Research Interests
Micro/nano-electromechanical Systems (MEMS/NEMS)
Optical microsystems
Nanophotonics, silicon photonics
Micro and nano fabrication
Sensors, optical precision measurement techniques
Research Interests
Micro/nano-electromechanical Systems (MEMS/NEMS)
Optical microsystems
Nanophotonics, silicon photonics
Micro and nano fabrication
Sensors, optical precision measurement techniques