The Capabilities – Page 3 – E6NANOFAB

L1 Class10_Lithography_ Laser Writer DWL66 (Demo)

By L1 CR LITHOGRAPHY The Capabilities

12 Nov: Laser Writer – Hiedelberg (Class 10)

L1 CR_Ellionix_landscape_full_medium (Demo)

By L1 CR LITHOGRAPHY The Capabilities

12 Nov: Electron Beam Lithography – Ellionix

Raith EBL

By L1 CR LITHOGRAPHY The Capabilities

12 Nov: Electron Beam Lithography Ultra High Performance – Raith

L1 CR Magnetic Annealing System (Demo)

By MAGNETIC PROCESSING The Capabilities

12 Nov: Magnetic Annealing System

L2_CR_Mask Aligner (MA6) (Demo)

By L2 CR LITHOGRAPHY The Capabilities

12 Nov: Mask Aligner MA6 (Class 10K)

L1 CR_Mask Aligner (MA8) (Demo)

By L1 CR LITHOGRAPHY The Capabilities

12 Nov: Mask Aligner MA8 (Class 100)

SCIA Coat 200 Ion Beam Deposition and Etching

By L1 CR MAGNETIC PROCESSING The Capabilities

28 Oct: SCIA Coat 200 – Ion Beam Deposition and Etching

furnace

By ANNEALING PROCESS L1 CR The Capabilities

17 Oct: Furnace

L2 CR_RTA-300x200 (Demo)

By ANNEALING PROCESS DL Others Dry Lab The Capabilities

17 Oct: Rapid Thermal Annealing

L1 CR_RTP (Demo)

By ANNEALING PROCESS L1 CR The Capabilities

17 Oct: Rapid Thermal Processing (aka Vaccum Anneal – RTP)

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