{"id":42842,"date":"2026-10-01T07:00:43","date_gmt":"2026-10-01T07:00:43","guid":{"rendered":"https:\/\/cde.nus.edu.sg\/e6nanofab\/?p=42842"},"modified":"2026-08-18T07:47:29","modified_gmt":"2026-08-18T07:47:29","slug":"nanoimprinter-nanonex-nx-2000","status":"publish","type":"post","link":"https:\/\/cde.nus.edu.sg\/e6nanofab\/nanoimprinter-nanonex-nx-2000\/","title":{"rendered":"Nanoimprinter &#8211; Nanonex NX-2000"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"42842\" class=\"elementor elementor-42842\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4e5585a elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4e5585a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-dfcc2a4\" data-id=\"dfcc2a4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-cbec0c9 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"cbec0c9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cc1f494\" data-id=\"cc1f494\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9278c58 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9278c58\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-a491651\" data-id=\"a491651\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-11b6ec8 elementor-widget elementor-widget-spacer\" data-id=\"11b6ec8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-af5745b elementor-widget elementor-widget-heading\" data-id=\"af5745b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Nanoimprinter - Nanonex NX-2000\n<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4259e1d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"4259e1d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e7a3b2c elementor-widget elementor-widget-spacer\" data-id=\"e7a3b2c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7ffaaa6 elementor-widget__width-initial elementor-widget elementor-widget-text-editor\" data-id=\"7ffaaa6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>System Overview<\/strong><\/p><p><strong>\u00a0<\/strong><\/p><p>The NanoNex 2000 Imprint System delivers both thermal and UV nanoimprint lithography for advanced micro- and nanopatterning. Engineered for optimal performance on ceramic sol-gel surfaces, the system features built-in capabilities for extending master mold lifetime through intermediate polymer and ceramic sol-gel stamp replication processes. Additional technical specifications are outlined below.)<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>Technical Specifications<\/strong><\/p><p><!--StartFragment --><\/p><p class=\"pf0\"><span class=\"cf1\">\u2022 Exposure Optics: UV400 broadband; I-line (365 nm) and G-line (405\u2013436 nm)\u00a0<br \/><\/span><span class=\"cf1\"> \u2022 Lamp Power: ~350 W Hg lamp\u00a0<\/span><span class=\"cf1\"> <br \/><\/span><span class=\"cf1\">\u2022 Exposure Modes: Proximity, soft\/hard contact, low-vacuum &amp; vacuum contact, flood exposure\u00a0<\/span><span class=\"cf1\"> <br \/>\u2022 Top-Side Alignment (TSA) with X\/Y\/<\/span><span class=\"cf2\">\u0398 micro-positioning; accuracy ~<\/span><span class=\"cf0\">\u00b10.5 \u00b5m\u00a0<br \/><\/span><span class=\"cf1\">\u2022 Manual X\/Y\/<\/span><span class=\"cf2\">\u0398 micro-positioning with microscope viewing for small areas\u00a0\u00a0<br \/><\/span><span class=\"cf3\">\u2022 Proximity Gap: Programmable ~10\u2013300 <\/span><span class=\"cf0\">\u00b5m (1 \u00b5m steps, tool-dependent)\u00a0\u00a0<br \/><\/span><span class=\"cf1\">\u2022 Substrate Size: Irregular chips\/dies up to 2\u2033 wafers (&lt; 4mm thick)\u00a0<br \/><\/span><span class=\"cf1\"> \u2022 The max coupon size is 2cm square\u00a0<br \/><\/span><span class=\"cf1\"> \u2022 Mask Size: Typically 3\u2033 square chrome\/glass masks (user-supplied)\u00a0\u00a0<br \/><\/span><span class=\"cf1\"> \u2022 Vacuum contact: ~0.4\u20130.6 <\/span><span class=\"cf0\">\u00b5m\u00a0 <br \/><\/span><span class=\"cf1\">\u2022 Soft-\/hard-contact: ~0.5\u20131 <\/span><span class=\"cf0\">\u00b5m\u00a0\u00a0<br \/><\/span><span class=\"cf1\">\u2022 Proximity (~20 <\/span><span class=\"cf0\">\u00b5m gap): ~2.5<\/span><span class=\"cf1\">\u20133.5 <\/span><span class=\"cf0\">\u00b5m<\/span><\/p><p class=\"pf0\"><span class=\"cf0\">\u00a0<\/span><\/p><p><strong style=\"letter-spacing: 0px;\">Location: <\/strong><span style=\"letter-spacing: 0px;\">NanoNex 2000 | Level 2 | Cleanroom<br \/><\/span><\/p><p><span style=\"letter-spacing: 0px;\">\u00a0<\/span><\/p><p><strong>Contact<\/strong>: e6nanofab@nus.edu.sg<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7b0e8e6 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7b0e8e6\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-abb4f28\" data-id=\"abb4f28\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-449e4b4 elementor-widget elementor-widget-image\" data-id=\"449e4b4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"344\" height=\"241\" src=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/08\/260806_Website_-Nanoimprinter.jpg\" class=\"attachment-large size-large wp-image-42847\" alt=\"\" srcset=\"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/08\/260806_Website_-Nanoimprinter.jpg 344w, https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-content\/uploads\/2026\/08\/260806_Website_-Nanoimprinter-300x210.jpg 300w\" sizes=\"(max-width: 344px) 100vw, 344px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>&nbsp;<\/p>\n","protected":false},"author":13,"featured_media":42847,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"single-fullwidth.php","format":"standard","meta":{"footnotes":""},"categories":[46,45,54,52,41],"tags":[121],"class_list":["post-42842","post","type-post","status-publish","format-standard","has-post-thumbnail","category-cleanrooms","category-facility","category-l2-cr","category-lithography-the-capabilities","category-the-capabilities","tag-nanoimprinter-nanonex-nx-2000"],"menu_order":2,"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/42842","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/users\/13"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/comments?post=42842"}],"version-history":[{"count":13,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/42842\/revisions"}],"predecessor-version":[{"id":43032,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/posts\/42842\/revisions\/43032"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media\/42847"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/media?parent=42842"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/categories?post=42842"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/e6nanofab\/wp-json\/wp\/v2\/tags?post=42842"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}