{"id":34793,"date":"2022-11-12T15:00:11","date_gmt":"2022-11-12T15:00:11","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34793"},"modified":"2023-04-13T07:42:15","modified_gmt":"2023-04-13T07:42:15","slug":"plasma-asher","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/plasma-asher\/","title":{"rendered":"Plasma Asher"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"34793\" class=\"elementor elementor-34793\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2253966 elementor-widget elementor-widget-spacer\" data-id=\"2253966\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">PLASMA ASHER<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-17dbac4 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"17dbac4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3ad35c6 elementor-widget elementor-widget-spacer\" data-id=\"3ad35c6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p>Plasma Asher uses oxygen plasma to remove photoresist from wafers.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Technical specifications<img fetchpriority=\"high\" decoding=\"async\" class=\" wp-image-29057 alignright\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-225x300.jpg\" sizes=\"(max-width: 225px) 100vw, 225px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-225x300.jpg 225w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2019\/05\/Plasma-Etcher_E6-05-09-e1559305897192-768x1024.jpg 768w\" alt=\"\" width=\"266\" height=\"355\" \/><\/strong><\/p><ul><li>Capable to handle 200 mm wafers<\/li><li>Gas Flows: O2= 1000 \u2013 2000 sccm. N2 \u2013 100 \u2013500 sccm<\/li><li>\u03bc-wave Power: 2.45GHz, 1000 watt, continuously adjustable<\/li><li>Base pressure: \u22640.5 mtorr<\/li><li>Operating pressure: 0.5- 5 mtorr<\/li><li>IR temperature measurement outside chamber<\/li><li>Optical Endpoint Detector (based on plasma intensity signal)<\/li><li>Platen Temperature: 100\u00b0 \u2013 300\u00b0 C<\/li><li>Uniformity within wafer: 2% \u2013 5%<\/li><li>Wafer to Wafer: 2% \u2013 4%<\/li><li>Ash Rate: min &lt; 200\u00c5 \u2013 max \u2265 3 \u03bcm.\/min.<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Location:\u00a0<\/strong>E6-05-09, Cleanroom<\/p><p><strong>Contact:\u00a0<\/strong>e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":29057,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[53,55,41],"tags":[],"class_list":["post-34793","post","type-post","status-publish","format-standard","has-post-thumbnail","category-etching","category-l2-cr-cleanrooms","category-the-capabilities"],"menu_order":3,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34793","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34793"}],"version-history":[{"count":23,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34793\/revisions"}],"predecessor-version":[{"id":38510,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34793\/revisions\/38510"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/29057"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34793"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34793"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34793"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}