{"id":16263,"date":"2023-10-07T15:18:53","date_gmt":"2023-10-07T07:18:53","guid":{"rendered":"https:\/\/cde.nus.edu.sg\/emf\/?page_id=16263"},"modified":"2026-02-11T11:16:17","modified_gmt":"2026-02-11T03:16:17","slug":"fib-sem","status":"publish","type":"page","link":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/","title":{"rendered":"FIB\/SEM Cluster"},"content":{"rendered":"\n<h2>\n\t\tFocused Ion Beam Microscopes\n\t<\/h2>\n\t<h3>Ga<sup>+<\/sup> Sample Preparation FIB<\/h3>\n<p><strong>FEI Helios 450S Dual Beam<\/strong><\/p>\nThe FEI Helios 450S FIB is a dual beam Ga<sup>+<\/sup> ion &amp; electron microscope with high-resolution topographical imaging and patterning capabilities. The electron beam is primarily used for surface characterization, while the ion beam is used for top-down fabrication tasks such as TEM lamella preparation, cross-section failure analysis, and nanoscale surface modification. The stability of the low voltage ion beam and chamber cleaning attachments reduces contamination and amorphization vital for S\/TEM analysis.\n\t<ul>\n<li>Field-emission electron gun<\/li>\n<li>LMIS: Ga ion beam (0.2-30 kV) \/ Tomahawk ion column<\/li>\n<li>Spatial resolution: 0.9 nm (SEM), 4.5 nm (FIB)<\/li>\n<li>In-lens and ETD SE detector<\/li>\n<li>STEM detector<\/li>\n<li>Pt &amp; C gas injection systems<\/li>\n<li>OmniProbe manipulator<\/li>\n<li>Plasma cleaner \/ cold trap<\/li>\n<\/ul>\n\t<h3>Ga<sup>+<\/sup> Large-chamber FIB<\/h3>\n<p><strong>FEI Versa 3D Dual Beam<\/strong><\/p>\nThe Versa 3D DualBeam FEG FIB-SEM combines a focused Ga ion beam with a high-resolution field-emission electron gun. Owing to a large chamber allowing up to 6&#8243; industry wafers with full rotation, the Versa 3D provides enhanced 2D and 3D materials characterization and analysis for a wide range of material science and industry-related samples. This FIB is particularly useful as a high-throughput microscope for APT sample preparation.\n\t<ul>\n<li>Field-emission electron gun<\/li>\n<li>LMIS: Ga ion beam (0.5-30 kV) \/ Sidewinder ion column<\/li>\n<li>Spatial resolution: 1.2 nm (SEM)<\/li>\n<li>ETD SE detector<\/li>\n<li>Pt &amp; C gas injection systems<\/li>\n<li>EasyLift manipulator<\/li>\n<li>150 mm maximum sample size<\/li>\n<\/ul>\n\t<h3>He<sup>+<\/sup>\/Ne<sup>+<\/sup> High-resolution FIB<\/h3>\n<p><strong>Zeiss Orion NanoFab<\/strong><\/p>\n<p>The Orion NanoFab Helium Ion Microscope (HIM) operates using ionized Helium or Neon gases rather than electrons for imaging and milling of materials. With the significantly smaller interaction volume, alongside the smaller de Broglie wavelength, the HIM can achieve finer spatial resolution and larger depth-of-field compared to a FE-SEM. Nanomachining fabrication with sub-10 nm feature sizes is achievable through lighter He ions, while faster milling is operated through heavier Ne ions.<\/p>\n\t<ul>\n<li>GFIS: He ion beam (10-30 kV), Ne ion beam (10-25 kV)<\/li>\n<li>Spatial resolution: 0.5 nm (He<sup>+<\/sup>), 1.9 nm (Ne<sup>+<\/sup>)<\/li>\n<li>ETD SE detector<\/li>\n<li>Electron flood gun<\/li>\n<li>Chamber plasma cleaner<\/li>\n<li>80 mm loadlock<\/li>\n<\/ul>\n<h2>\n\t\tScanning Electron Microscopes\n\t<\/h2>\n\t<h3>Field-emission SEM<\/h3>\n<p><strong>JEOL JSM-IT800 SHL<\/strong><\/p>\nThe JEOL IT800 SEM has a Schottky field-emission source, and utilizes hybrid magnetic and electrostatic objective lenses, allowing for high spatial resolution at low accelerating voltages. It offers various observation modes, including beam deceleration &#8211; and together with its wide range of in-lens and chamber detectors &#8211; enables high-contrast imaging across a wide range of materials. A controlled atmosphere transfer solution is available, which allows the imaging of beam and air sensitive samples.