{"id":34876,"date":"2022-11-16T03:00:29","date_gmt":"2022-11-16T03:00:29","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34876"},"modified":"2026-07-30T07:25:15","modified_gmt":"2026-07-30T07:25:15","slug":"optical-microscope","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/optical-microscope\/","title":{"rendered":"Optical Microscope – Nikon Eclipse L200N \/ Keyence VHX"},"content":{"rendered":"\t\t
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Optical Microscope - Nikon Eclipse L200N \/ Keyence VHX<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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System Overview<\/strong><\/p>

The Nikon Eclipse L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticles and other substrates.<\/p>

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Main Body<\/strong><\/div>
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Built-in\u00a0Episcopic Illumination; built-in power sources for motorized control; light intensity control; aperture diaphragm control.<\/p>

Fo<\/strong>c<\/span>using Mechanism<\/strong><\/p>

  • Cross travel: 29mm<\/li>
  • Coarse: 12.7mm per rotation (torque adjustable, refocusing mechanism)<\/li>
  • Fine: 0.1mm per rotation (in 1\u00b5m increments)<\/li><\/ul><\/div>
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    Episcopic Illuminator<\/strong><\/div>
    • 12V\/100W halogen lamp light source built-in; otorized aperture diaphragm<\/li>
    • fixed field diaphragm (with focus target)<\/li><\/ul>
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      Eyepiece Tube<\/strong><\/div>
      • L2TT Ultrawide tilting trinocular eyepiece tube (tilt angle 0-30\u00b0);F.O.V: 25mm<\/li>
      • 2-way optical path changeover<\/li><\/ul>
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        Stage<\/strong><\/div>
        • 8 x 8 Stage; stroke: 205 x 205mm<\/li>
        • Coarse\/fine movement changeover possible<\/li>
        • Fixed-position X-Y fine-movement controls<\/li><\/ul>
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          Eyepieces<\/strong><\/div>
          • CFI eyepiece lens series<\/li><\/ul>
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            Objectives<\/strong><\/div>
            • CFI60 LU\/L Plan series<\/li><\/ul>

              \u00a0<\/b><\/p>

              Location:\u00a0<\/b>E6-01-01<\/span><\/p>

              Contact:<\/strong>\u00a0e6nanoab@nus.edu.sg<\/p><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

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