{"id":40343,"date":"2019-10-07T13:44:00","date_gmt":"2019-10-07T13:44:00","guid":{"rendered":"https:\/\/cde.nus.edu.sg\/e6nanofab\/?p=40343"},"modified":"2026-06-18T10:31:16","modified_gmt":"2026-06-18T10:31:16","slug":"development-of-functional-micro-and-nano-structures-by-electron-beam-lithography-at-institute-of-scientific-instruments-of-czech-academy-of-science","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/development-of-functional-micro-and-nano-structures-by-electron-beam-lithography-at-institute-of-scientific-instruments-of-czech-academy-of-science\/","title":{"rendered":"Development of Functional Micro and Nano Structures by Electron Beam Lithography at Institute of Scientific Instruments of Czech Academy of Science"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"40343\" class=\"elementor elementor-40343\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6423d24 elementor-section-full_width elementor-section-height-default elementor-section-height-default\" data-id=\"6423d24\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-203d275\" data-id=\"203d275\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2e3ca0d elementor-widget elementor-widget-shortcode\" data-id=\"2e3ca0d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"shortcode.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-shortcode\">\n\t\t\t\t<p class=\"rs-p-wp-fix\"><\/p>\n\t\t\t\t<sr7-module data-alias=\"event-1\" data-id=\"32\" id=\"SR7_32_1\" data-version=\"6.7.57\">\n\t\t\t\t\t<sr7-adjuster><\/sr7-adjuster>\n\t\t\t\t\t<sr7-content>\n\t\t\t\t\t\t<sr7-slide id=\"SR7_32_1-43\" data-key=\"43\">\n\t\t\t\t\t\t\t<sr7-bg id=\"SR7_32_1-43-slidebg\" class=\"sr7-layer\"><noscript><img decoding=\"async\" src=\"https:\/\/dev-e6nano-nus.pantheonsite.io\/wp-content\/uploads\/revslider\/event\/event1.jpeg\" alt=\"\" title=\"event1.jpeg\"><\/noscript><\/sr7-bg>\n\t\t\t\t\t\t<\/sr7-slide>\n\t\t\t\t\t\t<sr7-slide id=\"SR7_32_1-70\" data-key=\"70\">\n\t\t\t\t\t\t<\/sr7-slide>\n\t\t\t\t\t<\/sr7-content>\n\t\t\t\t<\/sr7-module>\n\t\t\t\t<script>\n\t\t\t\t\twindow.SR7 ??={};SR7.PMH ??={}; SR7.PMH[\"SR7_32_1\"] = {cn:100,state:false,fn: function() { if (window._tpt!==undefined && window._tpt.prepareModuleHeight !== undefined) {  _tpt.prepareModuleHeight({id:\"SR7_32_1\",el:[269.99,468,960,720],type:'hero',shdw:'0',gh:[270,270,270,270],gw:[1240,1024,778,480],vpt:['100px'],size:{fullWidth:true, fullHeight:false},mh:'0',onh:0,onw:0,bg:{color:'transparent'},plType:'-1',plColor:'#FFFFFF'});   SR7.PMH[\"SR7_32_1\"].state=true;} else if(SR7.PMH[\"SR7_32_1\"].cn-->0)\tsetTimeout( SR7.PMH[\"SR7_32_1\"].fn,19);}};SR7.PMH[\"SR7_32_1\" ].fn();\n\t\t\t\t<\/script>\n<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-61dc5067 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"61dc5067\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-764e6270\" data-id=\"764e6270\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2e0ac7af elementor-widget elementor-widget-text-editor\" data-id=\"2e0ac7af\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Date:<\/strong>&nbsp; &nbsp;14 October 2019<br><strong>Time:<\/strong>&nbsp; &nbsp;2 &#8211; 4 pm<br><strong>Venue:<\/strong> E6-6-2, Eureka I, Block E6, 5 Engineering Drive 1, Singapore 117608<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2afc2f72 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"2afc2f72\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-455e9215\" data-id=\"455e9215\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6a4bf824 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"6a4bf824\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7b1bbcc2 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7b1bbcc2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-5dbb889c\" data-id=\"5dbb889c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-35aa0767 elementor-widget elementor-widget-text-editor\" data-id=\"35aa0767\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\tAs part of E6NanoFab overseas invited speaker series talk, we were pleased to have\u00a0 Dr. Milan Matejka with us here at E6NanoFab seminar room\u00a0 in the afternoon on 14 October 2019 to share the current research and development of the Electron Beam Lithography research team working in the Application Laboratories of Micro and Nanotechnology ISI CAS.\n<br><br>\nHis presentation offered insights into the work of his research team, which deals with micro and nano fabrication of optically or physically functional structures.