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Applied Materials Corp Lab
SHINE
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ETCHING
L1 CR
The Capabilities
Chemical Mechanical Planarization – Logitech Orbis
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L1 CR
MAGNETIC PROCESSING
The Capabilities
Ion Beam Deposition & Etching – SCIA Coat 200
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DEPOSITION AND GROWTH
L1 CR
The Capabilities
Sputtering System – AJA UHV
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DEPOSITION AND GROWTH
L1 CR
The Capabilities
Ultra High Vacuum E-Beam Evaporation
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LITHOGRAPHY
The Capabilities
Baking Oven
By
L1 CR
LITHOGRAPHY
The Capabilities
Electron Beam Lithography (EBL) – Raith EBPG5200
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LITHOGRAPHY
The Capabilities
Wet Processing
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L1 CR
LITHOGRAPHY
The Capabilities
Spin Coater
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L1 CR
LITHOGRAPHY
The Capabilities
Solvent Wet Bench
By
L1 CR
LITHOGRAPHY
The Capabilities
Mask Aligner – SUSS MA8
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