{"id":34787,"date":"2022-12-28T03:37:47","date_gmt":"2022-12-28T03:37:47","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34787"},"modified":"2026-07-09T06:04:40","modified_gmt":"2026-07-09T06:04:40","slug":"integrated-icp-etch-clustering-system","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/integrated-icp-etch-clustering-system\/","title":{"rendered":"Integrated ICP Etch Clustering System"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34787\" class=\"elementor elementor-34787\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-97f4a2b elementor-widget elementor-widget-spacer\" data-id=\"97f4a2b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">INTEGRATED ICP ETCH CLUSTERING SYSTEM<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a924be elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"8a924be\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a6e0c35 elementor-widget elementor-widget-spacer\" data-id=\"a6e0c35\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-59c27c4 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"59c27c4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-035ceae\" data-id=\"035ceae\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5d2772d elementor-widget elementor-widget-text-editor\" data-id=\"5d2772d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong><br \/><img fetchpriority=\"high\" decoding=\"async\" class=\" wp-image-29059 alignright\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-300x225.jpg\" sizes=\"(max-width: 300px) 100vw, 300px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-300x225.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-768x576.jpg 768w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/ICP_E6-05-09-1024x768.jpg 1024w\" alt=\"\" width=\"417\" height=\"312\" \/><\/strong><\/p><p>The Integrated ICP Etch Cluster comprises Metal etch module, Dielectric etch module and III-V etch module. It is capable to handle 6\u201d wafer with up to 8 mass flow controlled gas lines for each module.<\/p><h4>1. THE METAL ETCH MODULE<\/h4><ul><li>Metal etch module (W, Al, AlN tested)<\/li><li>InP grating etch<\/li><li>Cryo-cooled\/electrically heated etch lower electrode, working temperature:\u00a0 -20C~70C<\/li><li>Standard gasline and MFC for nontoxic gases (SF6, Ar, O2, N2)<\/li><li>Bypassed gas line and MFC for toxic gas (Cl2, BCl3, HBr)<\/li><li>External gaspod gas line heating kit for low vapour pressure gases (BCl3)<\/li><\/ul><h4>2. DIELECTRIC MODULE<\/h4><ul><li>Standard gas line and MFC for nontoxic gases (SF6, Ar, O2, N2, C4F8, CHF3)<\/li><li>Bypassed gas line and MFC for toxic gas (Cl2)<\/li><\/ul><h4><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si.jpg\"><img decoding=\"async\" class=\"alignnone size-large wp-image-30336\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si-1024x397.jpg\" sizes=\"(max-width: 1024px) 100vw, 1024px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si-1024x397.jpg 1024w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si-300x116.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si-768x298.jpg 768w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/04\/20200422_dielectric-etch_SiO2_SiN_a-Si.jpg 1336w\" alt=\"\" width=\"1024\" height=\"397\" \/><\/a><\/h4><h4>3. III-V ETCH MODULE<\/h4><ul><li>Cryo-cooled\/electrically heated etch lower electrode, working temperature:\u00a0 \u00a0-20C~35C<\/li><li>Rapid cooling from cryo to chiller mode, from 200\u00b0C to 20\u00b0C in 40 minutes<\/li><li>Standard gasline and MFC for nontoxic gases (SF6, Ar, O2, N2)<\/li><li>Bypassed gas line and MFC for toxic gas (Cl2, BCl3, H2,CH4)<\/li><li>External gaspod gas line heating kit for low vapour pressure gases (BCl3)<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Location:\u00a0<\/strong><span style=\"letter-spacing: 0px;\">E6-05-09, Cleanroom<\/span><\/p><p><strong>Contact:\u00a0<\/strong>e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":4,"featured_media":29059,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[53,55,41],"tags":[],"class_list":["post-34787","post","type-post","status-publish","format-standard","has-post-thumbnail","category-etching","category-l2-cr-cleanrooms","category-the-capabilities"],"menu_order":3,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34787","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34787"}],"version-history":[{"count":47,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34787\/revisions"}],"predecessor-version":[{"id":42342,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34787\/revisions\/42342"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/29059"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34787"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34787"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34787"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}