\n\t<ul>\n<li>Field-emission electron gun<\/li>\n<li>Hybrid magnetic and electrostatic lenses (SHL model)<\/li>\n<li>Spatial resolution: 0.5 nm (15 kV), 0.7 nm (1 kV), 0.9 nm (0.3 kV)<\/li>\n<li>Acceleration voltage: 0.01-30 kV<\/li>\n<li>Stage bias: 0.1-2 kV<\/li>\n<li>Probe current: Up to 300 nA<\/li>\n<li>In-lens and chamber SE detectors<\/li>\n<li>In-lens and segmented chamber BSE detectors<\/li>\n<li>Chamber plasma cleaner<\/li>\n<li>Oxford Ultim Max 170 mm<sup>2<\/sup>\u00a0EDX<\/li>\n<li>RAITH ELPHY <em>Plus<\/em> nanolithography system<\/li>\n<\/ul>\n\t<h3>Field-emission SEM<\/h3>\n<p><strong>Zeiss Sigma 300<\/strong><\/p>\nThe Zeiss Sigma 300 is a field-emission SEM able to perform high resolution imaging with secondary and backscattered electrons. It has the function to operate under high and low pressure conditions, allowing the imaging of specimens that are poorly conductive or specimens that cannot be imaged under vacuum.\n\t<ul>\n<li>Field-emission electron gun, GEMINI column<\/li>\n<li>Spatial Resolution: 1 nm (15 kV)<\/li>\n<li>Acceleration Voltage: 0.02-30 kV<\/li>\n<li>Probe current: 3-20 nA<\/li>\n<li>ETD SE, in-lens SE detector, retractable BSE detector<\/li>\n<li>High\/low vacuum<\/li>\n<li>Oxford Ultim Max 65 mm<sup>2<\/sup>\u00a0EDX<\/li>\n<\/ul>\n\n","protected":false},"excerpt":{"rendered":"<p>Focused Ion Beam Microscopes Ga+ Sample Preparation FIB FEI Helios 450S Dual Beam The FEI Helios 450S FIB is a dual beam Ga+ ion &amp; electron microscope with high-resolution topographical imaging and patterning capabilities. The electron beam is primarily used for surface characterization, while the ion beam is used for top-down fabrication tasks such as [&hellip;]<\/p>\n","protected":false},"author":289,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"full-width-container","site-content-style":"unboxed","site-sidebar-style":"unboxed","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-16263","page","type-page","status-publish","hentry"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v21.7 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>FIB\/SEM Cluster - EMF<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"FIB\/SEM Cluster - EMF\" \/>\n<meta property=\"og:description\" content=\"Focused Ion Beam Microscopes Ga+ Sample Preparation FIB FEI Helios 450S Dual Beam The FEI Helios 450S FIB is a dual beam Ga+ ion &amp; electron microscope with high-resolution topographical imaging and patterning capabilities. The electron beam is primarily used for surface characterization, while the ion beam is used for top-down fabrication tasks such as [&hellip;]\" \/>\n<meta property=\"og:url\" content=\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/\" \/>\n<meta property=\"og:site_name\" content=\"EMF\" \/>\n<meta property=\"article:modified_time\" content=\"2026-02-11T03:16:17+00:00\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"3 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/\",\"url\":\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/\",\"name\":\"FIB\/SEM Cluster - EMF\",\"isPartOf\":{\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#website\"},\"datePublished\":\"2023-10-07T07:18:53+00:00\",\"dateModified\":\"2026-02-11T03:16:17+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/\"]}]},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/cde.nus.edu.sg\/emf\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"FIB\/SEM