{"id":35199,"date":"2022-11-24T01:55:29","date_gmt":"2022-11-24T01:55:29","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=35199"},"modified":"2023-04-03T08:29:04","modified_gmt":"2023-04-03T08:29:04","slug":"fib-sem","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem\/","title":{"rendered":"FIB-SEM"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"35199\" class=\"elementor elementor-35199\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9b224b1 elementor-widget elementor-widget-spacer\" data-id=\"9b224b1\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container{height:100%;width:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty,.e-con>.elementor-widget-spacer.elementor-widget-empty{position:relative;min-height:22px;min-width:22px}.e-con-inner>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon,.e-con>.elementor-widget-spacer.elementor-widget-empty .elementor-widget-empty-icon{position:absolute;top:0;bottom:0;left:0;right:0;margin:auto;padding:0;width:22px;height:22px}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h2 class=\"elementor-heading-title elementor-size-default\">FIB-SEM<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-43e7cde elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"43e7cde\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-widget-divider{--divider-border-style:none;--divider-border-width:1px;--divider-color:#0c0d0e;--divider-icon-size:20px;--divider-element-spacing:10px;--divider-pattern-height:24px;--divider-pattern-size:20px;--divider-pattern-url:none;--divider-pattern-repeat:repeat-x}.elementor-widget-divider .elementor-divider{display:flex}.elementor-widget-divider .elementor-divider__text{font-size:15px;line-height:1;max-width:95%}.elementor-widget-divider .elementor-divider__element{margin:0 var(--divider-element-spacing);flex-shrink:0}.elementor-widget-divider .elementor-icon{font-size:var(--divider-icon-size)}.elementor-widget-divider .elementor-divider-separator{display:flex;margin:0;direction:ltr}.elementor-widget-divider--view-line_icon .elementor-divider-separator,.elementor-widget-divider--view-line_text .elementor-divider-separator{align-items:center}.elementor-widget-divider--view-line_icon .elementor-divider-separator:after,.elementor-widget-divider--view-line_icon .elementor-divider-separator:before,.elementor-widget-divider--view-line_text .elementor-divider-separator:after,.elementor-widget-divider--view-line_text .elementor-divider-separator:before{display:block;content:\"\";border-block-end:0;flex-grow:1;border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--element-align-left .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-left .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-left .elementor-divider__element{margin-left:0}.elementor-widget-divider--element-align-right .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-right .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-right .elementor-divider__element{margin-right:0}.elementor-widget-divider--element-align-start .elementor-divider .elementor-divider-separator>.elementor-divider__svg:first-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-start .elementor-divider-separator:before{content:none}.elementor-widget-divider--element-align-start .elementor-divider__element{margin-inline-start:0}.elementor-widget-divider--element-align-end .elementor-divider .elementor-divider-separator>.elementor-divider__svg:last-of-type{flex-grow:0;flex-shrink:100}.elementor-widget-divider--element-align-end .elementor-divider-separator:after{content:none}.elementor-widget-divider--element-align-end .elementor-divider__element{margin-inline-end:0}.elementor-widget-divider:not(.elementor-widget-divider--view-line_text):not(.elementor-widget-divider--view-line_icon) .elementor-divider-separator{border-block-start:var(--divider-border-width) var(--divider-border-style) var(--divider-color)}.elementor-widget-divider--separator-type-pattern{--divider-border-style:none}.elementor-widget-divider--separator-type-pattern.elementor-widget-divider--view-line .elementor-divider-separator,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:after,.elementor-widget-divider--separator-type-pattern:not(.elementor-widget-divider--view-line) .elementor-divider-separator:before,.elementor-widget-divider--separator-type-pattern:not([class*=elementor-widget-divider--view]) .elementor-divider-separator{width:100%;min-height:var(--divider-pattern-height);-webkit-mask-size:var(--divider-pattern-size) 100%;mask-size:var(--divider-pattern-size) 