Designing Clean Metal Etch and FOUP Handling for SRAM Yield: A Case Study on Via Bottom Void Failures

Mr Duan Zhigang
Graduate Student, ECE Dept, NUS

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Event Details

Date & Time

22 July 2026, Wednesday
15:00 PM - 15:30 PM

Venue

https://nus-sg.zoom.us/j/83103448185?pwd=g4yik00d58ooOM3lXa4YryPfa8Qsnf.1

Organiser

Assoc Prof Zhu Chun Xiang & Prof Guo Yongxin