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Applied Materials Corp Lab
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DEPOSITION AND GROWTH
DL Deposition
Dry Lab
Wet Lab
Electron-Beam Evaporator – AJA UHV
By
BEOL
L1 CR
Die Bonder – Fineplacer Sigma
By
ETCHING
L5 CR
The Capabilities
Plasma Asher – Samco PC-300
By
ETCHING
The Capabilities
Xenon Difluoride (XeF2) Etcher – Penta Technology
By
Decommission
The Capabilities
Mask Aligner MA6 (Class 10K)
By
L1 CR
LITHOGRAPHY
The Capabilities
Hot Plate
By
ETCHING
L1 CR
Plasma Cleaner – Femtoscience Vita 12
By
ANNEALING PROCESS
L1 CR
The Capabilities
Horizontal Furnace – ULTECH
By
ANNEALING PROCESS
DL Others
Dry Lab
The Capabilities
Rapid Thermal Processing – ULVAC MILA3000
By
ANNEALING PROCESS
L1 CR
The Capabilities
Rapid Thermal Processing – Annealsys AS-One
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