Main Menu Cleanrooms Dry Lab Wet Lab Tool Booking Equipment lists by capability located in respective dry labs across L2, L3, L5 and L6. DEPOSITION CHARACTERISATION METROLOGY & TEST BEOL & Packaging OTHERS DEPOSITION Electron-Beam Evaporator – AJA UHV Read More → Molecular Beam Epitaxy (MBE) – ULVAC Read More → CHARACTERISATION Scanning Magneto-Optical Kerr Effect (SMOKE) Microscope – Evico Magnetics Read More → Superconducting Quantum Interfernce Device (SQUID) Magnetometer – Quantum Design MPMS3 Read More → Surface Profiler – Bruker DektakXT Read More → Vibrating Sample Magnetometer (VSM) – MicroSense EZ9 Read More → X-ray Diffractometer (XRD) – Rigaku SmartLab Read More → METROLOGY & TEST Cryogenic Probe Station – Semishare SCG-C-2 Read More → Field Emission Scanning Electron Microscope – Hitachi Regulus 8100 Read More → Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8230 Read More → Focused Ion Beam Scanning Electron Microscope (FIB-SEM) – Tescan GAIA3 Read More → Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50 Read More → Raman Microscope – Renishaw inVia Read More → BEOL & PACKAGING Semi Automatic Wafer Dicer – Accretech SS20 Read More → Wire Bonder – West Bond 7476E Read More → Others Laser Micro-Machining Service Read More → Rapid Thermal Processing – ULVAC MILA3000 Read More → Back to top Nanofabrication and process capability
