System Overview

Multi-signal detection and imaging system, for elemental composition, crystal and surface information.

• Model: Hitachi Regulus 8100

Technical Specifications

• Accelerating Voltage: 0.5 – 30kV
• Resolution: 0.8nm at 15kV (SE) 1.1nm at 1kV w/ deceleration (SE)
• Magnification Range: 20X – 2,000 X (Low Mag) 100X – 1,000,000X (High Mag)
• Detectors: Lower/ Upper/ Top, YAG BSE, STEM (Bright-Field/ PD-Dark Field).
• Stage Traverse: (5-axis Motorized)
                            X: 0 – 110mm
                            Y: 0 – 11mm
                            Z: 1.5 – 40mm
                            R: 360°
                            T: -5° – +70°
• Observable Range: 150mm dia. (MAX Sample Size)
• Specimen Exchange Chamber size: 6 inch dia.
• Mountable specimen thickness: 27mm (Diameter ≦ 33mm)

 Location: E6-01, L1 Cleanroom

 Contact:   e6nanofab@nus.edu.sg