MASK ALIGNER MA6 (CLASS 10K)
System Overview
Model: Karl Suss MA6
Technical Specifications
- UV400 Exposure Optics
- Wavelength: 365nm and 405nm
- Substrate Size: irregular to standard 2” dia wafer
- Mask Size: Typical 3” square
- Wafer Thickness: < 4 mm
Location: E6-02-07, Level 2 Cleanroom, Class 10000
Contact: e6nanofab@nus.edu.sg