Cleanrooms – Page 2 – E6NANOFAB

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Acid wet bench in class 100 (Demo)

By L1 CR

Acid Wet Bench

L1CR_Solvent Wet bench (Demo)

By L1 CR LITHOGRAPHY The Capabilities

Solvent Wet Bench (Class 10)

L1 CR_Spin Coater (Demo)

By L1 CR LITHOGRAPHY The Capabilities

Spin Coater (Class 10)

Optical-Microscope-300x300 (Demo)

By L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Optical Microscope – Nikon Eclipse L200N / Keyence VHX

e6nanofab; unveristy nabofabrication facility

By Characterisation and Metrology L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Raman Microscope – Renishaw inVia

4 point probe (Demo)

By Electrical Test L1 CR Others

Four Point Probe Station – AIT

L1 CR Class 100 FTIR (Demo)

By Characterisation and Metrology Cleanrooms DL Metrology & Test L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50

Die Bonder

By BEOL L1 CR

Die Bonder – Fineplacer Sigma

Plasma Etcher_E6-05-09 (Demo)

By ETCHING L5 CR The Capabilities

Plasma Asher – Samco PC-300

Regulus 8100

By Cleanrooms L1 CR METROLOGY

Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8100

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