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E6NanoFab Members
Applied Materials Corp Lab
SHINE
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L1 CR
LITHOGRAPHY
The Capabilities
Hot Plate (Class 10)
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LITHOGRAPHY
The Capabilities
Solvent Wet Bench (Class 10)
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The Capabilities
Spin Coater (Class 10)
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The Capabilities
Wet Processing (Class 10K)
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The Capabilities
Baking Oven (Class 10K)
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L1 CR
LITHOGRAPHY
The Capabilities
Laser Writer – DMO MicroWriter ML3 Pro
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L1 CR
LITHOGRAPHY
The Capabilities
Laser Writer – Heidelberg DWL 66+
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L1 CR
LITHOGRAPHY
The Capabilities
Mask Aligner – SUSS MA8
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L1 CR
LITHOGRAPHY
The Capabilities
Electron Beam Lithography (EBL) – Raith EBPG5200
