System Overview

FESEM JSM-6700F is a high-resolution and easy-to-operate scanning  electron microscope, which employs a field-emission gun for the electron source and state-of-the-art computer technology for the image-display system. This system detects the secondary electrons to image the topography of the sample. The minimum feature is around 50nm.

Location: E6-03-02, Metrology

Contact: e6nanofab@nus.edu.sg