{"id":35199,"date":"2022-11-24T01:55:29","date_gmt":"2022-11-24T01:55:29","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=35199"},"modified":"2023-04-03T08:29:04","modified_gmt":"2023-04-03T08:29:04","slug":"fib-sem","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem\/","title":{"rendered":"FIB-SEM"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"35199\" class=\"elementor elementor-35199\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9b224b1 elementor-widget elementor-widget-spacer\" data-id=\"9b224b1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">FIB-SEM<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-43e7cde elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"43e7cde\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-684b7b9 elementor-widget elementor-widget-spacer\" data-id=\"684b7b9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><ul><li>Process viewing Cut &amp; See<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg\" sizes=\"(max-width: 346px) 100vw, 346px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg 346w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM-208x300.jpg 208w\" alt=\"\" width=\"346\" height=\"498\" \/><\/li><li>Failure analysis<\/li><\/ul><p><strong><br \/>Technical Specifications<\/strong><\/p><ul><li>Up to 8\u201d wafer inspection in both SESM as in FIB operation enable by the new triple lens design<\/li><li>Max Specimen Height: 96 mm (with rotation stage); 137 mm (without rotation stage)<\/li><li>Integrated TOF-SIMS with a compact TOFSIMS dector and uses FIB column as primary ion beam with 3D compositional analysis<\/li><li>Magnification at 30kV: 4x-1,000,000x<\/li><li>Maximum Field of View: 4.3 mm at WD; analytical 5 mm; 7.5 mm at WD 30mm<\/li><li>Electron Beam Energy: 200 eV to 30 keV down to 50eV with Beam Deceleration mode<\/li><li>FIB Resolution : &lt;2.5nm at 30kV (at SEM-FIB coincidence point)<\/li><li>Accelerating voltage: 0.5 kV to 30 kV<\/li><li>Ion Gun : Ga Liquid Metal Ion Source<\/li><li>Probe Current: 1 pA to 50 nA<\/li><li>FIB angle: 55 degree<\/li><li>Gas injection system : Tungsten and Platinum<\/li><li>Model: TESCAN GAIA3<\/li><\/ul><p><em>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 <span style=\"color: #4a1a1a;\">Quality of Patterned Resist<\/span><\/em><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\">\u00a0 \u00a0 \u00a0 \u00a0 \u00a0<img decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\" sizes=\"(max-width: 480px) 100vw, 480px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg 996w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-300x100.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-768x255.jpg 768w\" alt=\"\" width=\"480\" height=\"159\" \/><\/a><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\"><strong>\u00a0 \u00a0 \u00a0 \u00a0 <img decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\" sizes=\"(max-width: 506px) 100vw, 506px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg 978w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-300x120.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-768x306.jpg 768w\" alt=\"\" width=\"506\" height=\"202\" \/><\/strong><\/a><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\"><strong>\u00a0 \u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\" sizes=\"(max-width: 514px) 100vw, 514px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg 1024w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-300x106.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-768x272.jpg 768w\" alt=\"\" width=\"514\" height=\"182\" \/><\/strong><\/a><\/p><p><strong>\u00a0<\/strong><\/p><p><strong>\u00a0Location:\u00a0<\/strong>E6-03-02, Metrology<\/p><p><strong>\u00a0Contact:<\/strong>\u00a0e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":30385,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[74,67,56],"tags":[],"class_list":["post-35199","post","type-post","status-publish","format-standard","has-post-thumbnail","category-drylab-metrology-test","category-metrology","category-metrology-n-test"],"menu_order":0,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=35199"}],"version-history":[{"count":22,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199\/revisions"}],"predecessor-version":[{"id":38347,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199\/revisions\/38347"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/30385"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=35199"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=35199"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=35199"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}