Facility – Page 3 – E6NANOFAB

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JEOL-JSM-6700F-300x227 (Demo)

By DL Metrology & Test METROLOGY

Field Emission Scanning Electron Microscope – Hitachi Regulus 8100

Hitachi Regulus 8230

By DL Metrology & Test METROLOGY

Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8230

L3 Tescan FIB-SEM (Demo)

By DL Metrology & Test METROLOGY Metrology & Test

Focused Ion Beam Scanning Electron Microscope (FIB-SEM) – Tescan GAIA3

260818_Die bonder

By L2 CR

Die Bonder – Fineplacer Sigma

Edward

By DEPOSITION AND GROWTH DL Deposition Dry Lab Wet Lab

Electron-Beam Evaporator – AJA UHV

Acid wet bench in class 100 (Demo)

By L1 CR

Acid Wet Bench

Optical-Microscope-300x300 (Demo)

By L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Optical Microscope – Nikon Eclipse L200N / Keyence VHX

e6nanofab; unveristy nabofabrication facility

By Characterisation and Metrology L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Raman Microscope – Renishaw inVia

4 point probe (Demo)

By Electrical Test L1 CR Others

Four Point Probe Station – AIT

L1 CR Class 100 FTIR (Demo)

By Characterisation and Metrology Cleanrooms DL Metrology & Test L1 CR MATERIAL CHARACTERIZATION AND PROCESS CONTROL

Fourier Transform Infrared (FTIR) Spectrometer – Thermo Fisher Nicolet iS50

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