Key Features

• Process Environment: Nitrogen, inert gas, formic acid,
  forming gas
• Maximum Temperature: 450°C
• Heating Area: 320 x 320 mm
• Heating Plate: Removable graphite
• Clearance Above Heating Plate: 60mm
• Heat Up / Cool Down Ramp Rate: 250°C/min
• Control Deviation: +/- 0.5°C
• Heating Elements: 8x infrared lamps
  (under graphite)
• Heating Control: Individual/adjustable
• Cooling of Heating Plate: Nitrogen flow
• Temperature Measurement: 2x
  thermocouples, K Type
• Pressure Measurement: Integrated
  pressure transmitter
• Maximum Vacuum: 1×10-2 mbar
• Cooling of Chamber Body: Water/
  Ethylene/Glycol
• Display: 10″ LCD with touch screen
• User Interface: Remote control over relay I/Os

 Location: NUS SHINE Centre, E6, Level 6 Dry Lab

Contact: e6nanofab@nus.edu.s