The Park NX20 AFM features the world’s only True Non-Contact™ mode, allowing users to take both repeated measurements without damaging sample surface while preserving tip sharpness. Reputed as the world’s most accurate large sample AFM, The Park NX20 is a leading nano metrology tool for failure analysis and large sample research.

Technical Specifications

• Large sample measurement of up to 300 mm.
• Park SmartScan™ – powerful operating software automates processes which drastically improve efficiency and guides user through every step of the imaging process.

Incorporated Scanning Modes

• True Non-Contact™ mode
• Dynamic contact mode
• Contact mode
• Magnetic Force Microscopy (MFM)
• Phase Imaging
• Lateral Force Microscopy (LFM)
• Force-Distance (F/D) Spectroscopy
• Force volume Imaging
• Electricstatic Force Microscopy (EFM)
• Piezoresponse Force Microscopy (PFM)
• Scanning Kelvin Probe Microscopy (SKPM)
• Force Modulation Microscopy (FMM)
• Nanoindentation
• Nanolithography
• Variable Enhanced Conductive AFM (VECA)
• Scanning Capacitance Microscopy (SCM)

AFM, MFM, CAFM, SCM

Location: E6-01-02, Class 100 Cleanroom

Contact: e6nanofab@nus.edu.sg