Atom Probe Tomography

Large Field-of-view APT

CAMECA Invizo 6000

The Invizo 6000 is a next-generation atom probe microscope for three-dimensional chemical analysis at near-atomic resolution. It combines laser- and voltage-pulsed field evaporation with a high-efficiency detection system to deliver quantitative 3D compositional mapping with ppm-level sensitivity. With its ultra-wide field of view and high acquisition rates, the Invizo 6000 is particularly well suited for high-throughput analysis of nanoscale heterogeneities in most advanced material systems including modern alloys and semiconductor devices.

  • Counter electrode concept
  • Laser pulsing mode with 257.5 nm deep UV dual laser
  • Double einzel lens with high mass resolving power
  • Ultra-wide field-of-view: >200 nm
  • Chemical sensitivity: ~5 ppm
  • Acquisition rates and yields: >1 million ions/min
  • Near-atomic spatial resolution

Location: E7-01

Jonathan Setyadji
jo01ji@nus.edu.sg