{"id":35204,"date":"2022-11-24T01:56:55","date_gmt":"2022-11-24T01:56:55","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=35204"},"modified":"2026-07-30T07:38:29","modified_gmt":"2026-07-30T07:38:29","slug":"fib-sem-ultra-high-resolution","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/fib-sem-ultra-high-resolution\/","title":{"rendered":"Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8230"},"content":{"rendered":"\t\t
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Fe-SEM (ULTRA HIGH RESOLUTION)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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System Overview<\/strong><\/p>

Multi-signal detection and imaging system, for elemental composition, crystal and surface information.<\/p>

  • Model: Hitachi Regulus 8230<\/em><\/strong><\/pre><\/li><\/ul>
    \"\"<\/strong><\/p>
    Technical Specifications<\/strong><\/p>
    • Accelerating Voltage: 0.5 \u2013 30kV<\/li>
    • Resolution: 0.7nm at 15kV (SE) 0.9nm at 1kV w\/ deceleration (SE)<\/li>
    • Magnification Range: 20X \u2013 2,000 X (Low Mag) 100X \u2013 2,000,000X (High Mag)<\/li>
    • Detectors: Lower\/ Upper\/ Top, YAG BSE, STEM (Bright-Field\/ PD-Dark Field) and EDX.<\/li>
    • Stage Traverse: (5-axis Motorized) X: 0 \u2013 110mm Y: 0 \u2013 11mm Z: 1.5 \u2013 40mm R: 360\u00b0 T: -5\u00b0 \u2013 +70\u00b0<\/li>
    • Observable Range: 150mm dia. (MAX Sample Size)<\/li>
    • Specimen Exchange Chamber size: 6 inch dia.<\/li>
    • Mountable specimen thickness: 27mm (Diameter \u2266 33mm)<\/li><\/ul>
      High Resolution Imaging\u00a0\u00a0<\/em><\/span><\/p>
      \"\"<\/p>
      \u00a0<\/div>
      \u00a0<\/strong>Location:\u00a0<\/strong>E6-03-02, Metrology<\/span><\/p>
      \u00a0Contact:<\/strong>\u00a0e6nanofab@nus.edu.sg<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"
       <\/p>\n","protected":false},"author":5,"featured_media":38744,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[74,67],"tags":[],"class_list":["post-35204","post","type-post","status-publish","format-standard","has-post-thumbnail","category-drylab-metrology-test","category-metrology"],"menu_order":7,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35204","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=35204"}],"version-history":[{"count":45,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35204\/revisions"}],"predecessor-version":[{"id":42780,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/35204\/revisions\/42780"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/38744"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=35204"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=35204"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=35204"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}