{"id":38708,"date":"2022-11-12T07:00:33","date_gmt":"2022-11-12T07:00:33","guid":{"rendered":"https:\/\/dev.consapsg.com\/?p=38708"},"modified":"2026-07-30T07:39:06","modified_gmt":"2026-07-30T07:39:06","slug":"fe-sem-ultra-high-resolution-cleanroom","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/fe-sem-ultra-high-resolution-cleanroom\/","title":{"rendered":"Field Emission Scanning Electron Microscope (FE-SEM) &#8211; Hitachi Regulus 8100"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"38708\" class=\"elementor elementor-38708\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-0f08da5\" data-id=\"0f08da5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f22558f elementor-widget elementor-widget-spacer\" data-id=\"f22558f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Field Emission Scanning Electron Microscope (FE-SEM) - Hitachi Regulus 8100<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-08dd8f0 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"08dd8f0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-16284b7 elementor-widget elementor-widget-spacer\" data-id=\"16284b7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p>Multi-signal detection and imaging system, for elemental composition, crystal and surface information.<\/p><ul><li><pre><strong><em>Model: Hitachi Regulus 8100<\/em><\/strong><\/pre><\/li><\/ul><p>\u00a0 \u00a0 <img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone  wp-image-38703\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/Regulus-8100-300x284.png\" alt=\"\" width=\"407\" height=\"385\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/Regulus-8100-300x284.png 300w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2023\/04\/Regulus-8100.png 520w\" sizes=\"(max-width: 407px) 100vw, 407px\" \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<\/p><p><strong>Technical Specifications<\/strong><\/p><ul><li>Accelerating Voltage: 0.5 \u2013 30kV<\/li><li>Resolution: 0.8nm at 15kV (SE) 1.1nm at 1kV w\/ deceleration (SE)<\/li><li>Magnification Range: 20X \u2013 2,000 X (Low Mag) 100X \u2013 1,000,000X (High Mag)<\/li><li>Detectors: Lower\/ Upper\/ Top, YAG BSE, STEM (Bright-Field\/ PD-Dark Field).<\/li><li>Stage Traverse: (5-axis Motorized) <br \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 X: 0 \u2013 110mm <br \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Y: 0 \u2013 11mm <br \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Z: 1.5 \u2013 40mm <br \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 R: 360\u00b0 <br \/>\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 T: -5\u00b0 \u2013 +70\u00b0<\/li><li>Observable Range: 150mm dia. (MAX Sample Size)<\/li><li>Specimen Exchange Chamber size: 6 inch dia.<\/li><li>Mountable specimen thickness: 27mm (Diameter \u2266 33mm)<\/li><\/ul><p><strong style=\"letter-spacing: 0px;\">\u00a0<\/strong><strong style=\"letter-spacing: 0px;\">Location:\u00a0<\/strong><span style=\"letter-spacing: 0px;\">E6-01, L1 Cleanroom<\/span><\/p><p><strong style=\"letter-spacing: 0px;\">\u00a0Contact:<\/strong><span style=\"letter-spacing: 0px;\">\u00a0 \u00a0e6nanofab@nus.edu.sg<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":5,"featured_media":38703,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[46,50,67],"tags":[],"class_list":["post-38708","post","type-post","status-publish","format-standard","has-post-thumbnail","category-cleanrooms","category-l1-cr","category-metrology"],"menu_order":7,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/38708","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/5"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=38708"}],"version-history":[{"count":16,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/38708\/revisions"}],"predecessor-version":[{"id":42781,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/38708\/revisions\/42781"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/38703"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=38708"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=38708"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=38708"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}