UV Ozone Cleaner with Ozone Evacuator - Novascan
System Overview
The UV Ozone Cleaner removes organic contaminants from wafer surfaces by generating ozone using specific wavelengths of UV light, preparing the surfaces for subsequent processes.
Technical Specifications
- Maximum Sample Size: 8 inches (approx. 203 × 203 mm)
- UV Light Source: Low-pressure mercury UV lamp (185 nm and 254 nm)
- Sample Height: Adjustable from 0 to 4 inches (100 mm) for tall samples
- Temperature-Controlled Stage: Up to 200°C
- Ozone Removal: Equipped with an external ozone evacuator for removal of residual ozone after processing
Location: L1 Class 10 Cleanroom
Contact: e6nanofab@nus.edu.sg