Full motorized system with total of 11 degrees of freedom. The system is placed inside a glovebox for O2/moisture sensitive materials transfer. The station is fully controlled by a computer outside the glovebox.

Technical specifications

• Can move sample: X,Y,Z Rotation (up to 50mm / ±180° -> almost 360° total)
• Can move mask: X,Y, Rotation (up to 50mm / 90°)
• Can tilt mask: Pitch / Roll 5°
• (Auto) Focus
• Dark field capable microscope 5, 10, 20, 50x objectives
• Sample heating: up to 180deg with 0.1deg control accuracy, Peltier cooling

Location: L1 Cleanroom, Class 100 Area

Contact: e6nanofab@nus.edu.sg