Cluster\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#website\",\"url\":\"https:\/\/cde.nus.edu.sg\/emf\/\",\"name\":\"EMF\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/cde.nus.edu.sg\/emf\/?s={search_term_string}\"},\"query-input\":\"required name=search_term_string\"}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#organization\",\"name\":\"EMF\",\"url\":\"https:\/\/cde.nus.edu.sg\/emf\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/cde.nus.edu.sg\/emf\/wp-content\/uploads\/sites\/40\/2023\/10\/PHOTO-2023-10-13-18-49-47.jpg\",\"contentUrl\":\"https:\/\/cde.nus.edu.sg\/emf\/wp-content\/uploads\/sites\/40\/2023\/10\/PHOTO-2023-10-13-18-49-47.jpg\",\"width\":675,\"height\":375,\"caption\":\"EMF\"},\"image\":{\"@id\":\"https:\/\/cde.nus.edu.sg\/emf\/#\/schema\/logo\/image\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"FIB\/SEM Cluster - EMF","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/","og_locale":"en_US","og_type":"article","og_title":"FIB\/SEM Cluster - EMF","og_description":"Focused Ion Beam Microscopes Ga+ Sample Preparation FIB FEI Helios 450S Dual Beam The FEI Helios 450S FIB is a dual beam Ga+ ion &amp; electron microscope with high-resolution topographical imaging and patterning capabilities. The electron beam is primarily used for surface characterization, while the ion beam is used for top-down fabrication tasks such as [&hellip;]","og_url":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/","og_site_name":"EMF","article_modified_time":"2026-02-11T03:16:17+00:00","twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"3 minutes"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/","url":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/","name":"FIB\/SEM Cluster - EMF","isPartOf":{"@id":"https:\/\/cde.nus.edu.sg\/emf\/#website"},"datePublished":"2023-10-07T07:18:53+00:00","dateModified":"2026-02-11T03:16:17+00:00","breadcrumb":{"@id":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/"]}]},{"@type":"BreadcrumbList","@id":"https:\/\/cde.nus.edu.sg\/emf\/fib-sem\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/cde.nus.edu.sg\/emf\/"},{"@type":"ListItem","position":2,"name":"FIB\/SEM Cluster"}]},{"@type":"WebSite","@id":"https:\/\/cde.nus.edu.sg\/emf\/#website","url":"https:\/\/cde.nus.edu.sg\/emf\/","name":"EMF","description":"","publisher":{"@id":"https:\/\/cde.nus.edu.sg\/emf\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/cde.nus.edu.sg\/emf\/?s={search_term_string}"},"query-input":"required name=search_term_string"}],"inLanguage":"en-US"},{"@type":"Organization","@id":"https:\/\/cde.nus.edu.sg\/emf\/#organization","name":"EMF","url":"https:\/\/cde.nus.edu.sg\/emf\/","logo":{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/cde.nus.edu.sg\/emf\/#\/schema\/logo\/image\/","url":"https:\/\/cde.nus.edu.sg\/emf\/wp-content\/uploads\/sites\/40\/2023\/10\/PHOTO-2023-10-13-18-49-47.jpg","contentUrl":"https:\/\/cde.nus.edu.sg\/emf\/wp-content\/uploads\/sites\/40\/2023\/10\/PHOTO-2023-10-13-18-49-47.jpg","width":675,"height":375,"caption":"EMF"},"image":{"@id":"https:\/\/cde.nus.edu.sg\/emf\/#\/schema\/logo\/image\/"}}]}},"_links":{"self":[{"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/pages\/16263","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/users\/289"}],"replies":[{"embeddable":true,"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/comments?post=16263"}],"version-history":[{"count":5,"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/pages\/16263\/revisions"}],"predecessor-version":[{"id":17451,"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/pages\/16263\/revisions\/17451"}],"wp:attachment":[{"href":"https:\/\/cde.nus.edu.sg\/emf\/wp-json\/wp\/v2\/media?parent=16263"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}