{"id":34792,"date":"2022-11-12T14:01:07","date_gmt":"2022-11-12T14:01:07","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34792"},"modified":"2026-03-26T08:49:54","modified_gmt":"2026-03-26T08:49:54","slug":"xef2-etcher","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/xef2-etcher\/","title":{"rendered":"Xef2 Etcher"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34792\" class=\"elementor elementor-34792\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-988b749 elementor-widget elementor-widget-spacer\" data-id=\"988b749\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">XEF2 ETCHER<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3e786b5 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"3e786b5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-bc4d70c elementor-widget elementor-widget-image\" data-id=\"bc4d70c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"433\" height=\"577\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background.png\" class=\"attachment-large size-large wp-image-41015\" alt=\"Xenon_Difluoride Xef2 Etcher -remove background\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background.png 433w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2022\/11\/xenon_Difluoride-Xef2-Etcher-remove-background-225x300.png 225w\" sizes=\"(max-width: 433px) 100vw, 433px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5401b4a elementor-widget elementor-widget-spacer\" data-id=\"5401b4a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p>Xenon Difluoride etcher is a kind of vapor etcher where reactive gas spontaneously reacts with a material in vapor phase.<\/p><p>This XeF2 can etch Si and Ge isotropically and offers excellent selectivity to various materials such as Al, SiO2, Si3N4 and photoresist.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Location:\u00a0<\/strong> L2 Dry Lab<\/p><p><strong>Contact:\u00a0<\/strong>e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":41015,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[53,41],"tags":[],"class_list":["post-34792","post","type-post","status-publish","format-standard","has-post-thumbnail","category-etching","category-the-capabilities"],"menu_order":3,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34792","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34792"}],"version-history":[{"count":19,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34792\/revisions"}],"predecessor-version":[{"id":41576,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34792\/revisions\/41576"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/41015"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34792"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34792"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34792"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}