\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-20734c04 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"20734c04\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-ffdeebc\" data-id=\"ffdeebc\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-1714eb32 elementor-widget-divider--separator-type-pattern elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"1714eb32\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\" style=\"--divider-pattern-url: url(&quot;data:image\/svg+xml,%3Csvg xmlns=&#039;http:\/\/www.w3.org\/2000\/svg&#039; preserveAspectRatio=&#039;none&#039; overflow=&#039;visible&#039; height=&#039;100%&#039; viewBox=&#039;0 0 24 24&#039; fill=&#039;none&#039; stroke=&#039;black&#039; stroke-width=&#039;5.6&#039; stroke-linecap=&#039;square&#039; stroke-miterlimit=&#039;10&#039;%3E%3Cpolyline points=&#039;0,18 12,6 24,18 &#039;\/%3E%3C\/svg%3E&quot;);\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-76fb18b6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"76fb18b6\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3fa4feb5\" data-id=\"3fa4feb5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5b733309 elementor-widget elementor-widget-text-editor\" data-id=\"5b733309\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>About the Speaker<\/strong><\/p><p>Milan Matejka earned his Bachelor&#8217;s and Master Degrees in the <img fetchpriority=\"high\" decoding=\"async\" class=\"wp-image-29722 size-medium alignleft\" src=\"https:\/\/dev.consapsg.com\/wp-content\/uploads\/2019\/10\/20191014_Dr-Milan-Profile-Photo-240x300.jpg\" alt=\"\" width=\"240\" height=\"300\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/10\/20191014_Dr-Milan-Profile-Photo-240x300.jpg 240w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2019\/10\/20191014_Dr-Milan-Profile-Photo.jpg 301w\" sizes=\"(max-width: 240px) 100vw, 240px\" \/>Microelectronic and technology and Electrical engineering and management from Brno university of technology in the Czech Republic. Since 2009, he became a member of the research team of Electron Beam Lithography (EBL) in the department of New Technologies at the Institute of Scientific Instruments (IS) of the CAS and finished therein his PhD (An investigation of technological aspects and issues of fabrication deep submicron resolution relief structures by the lithographic process).<\/p><p>Since 2016, Milan has been continuing working as a Post-Doctoral Researcher and EBL technologist at Application Laboratories of Micro and Nanotechnologies of the ISI of CAS, CZ.<\/p><p>In 2019, he became the CEO of IQS nano a leading-edge company developing Micro Optical Devices for LEDs and synthetic holography for Optically Variable Devices (OVDs) with security applications.<\/p><p>His current R&amp;D interests are new technologies of fabrication for micro and nano optic devices (MOD, NOD, MOMS), preparation of highly customized calibration specimens for development of new measurement methodology, additive manufacturing technologies, electron beam lithography and nanoimprint lithography.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-3c41ef60 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"3c41ef60\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-thegem\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3a0b04fa\" data-id=\"3a0b04fa\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-32d3717b elementor-widget elementor-widget-text-editor\" data-id=\"32d3717b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t&lt; Back to\u00a0<span style=\"color: #c43535;\"><a style=\"color: #c43535;\" href=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/news-activities\/\">News and Activities<\/a>\u00a0<\/span>Page\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":1,"featured_media":29973,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[4],"tags":[107],"class_list":["post-40343","post","type-post","status-publish","format-standard","has-post-thumbnail","category-past-events","tag-107"],"menu_order":0,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/40343","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=40343"}],"version-history":[{"count":10,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/40343\/revisions"}],"predecessor-version":[{"id":40555,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/40343\/revisions\/40555"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=40343"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=40343"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=40343"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}