Research Facilities
NUS and CDE have made strategic investments in state-of-the-art shared research facilities that provide a competitive edge for our researchers and partners. These facilities serve as dynamic intersections of disciplines and idea exchange, enabling cutting-edge research and large-scale collaborative programme. As part of a broader network of NUS Facilities and Singapore-wide facilities, they are accessible to both CDE researchers and external partners.
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OVERVIEW
E6NanoFab provides cutting-edge cleanroom facilities (class 10 to class 10,000) for the fabrication of sensitive micro and nanoscale devices. These controlled environments are complemented by fully equipped dry and wet labs, supporting a diverse range of experiments and processes. Our mission is to advance nanofabrication research by offering world-class technology, enabling the integration of multiple materials and devices into innovative nanoscale structures. E6NanoFab aims to be a leading hub for interdisciplinary research, driving scientific and engineering breakthroughs in nanoscale technology. Ultimately, our vision is to foster discoveries that improve lives and create lasting impact through nanotechnology advancements.
KEY RESEARCH
- Micro-Nanofabrication: Advancing techniques for the fabrication of micro and nanoscale devices.
- Materials Science: Exploration and development of new materials for microelectronics and nanotechnology.
- Device Design & Development: Focus on innovative device structures and applications.
- Healthcare Innovation: Development of nanoscale solutions for healthcare advancements.
- Defense Technologies: Exploration of nanoscale devices for defense and security applications.
- Electronics & Semiconductors: Advancing microelectronics for next-generation devices and systems.
- Industry Collaboration: Supporting academic and industrial partnerships for technology transfer and commercialization.
CONTACT
Phone: 6601 6048
OVERVIEW
The Electron Microscopy Facility (EMF) focuses on the science and application of electron and ion-beam microscopy.
Interdisciplinary Collaborations and External Stakeholders: At EMF, we serve all institutional departments by providing state-of-the-art instrumentation and the expertise required for high-resolution imaging — down to the atomic-level — of a wide variety of materials.
KEY RESEARCH
Our comprehensive suite of instrumentation includes a 5th order aberration-corrected scanning transmission electron microscope (STEM) equipped with Energy-Dispersive X-ray Spectrometer (EDS), Electron Energy Loss Spectrometer (EELS), 4D-STEM detector, and a variety of in-situ sample holders (cryo transfer, biasing & heating, gas cell), as well as He-ion, Ne-ion, and Ga-ion focused ion beams for patterning and sample preparation. Some of our key research equipment include:
- Transmission Electron Microscopes: Aberration-corrected Analytical S/TEM JEOL JEM-ARM200F, High-throughput Analytical S/TEM, High-resolution Analytical TEM, Educational TEM
- Focused Ion Beam Microscopes: Ga+ Sample Preparation FIB, Ga+ Large-chamber FIB, He+/Ne+ High-resolution FIB
- Scanning Electron Microscopes: Field-emission SEM, Field-emission SEM
CONTACT
Email: emf@nus.edu.sg
Address: EMF @NUS
College of Design and Engineering
E7 Building Level 1
Singapore 119276
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