100%;-webkit-mask-repeat:var(--divider-pattern-repeat);mask-repeat:var(--divider-pattern-repeat);background-color:var(--divider-color);-webkit-mask-image:var(--divider-pattern-url);mask-image:var(--divider-pattern-url)}.elementor-widget-divider--no-spacing{--divider-pattern-size:auto}.elementor-widget-divider--bg-round{--divider-pattern-repeat:round}.rtl .elementor-widget-divider .elementor-divider__text{direction:rtl}.e-con-inner>.elementor-widget-divider,.e-con>.elementor-widget-divider{width:var(--container-widget-width,100%);--flex-grow:var(--container-widget-flex-grow)}<\/style>\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-684b7b9 elementor-widget elementor-widget-spacer\" data-id=\"684b7b9\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.22.0 - 26-06-2024 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p><strong>System Overview<\/strong><\/p><ul><li>Process viewing Cut &amp; See<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg\" sizes=\"(max-width: 346px) 100vw, 346px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM.jpg 346w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Tescan-FIB-SEM-208x300.jpg 208w\" alt=\"\" width=\"346\" height=\"498\" \/><\/li><li>Failure analysis<\/li><\/ul><p><strong><br \/>Technical Specifications<\/strong><\/p><ul><li>Up to 8\u201d wafer inspection in both SESM as in FIB operation enable by the new triple lens design<\/li><li>Max Specimen Height: 96 mm (with rotation stage); 137 mm (without rotation stage)<\/li><li>Integrated TOF-SIMS with a compact TOFSIMS dector and uses FIB column as primary ion beam with 3D compositional analysis<\/li><li>Magnification at 30kV: 4x-1,000,000x<\/li><li>Maximum Field of View: 4.3 mm at WD; analytical 5 mm; 7.5 mm at WD 30mm<\/li><li>Electron Beam Energy: 200 eV to 30 keV down to 50eV with Beam Deceleration mode<\/li><li>FIB Resolution : &lt;2.5nm at 30kV (at SEM-FIB coincidence point)<\/li><li>Accelerating voltage: 0.5 kV to 30 kV<\/li><li>Ion Gun : Ga Liquid Metal Ion Source<\/li><li>Probe Current: 1 pA to 50 nA<\/li><li>FIB angle: 55 degree<\/li><li>Gas injection system : Tungsten and Platinum<\/li><li>Model: TESCAN GAIA3<\/li><\/ul><p><em>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 <span style=\"color: #4a1a1a;\">Quality of Patterned Resist<\/span><\/em><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\">\u00a0 \u00a0 \u00a0 \u00a0 \u00a0<img decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg\" sizes=\"(max-width: 480px) 100vw, 480px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist.jpg 996w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-300x100.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist-768x255.jpg 768w\" alt=\"\" width=\"480\" height=\"159\" \/><\/a><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\"><strong>\u00a0 \u00a0 \u00a0 \u00a0 <img decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg\" sizes=\"(max-width: 506px) 100vw, 506px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness.jpg 978w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-300x120.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_AI203-Thickness-768x306.jpg 768w\" alt=\"\" width=\"506\" height=\"202\" \/><\/strong><\/a><\/p><p><a href=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\"><strong>\u00a0 \u00a0 \u00a0 \u00a0<img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg\" sizes=\"(max-width: 514px) 100vw, 514px\" srcset=\"https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness.jpg 1024w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-300x106.jpg 300w, https:\/\/e6nanofab.nus.edu.sg\/wp-content\/uploads\/2020\/07\/L3-Metro-FIB-SEM-Patterned-Resist_Nitride-Etech-Thickness-768x272.jpg 768w\" alt=\"\" width=\"514\" height=\"182\" \/><\/strong><\/a><\/p><p><strong>\u00a0<\/strong><\/p><p><strong>\u00a0Location:\u00a0<\/strong>E6-03-02, Metrology<\/p><p><strong>\u00a0Contact:<\/strong>\u00a0e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":30385,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[74,67,56],"tags":[],"class_list":{"0":"post-35199","1":"post","2":"type-post","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","7":"category-drylab-metrology-test","8":"category-metrology","9":"category-metrology-n-test"},"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=35199"}],"version-history":[{"count":22,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199\/revisions"}],"predecessor-version":[{"id":38347,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35199\/revisions\/38347"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/30385"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=35199"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=35199"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=35199"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}