Main Menu Cleanrooms 2D Material Transfer Station w Glovebox – HQ Graphene Vigor 3D Aerosol Jet Printer – Optomec Acid Wet Bench Atomic Force/Scanning Probe Microscopy (AFM/SPM) – Park NX20 Chemical Mechanical Planarization – Logitech Orbis Die Bonder – Fineplacer Sigma Electron Beam Lithography (EBL) – Raith EBPG5200 Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8100 Four Point Probe Station – AIT Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50 Horizontal Furnace – ULTECH Hot Plate Ion Beam Deposition & Etching – SCIA Coat 200 Laser Writer – DMO MicroWriter ML3 Pro Laser Writer – Heidelberg DWL 66+ Mask Aligner – SUSS MA8 Optical Microscope – Nikon Eclipse L200N / Keyence VHX Plasma Cleaner – Femtoscience Vita 12 Raman Microscope – Renishaw inVia Rapid Thermal Processing – Annealsys AS-One Solvent Wet Bench Spin Coater Sputtering System – AJA ATC2400 Sputtering System – AJA UHV Ultra High Vacuum E-Beam Evaporation UV Ozone Cleaner – Samco UV-1 Dry Lab Cryogenic Probe Station – Semishare SCG-C-2 Electron-Beam Evaporator – AJA UHV Field Emission Scanning Electron Microscope – Hitachi Regulus 8100 Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8230 Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) – Tescan GAIA3 Molecular Beam Epitaxy (MBE) – ULVAC Laser Micro-Machining Service Raman Microscope – Renishaw inVia Rapid Thermal Processing – ULVAC MILA3000 Semi Automatic Wafer Dicer – Accretech SS20 Scanning Magneto-Optical Kerr Effect (SMOKE) Microscope – Evico Magnetics Superconducting Quantum Interfernce Device (SQUID) Magnetometer – Quantum Design MPMS3 Surface Profiler – Bruker DektakXT Wire Bonder – West Bond 7476E Vibrating Sample Magnetometer (VSM) – MicroSense EZ9 X-ray Diffractometer (XRD) – Rigaku SmartLab Wet Lab Tool Booking Equipment lists by cleanroom locations l1 cleanroom L2 Cleanroom L5 Cleanroom L1 Cleanroom Laser Writer – DMO MicroWriter ML3 Pro Read More → Laser Writer – Heidelberg DWL 66+ Read More → Mask Aligner – SUSS MA8 Read More → Solvent Wet Bench Read More → Spin Coater Read More → Electron Beam Lithography (EBL) – Raith EBPG5200 Read More → Ultra High Vacuum E-Beam Evaporation Read More → Sputtering System – AJA UHV Read More → Ion Beam Deposition & Etching – SCIA Coat 200 Read More → Chemical Mechanical Planarization – Logitech Orbis Read More → Rapid Thermal Processing – Annealsys AS-One Read More → Horizontal Furnace – ULTECH Read More → 2D Material Transfer Station w Glovebox – HQ Graphene Vigor Read More → Plasma Cleaner – Femtoscience Vita 12 Read More → Hot Plate Read More → Atomic Force/Scanning Probe Microscopy (AFM/SPM) – Park NX20 Read More → Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8100 Read More → Die Bonder – Fineplacer Sigma Read More → Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50 Read More → Four Point Probe Station – AIT Read More → Raman Microscope – Renishaw inVia Read More → Optical Microscope – Nikon Eclipse L200N / Keyence VHX Read More → Acid Wet Bench Read More → Sputtering System – AJA ATC2400 Read More → 3D Aerosol Jet Printer – Optomec Read More → UV Ozone Cleaner with Ozone Evacuator – Novascan Read More → L2 Cleanroom Die Bonder – Fineplacer Sigma Read More → 3D Two-Photon Lithography Printer – Nanoscribe GT2 Read More → L5 Cleanroom Atomic Layer Deposition (ALD) – Picosun Read More → Inductively Coupled Plasma Reactive Ion Etcher – Oxford PlasmaPro 100 Cobralon Read More → Atomic Layer Deposition (ALD) – BeneQ Read More → Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) – Oxford PlasmaPro 100 Cobra Read More → Plasma Asher – Samco PC-300 Read More → Ellipsometer – Semilab SE-2000 Read More → Infrared Reflow Oven – Invacu VSU35 Read More → Back to top Nanofabrication and process capability
