Main Menu Cleanrooms Dry Lab Wet Lab Tool Booking Equipment lists by cleanroom locations l1 cleanroom L2 Cleanroom L5 Cleanroom L1 Cleanroom Electron Beam Lithography (EBL) – Raith EBPG5200 Read More → Ultra High Vacuum E-Beam Evaporation Read More → Ultra High Vacuum Metal and Dielectric Sputtering Read More → Ion Beam Deposition & Etching – SCIA Coat 200 Read More → Mask Aligner – SUSS MA8 Read More → Chemical Mechanical Planarization – Logitech Orbis Read More → Rapid Thermal Processing – Annealsys AS-One Read More → Horizontal Furnace – ULTECH Read More → 2D Material Transfer Station w Glovebox – HQ Graphene Vigor Read More → Plasma Cleaner – Femtoscience Vita 12 Read More → Laser Writer – Heidelberg DWL 66+ Read More → Laser Writer – DMO MicroWriter ML3 Pro Read More → Atomic Force/Scanning Probe Microscopy (AFM/SPM) – Park NX20 Read More → Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8100 Read More → Die Bonder – Fineplacer Sigma Read More → Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50 Read More → Four Point Probe Station – AIT Read More → Raman Microscope – Renishaw inVia Read More → Optical Microscope – Nikon Eclipse L200N / Keyence VHX Read More → Spin Coater (Class 10) Read More → Solvent Wet Bench (Class 10) Read More → Acid Wet Bench Read More → Hot Plate (Class 10) Read More → UV Ozone Cleaner – Samco UV-1 Read More → Sputtering System – AJA UHV / AJA ATC2400 Read More → 3D Aerosol Jet Printer – Optomec Read More → L2 Cleanroom Die Bonder – Fineplacer Sigma Read More → 3D Two-Photon Lithography Printer – Nanoscribe GT2 Read More → L5 Cleanroom Atomic Layer Deposition (ALD) – Picosun Read More → Inductively Coupled Plasma Reactive Ion Etcher – Oxford PlasmaPro 100 Cobralon Read More → Atomic Layer Deposition (ALD) – BeneQ Read More → Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) – Oxford PlasmaPro 100 Cobra Read More → Plasma Asher – Samco PC-300 Read More → Ellipsometer – Semilab SE-2000 Read More → Infrared Reflow Oven – Invacu VSU35 Read More → Back to top Nanofabrication and process capability
