Deposition and Growth Atomic Layer Deposition (ALD) – BeneQ Atomic Layer Deposition (ALD) – Picosun Plasma Enhanced Chemical Vapour Deposition (PECVD) – Oxford PlasmaPro 100 Electron Beam Evaporator – AJA UHV Sputtering System – AJA UHV / AJA ATC2400 Molecular Beam Epitaxy (MBE) – ULVAC Annealing Process Horizontal Furnace – ULTECH Rapid Thermal Processing (RTP) ULVAC MILA3000 Rapid Thermal Processing (RTP) – Annealsys AS-One Magnetic Processing Ion Beam Deposition and Etching -SCIA Coat 200 Lithography Baking Oven Electron Beam Lithography (EBL) – Raith EBPG5200 Hot Plate Laser Writer – DMO MicroWriter ML3 Pro Laser Writer – Heidelberg DWL 66+ Mask Aligner – SUSS MA8 Nanoimprinter – Nanonex NX-2000 Spin Coater Solvent Wet Bench Wet Processing Etching Chemical Mechanical Planarisation (CMP) – Logitech Orbis Inductively Coupled Plasma Reactive Ion Etcher (ICP RIE) – Oxford PlasmaPro 100 Cobra Plasma Asher – Samco PC-300 Plasma Cleaner – Femtoscience Vita 12 Xenon Difluoride (XeF2) Etcher – Penta Technology BEOL and Packaging Automatic Milling, Grinding and Polishing Machine – X-Prep Die Bonder – Fineplacer Sigma Infrared Reflow Oven – Invacu VSU35 Semi Automatic Wafer Dicer – Accretech SS20 Wire Bonder – West Bond 7476E Characterisation and Metrology Atomic Force/Scanning Probe Microscopy (AFM/SPM) – Park NX20 Ellipsometer – Semilab SE-2000 Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8100 Field Emission Scanning Electron Microscope (FE-SEM) – Hitachi Regulus 8230 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) – Tescan GAIA3 Raman Microscope – Renishaw inVia Scanning Magneto-Optical Kerr Effect (SMOKE) Microscope – Evico Magnetics Surface Profiler – Bruker DektakXT Superconducting Quantum Interfernce Device (SQUID) Magnetometer – Quantum Design MPMS3 Vibrating Sample Magnetometer (VSM) – MicroSense EZ9 X-ray Diffractometer (XRD) – Rigaku SmartLab Others 2D Material Transfer Station w Glovebox – HQ Graphene Vigor 3D Aerosol Jet Printer – Optomec 3D Two-Photon Lithography Printer – Nanoscribe GT2 Cryogenic Probe Station – Semishare SCG-C-2 Four Point Probe Station – AIT Laser Micro-Machining Service Tool Booking 3D PRINTING, ELECTRICAL TEST AND OTHERS 2D Material Transfer Station w Glovebox – HQ Graphene Vigor Read More → 3D Aerosol Jet Printer – Optomec Read More → 3D Two-Photon Lithography Printer – Nanoscribe GT2 Read More → Cryogenic Probe Station – Semishare SCG-C-2 Read More → Four Point Probe Station – AIT Read More → Laser Micro-Machining Service Read More → UV Ozone Cleaner with Ozone Evacuator – Novascan- Novascan Read More → Nanofabrication process and capability Characterisation and metroloy capability Back to top
