{"id":34898,"date":"2022-11-25T07:09:14","date_gmt":"2022-11-25T07:09:14","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=34898"},"modified":"2024-10-28T09:40:25","modified_gmt":"2024-10-28T09:40:25","slug":"uv-ozone-cleaner","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/uv-ozone-cleaner\/","title":{"rendered":"UV Ozone Cleaner"},"content":{"rendered":"\t\t
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UV OZONE CLEANER<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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System Overview<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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The compact Samco UV-1 Ozone Cleaner utilizes a unique combination of ultraviolet light, ozone and controlled heating to etch organic materials.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t

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Technical Specifications<\/strong><\/p>

  • Substrate Size \u2013 upto 150mm (6 inch)<\/li>
  • Maximum Sample Thickness \u2013 5mm (17mm, between stage and\u00a0UV lamp)<\/li>
  • UV light Source \u2013 Hot cathode, low-pressure mercury vaper lamp (primary wavelengths:254 nm and 185 nm)<\/li>
  • Ozone generator \u2013 Silent discharge type; at least 5g\/m3 at 0.5 liter\/min oxygen flow rate<\/li>
  • UV-lamp and Ozone generator switches\u00a0\u2013 can be switched ON or OFF during the process<\/li>
  • Substrate heater \u2013 Ambient to 300\u00b0C<\/li>
  • Digital Timer \u2013\u00a0 0 to 99 min:59 sec<\/li>
  • Ozone killer \u2013 Common metal honeycomb type ozone scrubber removes residual ozone in the process gas exhaust stream. Concentration of ozone at the exhaust is less than 0.1PPM<\/li>
  • Dimensions \u2013 450mm(W)x400mm(D)x411mm(H)<\/li><\/ul>

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    <\/strong>Applications<\/strong><\/p>

    • Removing organic contamination<\/li>
    • Pre-cleaning wafers prior to deposition<\/li>
    • Descumming photoresist and polyimide<\/li>
    • Cleaning prior to wafer bonding<\/li>
    • Surface modification for better adhesion<\/li>
    • UV curing<\/li>
    • Growth of thin stable oxide films (GE, GaAs, Si)<\/li><\/ul>

      \u00a0<\/strong><\/p>

      Location:\u00a0<\/strong>E6-01-09, Class 100 Cleanroom<\/p>

      Contact:<\/strong>\u00a0e6nanofab@nus.edu.sg<\/p><\/div>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

       <\/p>\n","protected":false},"author":5,"featured_media":28801,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[50,60],"tags":[],"class_list":["post-34898","post","type-post","status-publish","format-standard","has-post-thumbnail","category-l1-cr","category-others"],"menu_order":106,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34898","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=34898"}],"version-history":[{"count":10,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34898\/revisions"}],"predecessor-version":[{"id":41065,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/34898\/revisions\/41065"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/28801"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=34898"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=34898"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=34898"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}