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Applied Materials Corp Lab
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L1 CR
LITHOGRAPHY
The Capabilities
Hot Plate
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ETCHING
L1 CR
Plasma Cleaner – Femtoscience Vita 12
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L1 CR
Others
2D Material Transfer Station w Glovebox – HQ Graphene Vigor
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ANNEALING PROCESS
L1 CR
The Capabilities
Horizontal Furnace – ULTECH
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ANNEALING PROCESS
L1 CR
The Capabilities
Rapid Thermal Processing – Annealsys AS-One
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ETCHING
L1 CR
The Capabilities
Chemical Mechanical Planarization – Logitech Orbis
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L1 CR
MAGNETIC PROCESSING
The Capabilities
Ion Beam Deposition & Etching – SCIA Coat 200
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DEPOSITION AND GROWTH
L1 CR
The Capabilities
Sputtering System – AJA UHV
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DEPOSITION AND GROWTH
L1 CR
The Capabilities
Ultra High Vacuum E-Beam Evaporation
By
L1 CR
LITHOGRAPHY
The Capabilities
Electron Beam Lithography (EBL) – Raith EBPG5200
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