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SHINE_INVACU INFRARED VACUUM REFLOW OVEN
By BEOL L5 CR

Invacu Infrared Vacuum Reflex Oven

 

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MBE
By DEPOSITION AND GROWTH DL Deposition MBE The Capabilities

Molecular Beam Epitaxy (MBE) System for the Growth of a Range of Group III-V/II-IV Materials

 

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ICP_E6-05-09 (Demo)
By ETCHING L5 CR The Capabilities

Integrated ICP Etch Clustering System

 

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Picosun ALD photo1-cropped
By DEPOSITION AND GROWTH L5 CR The Capabilities

Atomic Layer Deposition (ALD) (Picosun)

 

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PECVD_E6-05-09 (Demo)
By DEPOSITION AND GROWTH L5 CR The Capabilities

Plasma Enhanced Chemical Vapour Deposition (PECVD)

 

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Die Bonder
By BEOL Wet Lab

X-Prep Automatic Milling, Grinding & Polishing Machine

 

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L5 Wirebonder (Demo)
By BEOL DL BEOL

Wire Bonder

 

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L3 Accretech Wafer Dicer (Demo)
By BEOL DL BEOL

Wafer Dicer

 

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Edward
By DEPOSITION AND GROWTH DL Deposition Dry Lab Wet Lab

E-Beam Evaporator

 

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HotplateCR10
By L1 CR LITHOGRAPHY The Capabilities

Hot Plate (Class 10)

 

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E6NanoFab

  • 6601 8522 | 6601 6048
  • e6nanofab@nus.edu.sg
Office Address

Block E6, Level 5, E6-05-03
5 Engineering Drive 1, Singapore 117608

Mailing Address

c/o Department of Electrical and Computer Engineering
4 Engineering Drive 3, Block E4, # E4-5-42 Singapore 117583