L1 CR – Page 2 – E6NANOFAB

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PARK_AFM E6-01-02 (Demo)

By Characterisation and Metrology L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Atomic Force/Scanning Probe Microscopy (AFM/SPM) – Park NX20

HotplateCR10

By L1 CR LITHOGRAPHY The Capabilities

Hot Plate

VITA (Demo)

By ETCHING L1 CR

Plasma Cleaner – Femtoscience Vita 12

2D Material Transfer Station w Glove Box (Demo)

By L1 CR Others

2D Material Transfer Station w Glovebox – HQ Graphene Vigor

furnace

By ANNEALING PROCESS L1 CR The Capabilities

Horizontal Furnace – ULTECH

L1 CR_RTP (Demo)

By ANNEALING PROCESS L1 CR The Capabilities

Rapid Thermal Processing – Annealsys AS-One

L1 CR CMP tool close up w people_medium (Demo)

By ETCHING L1 CR The Capabilities

Chemical Mechanical Planarization – Logitech Orbis

SCIA Coat 200 Ion Beam Deposition and Etching

By L1 CR MAGNETIC PROCESSING The Capabilities

Ion Beam Deposition & Etching – SCIA Coat 200

L1 CR_AJA Sputter (Demo)

By DEPOSITION AND GROWTH L1 CR The Capabilities

Sputtering System – AJA UHV

L1-CR_AJA-EBeam

By DEPOSITION AND GROWTH L1 CR The Capabilities

Ultra High Vacuum E-Beam Evaporation

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