Edward Evaporation System for Metal Deposition

Model: Edward Auto 306 Turbo

Substrate Size
Irregular to standard 8”dia wafer

Metals
Aluminum, Nickel, Titanium, Gold, Gold-Germanium, Palladium and Platinum.

The Application
The heating is carried out by passing a large current through a filament container
(tungsten boat or material coated tungsten rod), which has a finite electrical resistance.

Location: E6-02-08

Contact: e6nanofab@nus.edu.sg