System Overview 

Multipurpose XRD

Technical Specifications

• 3kW sealed tube
• 0D, 1D detector
• Horizontal Goniometer, independent and high resolution omega & 2theta (2θ) scan
• Theta (θ) / 2θ accuracy and reproducibility: ≤0.02 on Si powder
• Applications up to 4 inch: High-resolution XRD (HRXRD) or reciprocal space mapping (RSM) (1-D and O-D with analyzer); rocking curve; XRR, Grazing incidence; inplane grazing incidence, pole figure, SAXS, powder diffraction
• Theta (θ) / 2θ up to 8 inch

Location: E6-05-08, Characterization Room

Contact: e6nanofab@nus.edu.sg