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Applied Materials Corp Lab
SHINE
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L1 CR
LITHOGRAPHY
The Capabilities
Hot Plate
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Baking Oven
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Electron Beam Lithography (EBL) – Raith EBPG5200
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Wet Processing
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Spin Coater
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Solvent Wet Bench
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Mask Aligner – SUSS MA8
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Laser Writer – Heidelberg DWL 66+
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Laser Writer – DMO MicroWriter ML3 Pro
