss MA6 is a manual mask aligner for contact or proximity UV lithography. It supports small, irregular sample pieces as well as standard 2-inch wafers, making it suitable for prototyping and teaching use in the L2 cleanroom.<\/p>

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Technical Specifications<\/strong><\/p>

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\u2022 Exposure Optics: UV400 broadband; I-line (365 nm) and G-line (405\u2013436 nm)\u00a0
<\/span> \u2022 Lamp Power: ~350 W Hg lamp\u00a0<\/span>
<\/span>\u2022 Exposure Modes: Proximity, soft\/hard contact, low-vacuum & vacuum contact, flood exposure\u00a0<\/span>
\u2022 Top-Side Alignment (TSA) with X\/Y\/<\/span>\u0398 micro-positioning; accuracy ~<\/span>\u00b10.5 \u00b5m\u00a0
<\/span>\u2022 Manual X\/Y\/<\/span>\u0398 micro-positioning with microscope viewing for small areas\u00a0\u00a0
<\/span>\u2022 Proximity Gap: Programmable ~10\u2013300 <\/span>\u00b5m (1 \u00b5m steps, tool-dependent)\u00a0\u00a0
<\/span>\u2022 Substrate Size: Irregular chips\/dies up to 2\u2033 wafers (< 4mm thick)\u00a0
<\/span> \u2022 The max coupon size is 2cm square\u00a0
<\/span> \u2022 Mask Size: Typically 3\u2033 square chrome\/glass masks (user-supplied)\u00a0\u00a0
<\/span> \u2022 Vacuum contact: ~0.4\u20130.6 <\/span>\u00b5m\u00a0
<\/span>\u2022 Soft-\/hard-contact: ~0.5\u20131 <\/span>\u00b5m\u00a0\u00a0
<\/span>\u2022 Proximity (~20 <\/span>\u00b5m gap): ~2.5<\/span>\u20133.5 <\/span>\u00b5m<\/span><\/p>

Location: <\/strong>E6-02-07, Level 2 Cleanroom, Class 10000<\/span><\/p>

Contact<\/strong>: e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

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